Showerhead for providing multiple materials to a process chamber

Patent metadata

Field	Value
Publication number	US-11970775-B2
Application number	US-201916533357-A
Country	US
Kind code	B2
Filing date	Aug 6, 2019
Priority date	Aug 10, 2018
Publication date	Apr 30, 2024
Grant date	Apr 30, 2024

Abstract

Embodiments of a showerhead are described herein. In some embodiments, a showerhead assembly includes: a first gas delivery portion having a first body, a first inlet, and a plurality of first tubes extending from the first body and defining a first plenum, wherein each tube of the plurality of first tubes includes a plurality of first holes; and a second gas delivery portion having a second body, a second inlet, and a plurality of second tubes extending from the second body and defining a second plenum fluidly independent from the first plenum, wherein each tube of the plurality of second tubes includes a plurality of second holes, and wherein the plurality of first tubes are disposed in an alternating pattern with the plurality of second tubes across a width of the showerhead assembly and a heat sink disposed between the plurality of first tubes and the plurality of second tubes.

First claim

The invention claimed is:

1. A showerhead assembly for depositing multiple materials on a substrate, comprising:
a first gas delivery portion having a first body, a first inlet, and a plurality of first tubes extending from the first body that together define a first plenum, wherein each tube of the plurality of first tubes includes a plurality of first holes;
a second gas delivery portion having a second body, a second inlet, and a plurality of second tubes extending from the second body that together define a second plenum fluidly independent from the first plenum, wherein each tube of the plurality of second tubes includes a plurality of second holes, and wherein the plurality of first tubes are disposed in an alternating pattern with the plurality of second tubes across a width of the showerhead assembly; and
a heat sink disposed between and in physical contact with the plurality of first tubes and the plurality of second tubes, wherein the heat sink includes a plate and fins extending from the plate and into respective gaps disposed between adjacent ones of the plurality of first tubes and the plurality of second tubes, and wherein the fins comprise a thermally anisotropic material and the plate comprises a conductive material different than the thermally anisotropic material.

2. The showerhead assembly of claim 1 , further comprising a first heating assembly thermally coupled to the first gas delivery portion, and a second heating assembly thermally coupled to the second gas delivery portion.

3. The showerhead assembly of claim 1 , wherein each hole of the plurality of second holes is generally disposed between each hole of the plurality of first holes across a width and length of the showerhead assembly.

4. The showerhead assembly of claim 1 , wherein the fins comprise thermally conductive material having a conductivity of about 150 W/m−K or greater.

5. The showerhead assembly of claim 1 , further comprising a nozzle disposed in each of the plurality of first holes and each of the plurality of second holes.

6. The showerhead assembly of claim 1 , wherein a first volume is disposed between the plate and each of the plurality of first tubes, wherein the first volume is fluidly separate from the first plenum and is defined between a continuous lower surface of the plate and an upper surface of a respective one of the plurality of first tubes.

7. The showerhead assembly of claim 1 , wherein at least one of the first body and the second body includes an inner surface having a curved profile.

8. The showerhead assembly of claim 1 , wherein the plurality of first tubes extend close to, without touching, an inner surface of the second body.

9. A showerhead assembly for depositing multiple materials on a substrate, comprising:
a first gas delivery portion having a first body, a first inlet, and a plurality of first tubes extending from an inner surface of the first body that together define a first plenum, wherein each tube of the plurality of first tubes includes a plurality of first holes, and wherein the plurality of first tubes vary in length across a width of the showerhead assembly;
a second gas delivery portion having a second body, a second inlet, and a plurality of second tubes extending from an inner surface of the second body that together define a second plenum fluidly independent from the first plenum, wherein each tube of the plurality of second tubes includes a plurality of second holes, wherein the plurality of second tubes vary in length across the width of the showerhead assembly, and wherein the plurality of first tubes are disposed in an alternating pattern with the plurality of second tubes across the width of the showerhead assembly;
and
a heat sink disposed between the plurality of first tubes and the plurality of second tubes, wherein the heat sink includes a plate and fins extending from the plate, and wherein the fins comprise a thermally anisotropic material and the plate comprises a conductive material different than the thermally anisotropic material.

10. The showerhead assembly of claim 9 , wherein each tube of the plurality of first tubes defines a first gap with each adjacent tube of the plurality of second tubes.

11. The showerhead assembly of claim 10 , wherein the fins extend into respective gaps between adjacent ones of the plurality of first tubes and the plurality of second tubes, wherein each of the fins physically contact a respective one of the plurality of first tubes and a respective one of the plurality of second tubes.

12. The showerhead assembly of claim 10 , wherein each tube of the plurality of first tubes defines a second gap between an end of each first tube opposite the first body and an inner surface of the second body.

13. The showerhead assembly of claim 12 , wherein the second gap is about 1 mm to about 10 mm.

14. A deposition chamber, comprising:
a chamber body having a floor, one or more sides, and a lid to define an interior volume;
the showerhead assembly of claim 1 disposed in the interior volume; and
a precursor delivery system configured to deliver a first process material to the first gas delivery portion at a first temperature and a second process material to the second gas delivery portion at the first temperature or at a second temperature different than the first temperature.

15. The deposition chamber of claim 14 , wherein the first process material comprises tris (8-hydroxyquinolinato) aluminum (Alq3), or buckminsterfullerene (C 60 ).

16. The deposition chamber of claim 14 , further comprising a first heating assembly coupled to the first gas delivery portion to apply heat to the first gas delivery portion, and a second heating assembly coupled to the second gas delivery portion to apply heat to the second gas delivery portion.

17. The deposition chamber of claim 14 , further comprising a nozzle disposed in each of the plurality of first holes and each of the plurality of second holes.

Assignees

• Applied Materials Inc

Inventors

• Kothnur Prashanth
• Radhakrishnan Satish
• Lerner Alexander
• Klimovich Sergei
• Shaviv Roey

Classifications

• C23C16/45548 Primary

  having arrangements for gas injection at different locations of the reactor for each ALD half-reaction · CPC title

• B05B1/185

  characterised by their outlet element; Mounting arrangements therefor · CPC title

• B05B1/20

  Perforated pipes or troughs, e.g. spray booms; Outlet elements therefor · CPC title

• C23C16/45565 Primary

  Shower nozzles · CPC title

• C23C16/4557

  Heated nozzles · CPC title