Homing methods for lift assemblies, and related apparatus and components, for substrate processing chambers

Patent metadata

Field	Value
Publication number	US-2024326187-A1
Application number	US-202418416346-A
Country	US
Kind code	A1
Filing date	Jan 18, 2024
Priority date	Apr 3, 2023
Publication date	Oct 3, 2024
Grant date	—

Abstract

The disclosure relates to homing methods for lift assemblies, and related apparatus and components, for processing chambers. In one or more embodiments, a non-transitory computer readable medium includes instructions that cause a plurality of operations to be conducted. The operations include detecting a fault condition, and determining a first position of a first support frame along a first movement range. The operations include determining a second position of a second support frame along a second movement range. The second movement range overlaps with the first movement range by an overlap range. The operations include determining if the first position is in an inside condition or an outside condition. The inside condition is within the overlap range, and the outside condition is outside of the overlap range. The operations include moving the first support frame and the second support frame respectively to a first retracted position and a second retracted position.

First claim

What is claimed is:

1 . A non-transitory computer readable medium comprising instructions that, when executed, cause a plurality of operations to be conducted, the plurality of operations comprising:
detecting a fault condition; determining a first position of a first support frame along a first movement range; determining a second position of a second support frame along a second movement range, the second movement range overlapping with the first movement range by an overlap range; determining if the first position is in an inside condition or an outside condition, the inside condition is within the overlap range, and the outside condition is outside of the overlap range; and moving the first support frame and the second support frame respectively to a first retracted position and a second retracted position.

2 . The non-transitory computer readable medium of claim 1 , wherein if the first position is in the outside condition, the moving comprises:
moving the second support frame to the second retracted position; and after the second support frame reaches the second retracted position, moving the first support frame to the first retracted position.

3 . The non-transitory computer readable medium of claim 1 , wherein if the first position is in the inside condition, the moving comprises:
simultaneously moving the first support frame and the second support frame until the first position is in the outside condition; halting the moving of the first support frame; moving the second support frame to the second retracted position; and after the second support frame reaches the second retracted position, moving the first support frame to the first retracted position.

4 . The non-transitory computer readable medium of claim 1 , wherein the first movement range is between a first end linear position and a second end linear position of the first support frame, and the second movement range is between a first end linear position and a second end linear position of the second support frame.

5 . The non-transitory computer readable medium of claim 4 , wherein the first position is a first linear position of a first support block that supports a first shaft of the first support frame such that linear movement of the first support block linearly moves the first support frame.

6 . The non-transitory computer readable medium of claim 5 , wherein the second position is a second linear position of a second support block that supports a second shaft of the second support frame such that linear movement of the second support block linearly moves the second support frame.

7 . The non-transitory computer readable medium of claim 6 , wherein the first position of the first support frame is defined by an upper end of the first support block.

8 . The non-transitory computer readable medium of claim 7 , wherein the second position of the second support frame is defined by a lower end of the second support block.

9 . The non-transitory computer readable medium of claim 6 , wherein:
the moving of the first support frame comprises rotating a first drive shaft to linearly move a first traveling block disposed along the first drive shaft, wherein the first traveling block is coupled to the first support block; and the moving of the second support frame comprises rotating a second drive shaft to linearly move a second traveling block disposed along the second drive shaft, wherein the second traveling block is coupled to the second support block.

10 . A lift assembly for disposition in relation to a substrate processing chamber, the lift assembly comprising:
a first motor; a first drive assembly coupled to the first motor; a first support block coupled to the first drive assembly, the first motor configured to linearly move the first support block using the first drive assembly; a second motor; a second drive assembly coupled to the second motor; a second support block coupled to the second drive assembly, the second motor configured to linearly move the second support block using the second drive assembly, the second motor configured to linearly move the second support block independently of the first motor linearly moving the first support block; and a controller in communication with the first motor and the second motor, the controller comprising instructions that, when executed by a processor, cause a plurality of operations to be conducted, the plurality of operations comprising:
detecting a fault condition,
determining a first position of the first support block along a first movement range,
determining a second position of the second support block along a second movement range, the second movement range overlapping with the first movement range by an overlap range,
determining if the first position is in an inside condition or an outside condition, the inside condition is within the overlap range, and the outside condition is outside of the overlap range, and
moving the first support block and the second support block respectively to a first retracted position and a second retracted position.

11 . The lift assembly of claim 10 , wherein:
the first drive assembly comprises:
a first drive shaft coupled to the first motor, and
a first traveling block disposed along the first drive shaft, wherein the first traveling block is coupled to the first support block;
the moving of the first support block comprises driving the first motor to rotate the first drive shaft; the second drive assembly comprises:
a second drive shaft coupled to the second motor, and
a second traveling block disposed along the second drive shaft, wherein the second traveling block is coupled to the second support block; and
the moving of the second support block comprises driving the second motor to rotate the second drive shaft.

12 . The lift assembly of claim 11 , wherein:
the first drive shaft is a first lead screw, and a first threaded interface is between the first lead screw and the first traveling block; and the second drive shaft is a second lead screw, and a second threaded interface is between the second lead screw and the second traveling block.

13 . The lift assembly of claim 11 , wherein the first support block comprises one or more first legs that couple to the first traveling block, and the second support block comprises one or more second legs that couple to the second traveling block.

14 . The lift assembly of claim 11 , further comprising a third motor coupled to the first support block, wherein:
the first support block supports a first shaft of a first support frame such that linear movement of the first support block linearly moves the first support frame; the second support block supports a second shaft of a second support frame such that linear movement of the second support block linearly moves the second support frame; and the third motor is configured to rotate the first shaft of the first support frame.

15 . The lift assembly of claim 14 , wherein:
linear movement of the first traveling block linearly moves the first support block and the first support frame; linear movement of the second traveling block linearly moves the second support block and the second support frame; and the third motor is configured to rotate the first shaft of the first support frame.

16 . An apparatus for substrate processing, comprising:
the lift assembly of claim 10 ; a chamber body comprising:
a processing volume,
a plurality of gas inject passages formed in the chamber body, and one or more gas exhaust passages formed in the chamber body;
one or mor

Assignees

• Applied Materials Inc

Inventors

• Patil Aniketnitin
• Lau Shu-Kwan

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/7612 Primary

  characterised by lifting arrangements, e.g. lift pins · CPC title

• B23Q7/1405

  with a series disposition of similar working devices · CPC title

• B23Q5/28 Primary

  Electric drives · CPC title