Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
US-2026029784-A1 · Jan 29, 2026 · US
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Kothnur Prashanth patents
Kothnur Prashanth is listed as an inventor on 65 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kothnur Prashanth |
| Total patents | 65 |
| First publication | Apr 30, 2015 |
| Latest publication | Jan 29, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Comprehensive modeling platform for manufacturing equipment
US-12518069-B2 · Jan 6, 2026 · US
Methods for forming films on substrates
US-12473639-B2 · Nov 18, 2025 · US
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
US-12443175-B2 · Oct 14, 2025 · US
Apparatus and method for controlling a flow process material to a deposition chamber
US-12438011-B2 · Oct 7, 2025 · US
Heaters and plasma generators for gas activation, and related chamber and for semiconductor manufacturing
US-2025226186-A1 · Jul 10, 2025 · US
Plasma injection configurations for processing chambers, and related apparatus, chamber kits, and methods
US-2025210314-A1 · Jun 26, 2025 · US
Electrode and Coil Configurations For Processing Chambers and Related Chamber Kits, Apparatus, and Methods For Semiconductor Manufacturing
US-2025210304-A1 · Jun 26, 2025 · US
Electrode configurations and magnet configurations for processing chambers, and related methods and apparatus, for semiconductor manufacturing
US-2025210319-A1 · Jun 26, 2025 · US
Modular processing chambers and related heating configurations, methods, apparatus, and modules for semiconductor manufacturing
US-2025201594-A1 · Jun 19, 2025 · US
Recent patents
Latest publications not already listed above.
EM source for enhanced plasma control
US-12325909-B2 · Jun 10, 2025 · US
Process modeling platform for substrate manufacturing systems
US-2025155883-A1 · May 15, 2025 · US
Dual collimator physical vapor depositions processing chamber
US-2025146119-A1 · May 8, 2025 · US
Comprehensive modeling platform for manufacturing equipment
US-2025086342-A1 · Mar 13, 2025 · US
Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing
US-2025053715-A1 · Feb 13, 2025 · US
Methods for shaping magnetic fields during semiconductor processing
US-12203163-B2 · Jan 21, 2025 · US
Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing
US-12131105-B2 · Oct 29, 2024 · US
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
US-2024310819-A1 · Sep 19, 2024 · US
Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors
US-12043895-B2 · Jul 23, 2024 · US
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
US-12001197-B2 · Jun 4, 2024 · US
Showerhead for providing multiple materials to a process chamber
US-11970775-B2 · Apr 30, 2024 · US
Segmented showerhead for uniform delivery of multiple precursors
US-11834743-B2 · Dec 5, 2023 · US
EM source for enhanced plasma control
US-11692262-B2 · Jul 4, 2023 · US
Apparatus for reducing tungsten resistivity
US-11655534-B2 · May 23, 2023 · US
Segmented showerhead for uniform delivery of multiple pre-cursors
US-2023092987-A1 · Mar 23, 2023 · US
Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing
US-2023078146-A1 · Mar 16, 2023 · US
Deposition system with multi-cathode and method of manufacture thereof
US-11600476-B2 · Mar 7, 2023 · US
Methods for forming films on substrates
US-2023042777-A1 · Feb 9, 2023 · US
Methods for shaping magnetic fields during semiconductor processing
US-2022380888-A1 · Dec 1, 2022 · US
Methods for forming films on substrates
US-11505863-B2 · Nov 22, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 64 |
| Qiu Huatan | 1 |
| Cheung David | 1 |
| Kothnur Prashanth | 1 |
| Novellus Systems Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C14/35 | 15 |
| C23C16/45565 | 15 |
| C23C14/3407 | 14 |
| C23C16/45574 | 14 |
| H10P72/0402 | 12 |