Comprehensive modeling platform for manufacturing equipment

Patent metadata

Field	Value
Publication number	US-12518069-B2
Application number	US-202418826639-A
Country	US
Kind code	B2
Filing date	Sep 6, 2024
Priority date	Sep 8, 2023
Publication date	Jan 6, 2026
Grant date	Jan 6, 2026

Abstract

A method includes receiving, via a graphical user interface (GUI), by a processing device, a first user input to view data associated with a first process chamber in a first chamber data mode. Data of the first chamber data mode includes data of a process operation performed in the first process chamber. The method further includes providing, for display on the GUI, first display data of the first data chamber mode responsive to receiving the first user input. The method further includes receiving a second user input to view data associated with the first process chamber in a second chamber data mode. Data of the second chamber data mode includes data of a virtual process operation performed by a virtual representation of the first process chamber. The method further includes providing, for display on the GUI, second display data of the second data chamber mode.

First claim

What is claimed is:

1 . A method, comprising:
receiving, via a graphical user interface (GUI), by a processing device, a first user selection to view data associated with a first process chamber in a first chamber data mode, wherein data of the first chamber data mode comprises data of a process operation performed in the first process chamber; providing, for display on the GUI, first display data of the first data chamber mode responsive to receiving the first user selection, the first display data based on output from a digital twin model of the process chamber generated by performing analysis on input sensor data of the process operation, and the first display data being indicative of a quality of performance of the process operation; receiving a second user selection to view data associated with the first process chamber in a second chamber data mode, wherein data of the second chamber data mode comprises data of a virtual process operation performed by a virtual representation of the first process chamber; providing, for display on the GUI, second display data of the second data chamber mode responsive to receiving the second user selection, wherein at least one of the first display data, the second display data, or a comparison therebetween, indicates a process abnormality associated with the process operation; and performing a corrective action associated with the first process chamber based on the process abnormality prior to performing a manufacturing process.

2 . The method of claim 1 , further comprising:
receiving a third user selection to view data associated with a second process chamber in either the first chamber data mode or the second chamber data mode; and providing, for display on the GUI, third display data responsive to receiving the third user selection.

3 . The method of claim 1 , wherein generating the second display data comprises:
providing, to a trained machine learning model associated with the first process chamber, input data of the virtual process operation; and obtaining output from the trained machine learning model indicative of a quality of performance of the virtual process operation, wherein the second display data comprises the output from the trained machine learning model.

4 . A method comprising:
outputting, by a processing device, a view of a manufacturing system comprising a plurality of process chambers, one or more transfer chambers and one or more load locks, wherein the view comprises, for each process chamber of the plurality of process chambers, a graphical representation of the process chamber and one or more view options for data associated with the process chamber; receiving input of a view option for a selected process chamber from the one or more view options of the plurality of process chambers; loading one or more virtual models associated with the selected process chamber and the view option, wherein each process chamber is associated with one or more virtual models configured for that process chamber; providing input data to the one or more virtual models; obtaining output data from the one or more virtual models comprising a prediction of a cross-sectional profile of a processed substrate, wherein the output data indicates an abnormality; and performing a corrective action based on the abnormality prior to performing a manufacturing process.

5 . The method of claim 4 , further comprising:
receiving input of a process operation performed in the selected process chamber; providing sensor data associated with the process operation to the one or more virtual models; and causing data output by the one or more virtual models based on the sensor data to be displayed.

6 . The method of claim 4 , wherein the prediction of the cross-sectional profile comprises a prediction of a thickness of a layer of the processed substrate at one or more of:
a bottom region of a trench of the processed substrate; a sidewall of the trench of the processed substrate; or a field proximate the trench of the processed substrate.

7 . The method of claim 4 , wherein the prediction of the cross-sectional profile comprises a first prediction of the cross-sectional profile when a first portion of a process operation associated with the processed substrate had been executed, and a second prediction of the cross-sectional profile when the first portion of the process operation and a second portion of the process operation had been executed.

8 . The method of claim 4 , further comprising:
receiving a first set of simulation inputs; providing the first set of simulation inputs to the one or more virtual models; obtaining first output data from the one or more virtual models indicative of a virtual substrate process operation, wherein the first output data is based on the first set of simulation inputs; and causing the first output data to be displayed.

9 . The method of claim 8 , wherein the first output data comprises property data of a virtual substrate associated with the virtual substrate process operation.

10 . The method of claim 8 , wherein the first output data comprises property values of a virtual process chamber associated with the virtual substrate process operation.

11 . The method of claim 4 , wherein:
a first process chamber of the plurality of process chambers comprises a physical vapor deposition (PVD) chamber, wherein the one or more virtual models associated with the first process chamber are one or more PVD virtual models; and a second process chamber of the plurality of process chambers comprises an atomic layer deposition (ALD) chamber, wherein the one or more virtual models associated with the first process chamber are one or more ALD virtual models.

12 . A method, comprising:
receiving, via a graphical user interface (GUI) of a modeling platform, a first user input of a first process chamber; providing first input data to a first model of a first modeling data mode responsive to receiving the first user input of the first process chamber, wherein the first input data comprises sensor data from the first process chamber, and wherein operation of the first modeling data mode comprises providing input data from substrate processing operations performed in the first process chamber to a plurality of models comprising the first model; obtaining first output data from the first model, wherein the first output data comprises predictive data associated with the sensor data from the first process chamber; providing second input data to a second model responsive to receiving the first user input of the first process chamber, wherein the second input data comprises simulation inputs of a virtual substrate processing operation; obtaining second output data from the second model, wherein the second output data comprises predictive data of the virtual substrate processing operation; providing the first output data and the second output data for display on the GUI of the modeling platform, wherein at least one of the first output data, the second output data, or a comparison therebetween, indicates a process abnormality associated with the process operation; and performing a corrective action associated with the first process chamber based on the process abnormality prior to performing a manufacturing process.

13 . The method of claim 12 , wherein a first modeling data mode comprises the second model, and wherein the second modeling data mode comprises providing simulation inputs of a virtual substrate processing operation to a plurality of models.

14 . The method of claim 12 , further comprising:
receiving a second user input of a sec

Assignees

• Applied Materials Inc

Inventors

• Moradian Ala
• Kelkar Umesh
• Kothnur Prashanth
• Ramanathan Karthik
• Rao Preetham
• Pasagadagula Mudit
• Doddamane Anup Kumar D

Classifications

• G06F30/17 Primary

  Mechanical parametric or variational design · CPC title