Lift assemblies, and related methods and components, for substrate processing chambers

Patent metadata

Field	Value
Publication number	US-12428753-B2
Application number	US-202318106155-A
Country	US
Kind code	B2
Filing date	Feb 6, 2023
Priority date	Dec 14, 2022
Publication date	Sep 30, 2025
Grant date	Sep 30, 2025

Abstract

The present disclosure relates to lift assemblies, and related methods and components, for substrate processing chambers. In one implementation, a lift assembly for disposition in relation to a substrate processing chamber includes a first motor, a first drive assembly coupled to the first motor, and a first support block coupled to the first drive assembly. The first motor is configured to linearly move the first support block using the first drive assembly. The lift assembly includes a second motor, a second drive assembly coupled to the second motor, and a second support block coupled to the second drive assembly. The second motor is configured to linearly move the second support block using the second drive assembly, and the second motor is configured to linearly move the second support block independently of the first motor linearly moving the first support block.

First claim

What is claimed is:

1. A lift assembly for disposition in relation to a substrate processing chamber, the lift assembly comprising:
a first motor;
a first drive assembly comprising:
a first drive shaft coupled to the first motor, the first motor configured to rotate the first drive shaft,
a first support block coupled to the first drive assembly, the first motor configured to linearly move the first support block using the first drive assembly, and
a first traveling block disposed along the first drive shaft, the first traveling block coupled to the first support block;

a second motor;
a second drive assembly coupled to the second motor;
a second support block coupled to the second drive assembly, the second motor configured to linearly move the second support block using the second drive assembly, the second motor configured to linearly move the second support block independently of the first motor linearly moving the first support block;
a support beam; and
a mount block coupled to the support beam, wherein each of the first motor and the second motor is coupled to the mount block.

2. The lift assembly of claim 1 , wherein:
the second drive assembly comprises:
a second drive shaft coupled to the second motor, wherein the second motor is configured to rotate the second drive shaft, and
a second traveling block disposed along the second drive shaft, wherein the second traveling block is coupled to the second support block.

3. The lift assembly of claim 2 , wherein:
the first drive shaft is a first lead screw, and a first threaded interface is between the first lead screw and the first traveling block; and
the second drive shaft is a second lead screw, and a second threaded interface is between the second lead screw and the second traveling block.

4. The lift assembly of claim 1 , wherein the support beam comprises one or more tracks interfacing with the first support block.

5. The lift assembly of claim 4 , wherein the one or more tracks are one or more openings formed in the support beam, and the first support block comprises one or more first legs that extend through the one or more tracks and couple to the first traveling block.

6. The lift assembly of claim 2 , wherein the second support block comprises one or more legs that couple to the second traveling block.

7. The lift assembly of claim 1 , further comprising a third motor coupled to the first support block.

8. The lift assembly of claim 7 , wherein:
the first support block supports a first shaft of a first support frame such that linear movement of the first support block linearly moves the first support frame;
the second support block supports a second shaft of a second support frame such that linear movement of the second support block linearly moves the second support frame; and
the third motor is configured to rotate the first shaft of the first support frame.

9. An apparatus for substrate processing, comprising:
a chamber body comprising:
a processing volume,
a plurality of gas inject passages formed in the chamber body, and
one or more gas exhaust passages formed in the chamber body;

one or more heat sources configured to generate heat;
a substrate support assembly positioned in the processing volume, the substrate support assembly comprising:
a plurality of lift pins,
one or more substrate supports,
a first support frame comprising a first shaft and a plurality of first arms, the plurality of first arms configured to interface with the plurality of lift pins, and
a second support frame comprising a second shaft and a plurality of second arms, the plurality of second arms configured to support the one or more substrate supports; and

a lift assembly comprising:
a first motor,
a first support block coupled to the first motor and the first shaft of the first support frame, the first motor configured to linearly move the first support block and the first support frame,
a second motor,
a second support block coupled to the second motor and the second shaft of the second support frame, the second motor configured to linearly move the second support block and the second support frame independently of the first motor linearly moving the first support block and the first support frame
a support beam, and
a mount block coupled to the support beam, wherein each of the first motor and the second motor is coupled to the mount block.

10. The apparatus of claim 9 , further comprising:
a first drive assembly coupled to the first motor and the first support block, wherein the first motor is configured to linearly move the first support block and the first support frame using the first drive assembly; and
a second drive assembly coupled to the second motor and the second support block, wherein the second motor is configured to linearly move the second support block and the second support frame using the second drive assembly.

11. The apparatus of claim 10 , wherein:
the first drive assembly comprises:
a first drive shaft coupled to the first motor, wherein the first motor is configured to rotate the first drive shaft, and
a first traveling block disposed along the first drive shaft, wherein the first traveling block is coupled to the first support block; and

the second drive assembly comprises:
a second drive shaft coupled to the second motor, wherein the second motor is configured to rotate the second drive shaft, and
a second traveling block disposed along the second drive shaft, wherein the second traveling block is coupled to the second support block.

12. The apparatus of claim 11 , further comprising a third motor coupled to the first support block.

13. The apparatus of claim 12 , wherein:
linear movement of the first traveling block linearly moves the first support block and the first support frame;
linear movement of the second traveling block linearly moves the second support block and the second support frame; and
the third motor is configured to rotate the first shaft of the first support frame.

14. A method of transferring substrates, comprising:
moving a first substrate into a chamber;
raising a second support frame relative to a first support frame to engage the first substrate, the first support frame comprising a first shaft and a plurality of first arms, and the second support frame comprising a second shaft and a plurality of second arms;
lowering the second support frame relative to the first support frame to land the first substrate on a first substrate support;
raising the first support frame;
moving a second substrate into the chamber;
raising the second support frame relative to the first support frame to engage the second substrate; and
lowering the second support frame relative to the first support frame to land the second substrate on a second substrate support.

15. The method of claim 14 , wherein the second support frame is raised at least partially simultaneously with the raising of the first support frame.

16. The method of claim 14 , wherein the raising of the second support frame to engage the first substrate comprises:
the plurality of second arms raising a plurality of lift pins that engage the first substrate.

17. The method of claim 14 , further comprising:
raising the first support frame into a processing position;
processing the first substrate and the second substrate; and
lowering the first support frame.

18. The method of claim 17 , further comprising:
raising the second support frame relative to the first support frame to engage the second substrate;
lowering the se

Assignees

• Applied Materials Inc

Inventors

• Patil Aniketnitin
• Dhamodharan Raja Murali
• Salinas Martin Jeffrey
• Lau Shu-Kwan

Classifications

• H10P72/7612 Primary

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• C30B25/105

  by irradiation or electric discharge · CPC title

• C30B25/12

  Substrate holders or susceptors · CPC title