Computer vision for susceptor leveling and alignment

Patent metadata

Field	Value
Publication number	US-2025349589-A1
Application number	US-202418662802-A
Country	US
Kind code	A1
Filing date	May 13, 2024
Priority date	May 13, 2024
Publication date	Nov 13, 2025
Grant date	—

Abstract

Methods and devices for aligning a susceptor are provided herein. Embodiments include creating a three-dimensional (3D) map of a susceptor and a ring within a substrate processing chamber based on camera data comprising image data associated with the susceptor and the ring. Embodiments further include adjusting a position of the susceptor based on the 3D map to create a gap having a target size between the susceptor and the ring.

First claim

What is claimed is:

1 . A method of positioning a substrate susceptor, comprising:
creating a three-dimensional (3D) map of a susceptor and a ring within a substrate processing chamber based on camera data comprising image data associated with the susceptor and the ring; and adjusting a position of the susceptor based on the 3D map to create a gap having a target size between the susceptor and the ring.

2 . The method of claim 1 , wherein creating the 3D map is further based on position data received from a two-dimensional (2D) profilometer.

3 . The method of claim 2 , wherein the 3D map is created by a machine learning model that is trained through a supervised learning process involving the position data to create 3D maps.

4 . The method of claim 3 , wherein creating the 3D map is further based on:
receiving additional position data from the 2D profilometer after the adjusting of the position of the susceptor; and retraining the machine learning model using the additional position data, wherein the retrained machine learning model is used to update the 3D map.

5 . The method of claim 3 , wherein the supervised learning process comprises iteratively adjusting parameters of the machine learning model until a characteristic of the 3D map matches a characteristic indicated by the position data.

6 . The method of claim 1 , wherein the gap is created based on using an optimization algorithm to adjust the position of the susceptor based on the 3D map.

7 . The method of claim 1 , wherein the gap is created based on using a machine learning model that is trained to adjust the position of the susceptor based on the 3D map.

8 . The method of claim 1 , wherein the gap between the susceptor and the ring is substantially equidistant.

9 . The method of claim 1 , wherein adjusting the position of the susceptor further comprises adjusting the susceptor so that the susceptor is substantially level with the ring.

10 . The method of claim 1 , wherein the susceptor comprises an arm and a substrate holder, wherein the arm of the susceptor is configured to translate the substrate holder within a substrate processing chamber and tilt the substrate holder in order to create the gap.

11 . The method of claim 1 , wherein the camera data is provided by a camera system comprising three cameras positioned along a circumference of the ring.

12 . A method of positioning a substrate susceptor, comprising:
creating a three-dimensional (3D) map of a susceptor and a ring within a substrate processing chamber by:
receiving camera data comprising image data and depth data associated with the susceptor and the ring;
creating the 3D map based on the camera data using a machine learning model trained, based on position data from a two-dimensional (2D) profilometer indicating a location of the susceptor relative to the ring, to create 3D maps;
adjusting the position of the susceptor;
receiving additional position data from the 2D profilometer;
receiving additional camera data; and
retraining the machine learning model using the additional position data,
wherein the retrained machine learning model is used to update the 3D map; and adjusting the position of the susceptor based on providing the 3D map to an optimization algorithm to create a gap having a target size between the susceptor and the ring.

13 . A processing chamber system configured for susceptor alignment, comprising:
a processing chamber for processing substrates; a susceptor configured to hold a substrate; a ring; a camera system configured to capture camera data comprising image data associated with the susceptor and the ring; and a computing device capable of:
creating a three-dimensional (3D) map of the susceptor and the ring within the substrate processing chamber based on camera data comprising image data associated with the susceptor and the ring; and
adjusting a position of the susceptor based on the 3D map to create a gap having a target size between the susceptor and the ring.

14 . The processing chamber system of claim 13 , wherein creating the 3D map is further based on position data received from a two-dimensional (2D) profilometer.

15 . The processing chamber system of claim 14 , wherein the 3D map is created by a machine learning model that is trained through a supervised learning process involving the position data to create 3D maps.

16 . The processing chamber system of claim 15 , wherein creating the 3D map is further based on:
receiving additional position data from the 2D profilometer after the adjusting of the position of the susceptor; and retraining the machine learning model using the additional position data, wherein the retrained machine learning model is used to update the 3D map.

17 . The processing chamber system of claim 15 , wherein supervised learning process comprises iteratively adjusting parameters of the machine learning model until a characteristic of the 3D map matches a characteristic indicated by the position data.

18 . The processing chamber system of claim 13 , wherein the gap is created based on using an optimization algorithm to adjust the position of the susceptor based on the 3D map.

19 . The processing chamber system of claim 13 , wherein the gap is created based on using a machine learning model that is trained to adjust the position of the susceptor based on the 3D map.

20 . The processing chamber system of claim 13 , wherein the susceptor comprises an arm and a substrate holder, wherein the arm of the susceptor is configured to translate the substrate holder within a substrate processing chamber and tilt the substrate holder in order to create the gap.

Assignees

• Applied Materials Inc

Inventors

• Patil Aniketnitin

Classifications

• H10P72/53 Primary

  using optical controlling means · CPC title

• G05B19/402

  characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position (G05B19/19 takes precedence) · CPC title

• G05B13/0265 Primary

  the criterion being a learning criterion · CPC title

• H01L21/681 Primary

  Electricity · mapped topic