Segmented showerhead for uniform delivery of multiple precursors

Patent metadata

Field	Value
Publication number	US-11834743-B2
Application number	US-201916570317-A
Country	US
Kind code	B2
Filing date	Sep 13, 2019
Priority date	Sep 14, 2018
Publication date	Dec 5, 2023
Grant date	Dec 5, 2023

Abstract

Apparatus for supplying vaporized reactants to a reaction chamber are described herein. In some embodiments, a showerhead assembly for depositing multiple materials on a substrate includes a plurality of gas delivery portions, each gas delivery portion having an inlet, a wedge shaped body that defines a plenum, and a plurality of openings disposed on a bottom surface of the gas delivery portion, wherein each of the plenums are fluidly isolated from each other.

First claim

The invention claimed is:

1. A showerhead assembly for depositing multiple materials on a substrate, comprising:
a plurality of gas delivery portions, each gas delivery portion having an inlet, a wedge shaped body comprising a curved outer wall and two sidewalls that extend from opposite ends of the curved outer wall to a common joint, wherein the wedge shaped body defines a plenum, and a plurality of openings disposed on a bottom surface of the gas delivery portion, wherein each of the plenums are fluidly isolated from each other.

2. The showerhead assembly of claim 1 , wherein the plurality of gas delivery portions consist of a first gas delivery portion, a second gas delivery portion, a third gas delivery portion, and a fourth gas delivery portion that together form a showerhead having a circular shape.

3. The showerhead assembly of claim 2 , wherein the first gas delivery portion and the third gas delivery portion are coupled to a first gas source and the second gas delivery portion and the fourth gas delivery portion are coupled to a second gas source.

4. The showerhead assembly of claim 2 , further comprising a first heating assembly configured to provide heat to the first gas delivery portion, a second heating assembly configured to provide heat to the second gas delivery portion, a third heating assembly configured to provide heat to the third gas delivery portion, and a fourth heating assembly configured to provide heat to the fourth gas delivery portion.

5. The showerhead assembly of claim 4 , wherein the first heating assembly includes a resistive heater in at least one of a top wall and a bottom wall of the gas delivery portion.

6. The showerhead assembly of claim 1 , wherein the plurality of gas delivery portions are similar in size and together form a showerhead having a circular shape.

7. The showerhead assembly of claim 1 , further comprising a heat sink having a conductivity of about 150 W/m-K or greater disposed between the plurality of gas delivery portions.

8. The showerhead assembly of claim 1 , wherein each gas delivery portion includes one or more mounts that extend outward from a radially outer surface of each gas delivery portion.

9. The showerhead assembly of claim 1 ,
further comprising a nozzle disposed in the plurality of openings.

10. The showerhead assembly of claim 1 , wherein each inlet is disposed radially outward of the plurality of openings disposed on the bottom surface of each respective gas delivery portion.

11. A showerhead assembly, comprising:
a first gas delivery portion defining a first plenum;
a second gas delivery portion defining a second plenum;
a third gas delivery portion defining a third plenum; and
a fourth gas delivery portion defining a fourth plenum, wherein each of the first, second, third, and fourth gas delivery portions include an inlet and a plurality of openings, wherein each of the first, second, third, and fourth gas delivery portions are wedge shaped having curved outer walls, wherein the curved outer walls define an outer wall of the showerhead assembly, and wherein each of the first, second, third, and fourth plenums are fluidly isolated from each other.

12. The showerhead assembly of claim 11 , further comprising a shield that envelops each gas delivery portion.

13. The showerhead assembly of claim 11 , wherein the first gas delivery portion, the second gas delivery portion, the third gas delivery portion, and the fourth gas delivery portion are coplanar and together form a showerhead having a circular shape.

14. The showerhead assembly of claim 11 , wherein one or more mounts for mounting to a lid plate extend radially outward from an outer surface of each of the first gas delivery portion, second gas delivery portion, third gas delivery portion, and the fourth gas delivery portion.

15. The showerhead assembly of claim 11 , wherein a heat sink having a conductivity of about 150 W/m-K or greater is disposed in a gap between adjacent gas delivery portions.

16. The showerhead assembly of claim 11 , wherein the first gas delivery portion includes a top wall and a bottom wall, and wherein a post is disposed through the top wall and at least partially through the bottom wall and configured to facilitate measuring a temperature of the bottom wall.

Assignees

• Applied Materials Inc

Inventors

• Lerner Alexander
• Kothnur Prashanth
• Shaviv Roey
• Radhakrishnan Satish

Classifications

• H10P72/0431

  Apparatus for thermal treatment · CPC title

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P14/6334

  using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329) · CPC title

• H10P14/668

  the materials being characterised by the deposition precursor materials · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title