Symmetric Coupling of Coil to Direct-Drive Radiofrequency Power Supplies
US-2026058095-A1 · Feb 26, 2026 · US
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Drewery John patents
Drewery John is listed as an inventor on 69 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Drewery John |
| Total patents | 69 |
| First publication | Jan 22, 2015 |
| Latest publication | Feb 26, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Systems and methods for reverse pulsing
US-2026011531-A1 · Jan 8, 2026 · US
Systems and methods for compensating for RF power loss
US-12505985-B2 · Dec 23, 2025 · US
Symmetric coupling of coil to direct-drive radiofrequency power supplies
US-12482634-B2 · Nov 25, 2025 · US
Systems and methods for reverse pulsing
US-12437966-B2 · Oct 7, 2025 · US
Systems and methods for multi-level pulsing in rf plasma tools
US-2025232957-A1 · Jul 17, 2025 · US
Systems and methods for multi-level pulsing in rf plasma tools
US-2025226182-A1 · Jul 10, 2025 · US
Systems and methods for multi-level pulsing in RF plasma tools
US-12283463-B2 · Apr 22, 2025 · US
Electrostatic chuck with spatially tunable RF coupling to a wafer
US-12191122-B2 · Jan 7, 2025 · US
Methods and systems for advanced ion control for etching processes
US-12165872-B2 · Dec 10, 2024 · US
Recent patents
Latest publications not already listed above.
Reference Box for Direct-Drive Radiofrequency Power Supply
US-2024404804-A1 · Dec 5, 2024 · US
Junction System for Direct-Drive Radiofrequency Power Supply
US-2024396372-A1 · Nov 28, 2024 · US
Symmetric Coupling of Coil to Direct-Drive Radiofrequency Power Supplies
US-2024395503-A1 · Nov 28, 2024 · US
Metrology Enclosure Including Spectral Reflectometry System for Plasma Processing System Using Direct-Drive Radiofrequency Power Supply
US-2024395519-A1 · Nov 28, 2024 · US
Voltage Transient Detector and Current Transient Detector
US-2024332943-A1 · Oct 3, 2024 · US
Systems and methods for compensating for rf power loss
US-2024290579-A1 · Aug 29, 2024 · US
Voltage transient detector and current transient detector
US-12040605-B2 · Jul 16, 2024 · US
Systems and methods for compensating for RF power loss
US-12002653-B2 · Jun 4, 2024 · US
Systems and methods for reverse pulsing
US-2024030000-A1 · Jan 25, 2024 · US
Systems for reverse pulsing
US-11798785-B2 · Oct 24, 2023 · US
Controlling temperature profiles of plasma chamber components using stress analysis
US-2023274919-A1 · Aug 31, 2023 · US
Substrate transfer door assemblies with radiating elements for substrate processing chambers
US-2023253217-A1 · Aug 10, 2023 · US
Hybrid liquid/air cooling system for tcp windows
US-2023245854-A1 · Aug 3, 2023 · US
Voltage Transient Detector and Current Transient Detector
US-2023246433-A1 · Aug 3, 2023 · US
Air cooled faraday shield and methods for using the same
US-11692732-B2 · Jul 4, 2023 · US
Evaporative cooling of electrostatic chucks
US-2023178344-A1 · Jun 8, 2023 · US
Methods and Systems for Controlling Radiofrequency Pulse-Initiation Power Spike for Plasma Sheath Stabilization
US-2023154728-A1 · May 18, 2023 · US
Systems and methods for compensating for rf power loss
US-2022238307-A1 · Jul 28, 2022 · US
Systems and methods for multi-level pulsing in rf plasma tools
US-2022216038-A1 · Jul 7, 2022 · US
Electrostatic chuck with spatially tunable rf coupling to a wafer
US-2022199378-A1 · Jun 23, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 69 |
| Drewery John | 3 |
| Long Maolin | 2 |
| Paterson Alex | 2 |
| Marsh Ricky | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J2237/334 | 30 |
| H10P50/242 | 27 |
| H01J37/32183 | 27 |
| H01J37/32146 | 26 |
| H10P72/0421 | 25 |