Dual collimator physical vapor depositions processing chamber

Patent metadata

Field	Value
Publication number	US-2025146119-A1
Application number	US-202418939220-A
Country	US
Kind code	A1
Filing date	Nov 6, 2024
Priority date	Nov 7, 2023
Publication date	May 8, 2025
Grant date	—

Abstract

In some embodiments, a physical vapor deposition apparatus includes a top flux optimizer configured to be biased. The physical vapor deposition apparatus further includes an intermediate flux optimizer configured to be biased. The top flux optimizer and the intermediate flux optimizer are separated by a first distance. The physical vapor deposition apparatus further includes a bottom flux optimizer configured to be biased. The bottom flux optimizer and the intermediate flux optimizer are separated by a second distance. The physical vapor deposition apparatus further includes a top power source coupled to the top flux optimizer, an intermediate power source coupled to the intermediate flux optimizer, and a bottom power source coupled to the bottom flux optimizer.

First claim

What is claimed is:

1 . A physical vapor deposition apparatus, comprising:
a substrate support disposed within a processing region of a processing chamber of the physical vapor deposition apparatus, wherein the substrate support comprises a substrate supporting surface; a first flux optimizer disposed within the processing region, and comprising a plurality of apertures extending therethrough, the first flux optimizer being configured to be biased relative to a ground reference; a second flux optimizer disposed within the processing region, and comprising a plurality of apertures extending therethrough, the second flux optimizer being configured to be biased relative to the ground reference, wherein the second flux optimizer is disposed between the first flux optimizer and the substrate support; a first power source coupled to the first flux optimizer or the second flux optimizer, the first power source configured to supply a voltage to either the first flux optimizer or the second flux optimizer, wherein the first power source is configured to generate a bias voltage between the first flux optimizer and the second flux optimizer.

2 . The physical vapor deposition apparatus of claim 1 , wherein
the plurality of apertures in the first flux optimizer each comprise an opening that extends through the first flux optimizer, the plurality of apertures in the second flux optimizer each comprise an opening that extends through the first flux optimizer, and the plurality of apertures in the first and second flux optimizers are aligned.

3 . The physical vapor deposition apparatus of claim 1 , wherein a bias is applied to the first flux optimizer by supplying a voltage relative to ground to the first flux optimizer from the first power source.

4 . The physical vapor deposition apparatus of claim 3 , wherein the second flux optimizer is electrically grounded.

5 . The physical vapor deposition apparatus of claim 1 , wherein a bias is applied to the second flux optimizer by supplying a voltage to the second flux optimizer from the first power source.

6 . The physical vapor deposition apparatus of claim 4 , wherein the first flux optimizer is electrically grounded.

7 . The physical vapor deposition apparatus of claim 1 , wherein
the first power source is coupled to the first flux optimizer, a second power source is coupled to the second flux optimizer, and a first bias is applied to the first flux optimizer by supplying a voltage to the first flux optimizer from the first power source and wherein a second bias is applied to the second flux optimizer by supplying a voltage to the second flux optimizer from the second power source.

8 . The physical vapor deposition apparatus of claim 6 , wherein a negative bias is supplied to the first flux optimizer relative to the second flux optimizer.

9 . The physical vapor deposition apparatus of claim 6 , wherein a positive bias is supplied to the first flux optimizer relative to the second flux optimizer.

10 . A physical vapor deposition apparatus, comprising:
a top flux optimizer configured to be biased; an intermediate flux optimizer configured to be biased, wherein the top flux optimizer and the intermediate flux optimizer are separated by a first distance; a bottom flux optimizer configured to be biased, wherein the bottom flux optimizer and the intermediate flux optimizer are separated by a second distance; a top power source coupled to the top flux optimizer; an intermediate power source coupled to the intermediate flux optimizer; and a bottom power source coupled to the bottom flux optimizer.

11 . The physical vapor deposition apparatus of claim 10 , wherein
the first and second distances are between about 0.01 cm and 25 cm; the intermediate flux optimizer comprises a plurality of biasable flux optimizers, and are separated from each other by a third distance that is about 0.01 cm and about 25 cm.

12 . The physical vapor deposition apparatus of claim 11 , wherein a bias is applied to at least one of the intermediate flux optimizers by supplying a voltage to the at least one biasable flux optimizer from the intermediate power source.

13 . The physical vapor deposition apparatus of claim 11 , wherein the plurality of biasable flux optimizers are independently biasable.

14 . The physical vapor deposition apparatus of claim 10 , wherein at least one of the top flux optimizer, the intermediate flux optimizer, and the bottom flux optimizer is electrically grounded.

15 . The physical vapor deposition apparatus of claim 10 , wherein a voltage of about 10 V to about 200 V is supplied to the top flux optimizer from the top power source.

16 . The physical vapor deposition apparatus of claim 10 , wherein a voltage of about 10 V to about 200 V is supplied to the bottom flux optimizer from the bottom power source.

17 . A method for depositing a film onto a substrate, the method comprising:
applying a bias to at least one of a plurality of biasable flux optimizers disposed in a processing region of a processing chamber by supplying a voltage thereto, the voltage being supplied by a power source, wherein
at least one of the plurality of biasable flux optimizers is grounded, and
the plurality of biasable flux optimizers are positioned within the processing region between a sputtering target and a substrate support; and
forming a film on a surface of a substrate disposed on the substrate support by sputtering a target material from the sputtering target by applying a bias to the target.

18 . The method of claim 17 , wherein the plurality of biasable flux optimizers comprise a first flux optimizer and a second flux optimizer.

19 . The method of claim 18 , wherein the first flux optimizer is grounded and the second flux optimizer is biased.

20 . The method of claim 18 , wherein a voltage is supplied to both the first flux optimizer and the second flux optimizer, the voltage supplied to the second flux optimizer being greater than the voltage supplied to the first flux optimizer.

Assignees

• Applied Materials Inc

Inventors

• Riker Martin Lee
• Sainath Abilash
• Umesh Suhas
• Kashefizadeh Keyvan
• Kim Yunho
• Reddy Sundarapandian Ramaling Vijayalaskshmi
• Kothnur Prashanth

Classifications

• H01J37/3447

  Collimators, shutters, apertures · CPC title

• C23C14/046

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• C23C14/35 Primary

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title

• C23C14/024 Primary

  Deposition of sublayers, e.g. to promote adhesion of the coating (C23C14/027 takes precedence) · CPC title