Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors

Patent metadata

Field	Value
Publication number	US-12043895-B2
Application number	US-202218072711-A
Country	US
Kind code	B2
Filing date	Dec 1, 2022
Priority date	Sep 14, 2018
Publication date	Jul 23, 2024
Grant date	Jul 23, 2024

Abstract

Methods of introducing precursors through a segmented showerhead are provided herein. In some embodiments, a method of introducing precursors through a segmented showerhead having a plurality of gas delivery portions that are fluidly isolated includes heating a first gas delivery portion to a first temperature; and simultaneously heating a second gas delivery portion to a second temperature different than the first temperature, wherein each of the first and second gas delivery portions (i) have a wedge shaped body that defines a plenum, (ii) are coplanar, and (iii) together form a showerhead having a circular shape.

First claim

The invention claimed is:

1. A method of introducing precursors through a segmented showerhead having a plurality of gas delivery portions that are fluidly isolated, comprising:
heating a first gas delivery portion to a first temperature; and
simultaneously heating a second gas delivery portion to a second temperature different than the first temperature, wherein each of the first and second gas delivery portions (i) have a wedge shaped body that is enclosed to define a wedge shaped plenum, (ii) are coplanar, and (iii) together form a showerhead having a circular shape.

2. The method of claim 1 , wherein the first temperature is about 200 degrees to about 350 degrees Celsius and the second temperature is about is about 450 degrees to about 600 degrees Celsius.

3. The method of claim 1 , further comprising delivering a first process material to the first gas delivery portion and delivering a second process material different from the first process material to the second gas delivery portion.

4. The method of claim 1 , further comprising heating a third gas delivery portion to at least one of the first temperature, the second temperature, or a third temperature different than the first temperature and the second temperature.

5. The method of claim 4 , further comprising heating a fourth gas delivery portion to at least one of the first temperature, the second temperature, the third temperature, or a fourth temperature.

6. The method of claim 5 , wherein the plurality of gas delivery portions consist of the first gas delivery portion, the second gas delivery portion, the third gas delivery portion, and the fourth gas delivery portion that together form the showerhead having the circular shape.

7. The method of claim 1 , further comprising placing a heat sink having a conductivity of about 150 W/m-K or greater between the plurality of gas delivery portions prior to heating the first gas delivery portion.

8. The method of claim 1 , wherein the plurality of gas delivery portions are arranged such that there is a gap between each gas delivery portion to reduce heat transfer between each gas delivery portion.

9. The method of claim 1 , further comprising coupling a first temperature sensor to the first gas delivery portion;
using the first temperature sensor to obtain a temperature reading; and
adjusting the temperature of the first gas delivery portion based on the temperature reading.

10. A method of introducing precursors through a segmented showerhead having a plurality of gas delivery portions that are fluidly isolated, comprising:
heating a first gas delivery portion to a first temperature;
simultaneously heating a second gas delivery portion to a second temperature different than the first temperature; and
heating a third gas delivery portion to at least one of the first temperature, the second temperature, or a third temperature different than the first temperature and the second temperature, wherein each of the first and second and third gas delivery portions are spaced from each other via a gap disposed therebetween and (i) have a wedge shaped body that defines a plenum, (ii) are coplanar, and (iii) together form a showerhead having a circular shape.

11. The method of claim 10 , further comprising heating a fourth gas delivery portion to at least one of the first temperature, the second temperature, the third temperature, or a fourth temperature.

12. The method of claim 11 , wherein the first gas delivery portion and the third gas delivery portion are heated to the third temperature.

13. The method of claim 12 , wherein the second gas delivery portion and the fourth gas delivery portion are heated to the second temperature.

14. The method of claim 12 , wherein the second gas delivery portion is heated to the second temperature and the fourth gas delivery portion is heated to the fourth temperature.

15. The method of claim 11 , wherein the plurality of gas delivery portions consist of the first gas delivery portion, the second gas delivery portion, the third gas delivery portion, and the fourth gas delivery portion that together form the showerhead having the circular shape.

16. A method of introducing precursors through a segmented showerhead having a plurality of gas delivery portions that are fluidly isolated, comprising:
heating a first gas delivery portion to a first temperature;
simultaneously heating a second gas delivery portion to a second temperature different than the first temperature;
heating a third gas delivery portion to at least one of the first temperature, the second temperature, or a third temperature different than the first temperature and the second temperature; and
heating a fourth gas delivery portion to at least one of the first temperature, the second temperature, the third temperature, or a fourth temperature, wherein each of the plurality of gas delivery portions (i) have a wedge shaped body that is enclosed to define a wedge shaped plenum, (ii) are coplanar, and (iii) together form a showerhead having a circular shape.

17. The method of claim 16 , further comprising placing a heat sink having a conductivity of about 150 W/m-K or greater between the plurality of gas delivery portions prior to heating the first gas delivery portion.

18. The method of claim 16 , wherein the first gas delivery portion and the third gas delivery portion are heated to the first temperature and the second gas delivery portion and the fourth gas delivery portion are heated to the second temperature.

19. The method of claim 16 , further comprising:
flowing a first process material through the first gas delivery portion; and flowing a second process material through the second gas delivery portion.

20. The method of claim 16 , further comprising flowing a first process material through both the first gas delivery portion and the third gas delivery portion.

Assignees

• Applied Materials Inc

Inventors

• Lerner Alexander
• Kothnur Prashanth
• Shaviv Roey
• Radhakrishnan Satish

Classifications

• C23C16/45525

  Atomic layer deposition [ALD] · CPC title

• C23C16/45574

  Nozzles for more than one gas · CPC title

• C23C16/4557

  Heated nozzles · CPC title

• C23C16/44

  characterised by the method of coating (C23C16/04 takes precedence) · CPC title

• C23C16/45565 Primary

  Shower nozzles · CPC title