Batch-type apparatus for atomic layer etching (ale), and ale method and semiconductor device manufacturing method based on the same apparatus
US-2025279262-A1 · Sep 4, 2025 · US
This page is not indexed by search engines while we improve data quality.
Moon Sunmin patents
Moon Sunmin is listed as an inventor on 28 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Moon Sunmin |
| Total patents | 28 |
| First publication | Oct 26, 2017 |
| Latest publication | Sep 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Semiconductor device
US-2025227911-A1 · Jul 10, 2025 · US
Batch-type apparatus for atomic layer etching (ALE), and ALE method and semiconductor device manufacturing method based on the same apparatus
US-12334308-B2 · Jun 17, 2025 · US
Semiconductor device with capping conductive layer on an electrode and method of fabricating the same
US-12324145-B2 · Jun 3, 2025 · US
Semiconductor device
US-2025133746-A1 · Apr 24, 2025 · US
Capacitor structure and semiconductor device including the capacitor structure
US-2024304663-A1 · Sep 12, 2024 · US
Semiconductor device including capacitor
US-11764283-B2 · Sep 19, 2023 · US
Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device
US-11728160-B2 · Aug 15, 2023 · US
Semiconductor device with capping conductive layer on an electrode and method of fabricating the same
US-2023255019-A1 · Aug 10, 2023 · US
Semiconductor device with capping conductive layer on an electrode and method of fabricating the same
US-11665884-B2 · May 30, 2023 · US
Recent patents
Latest publications not already listed above.
Semiconductor device including capacitor
US-11621339-B2 · Apr 4, 2023 · US
Batch-type apparatus for atomic layer etching (ale), and ale method and semiconductor device manufacturing method based on the same apparatus
US-2023062485-A1 · Mar 2, 2023 · US
Semiconductor device including capacitor
US-2022238691-A1 · Jul 28, 2022 · US
Semiconductor device and method of fabricating the same
US-2021384194-A1 · Dec 9, 2021 · US
Semiconductor device including capacitor
US-2021359102-A1 · Nov 18, 2021 · US
Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device
US-2021343524-A1 · Nov 4, 2021 · US
Semiconductor device including capacitor
US-11114541-B2 · Sep 7, 2021 · US
Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device
US-11081338-B2 · Aug 3, 2021 · US
Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device
US-2021028010-A1 · Jan 28, 2021 · US
Semiconductor device including capacitor
US-2021013319-A1 · Jan 14, 2021 · US
Semiconductor device
US-10892345-B2 · Jan 12, 2021 · US
Capacitor, semiconductor device and methods of manufacturing the capacitor and the semiconductor device
US-10658454-B2 · May 19, 2020 · US
Capacitor, semiconductor device and methods of manufacturing the capacitor and the semiconductor device
US-2020013853-A1 · Jan 9, 2020 · US
Capacitor, semiconductor device and methods of manufacturing the capacitor and the semiconductor device
US-10453913-B2 · Oct 22, 2019 · US
Semiconductor device
US-2019013391-A1 · Jan 10, 2019 · US
Capacitor, semiconductor device and methods of manufacturing the capacitor and the semiconductor device
US-2018315811-A1 · Nov 1, 2018 · US
Semiconductor device including capacitor
US-10090377-B2 · Oct 2, 2018 · US
Semiconductor device including capacitor
US-2017309701-A1 · Oct 26, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 27 |
| Samsung Electronics Co Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10D1/716 | 24 |
| H10B12/033 | 15 |
| H10B12/03 | 13 |
| H10P14/3426 | 12 |
| H10P14/69392 | 12 |