Symmetric coupling of coil to direct-drive radiofrequency power supplies

Patent metadata

Field	Value
Publication number	US-12482634-B2
Application number	US-202218689030-A
Country	US
Kind code	B2
Filing date	Sep 14, 2022
Priority date	Sep 17, 2021
Publication date	Nov 25, 2025
Grant date	Nov 25, 2025

Abstract

A coil is disposed next to a plasma processing chamber. A first direct-drive radiofrequency (RF) power supply has an output through which a first shaped-amplified square waveform signal is transmitted. A first reactive circuit is connected between the output of the first direct-drive RF power supply and a first end of the coil. The first reactive circuit transforms the first shaped-amplified square waveform signal into a first shaped-sinusoidal signal in route to the first end of the coil. A second direct-drive RF power supply has an output through which a second shaped-amplified square waveform signal is transmitted. A second reactive circuit is connected between the output of the second direct-drive RF power supply and a second end of the coil. The second reactive circuit transforms the second shaped-amplified square waveform signal into a second shaped-sinusoidal signal in route to the second end of the coil.

First claim

What is claimed is:

1 . A plasma processing system, comprising:
a plasma processing chamber; a coil disposed next to the plasma processing chamber, the coil having a first end and a second end; a first direct-drive radiofrequency power supply having an output through which a first shaped-amplified square waveform signal is transmitted; a first reactive circuit connected between the output of the first direct-drive radiofrequency power supply and the first end of the coil, the first reactive circuit configured to transform the first shaped-amplified square waveform signal into a first shaped-sinusoidal signal in route to the first end of the coil; a second direct-drive radiofrequency power supply having an output through which a second shaped-amplified square waveform signal is transmitted; and a second reactive circuit connected between the output of the second direct-drive radiofrequency power supply and the second end of the coil, the second reactive circuit configured to transform the second shaped-amplified square waveform signal into a second shaped-sinusoidal signal in route to the second end of the coil.

2 . The plasma processing system as recited in claim 1 , wherein the first direct-drive radiofrequency power supply and the second direct-drive radiofrequency power supply have matching configurations, and wherein the first reactive circuit and the second reactive circuit have matching configurations.

3 . The plasma processing system as recited in claim 2 , wherein the first direct-drive radiofrequency power supply includes an electrical signal generator connected to transmit a first electrical signal through a first gate driver to a first end of a primary winding of a pulse transformer, the electrical signal generator also connected to transmit a second electrical signal through a second gate driver to a second end of the primary winding of the pulse transformer, the first direct-drive radiofrequency power supply including a half-bridge transistor circuit that includes a first transistor and a second transistor connected in series between a voltage supply and a reference ground potential, the first transistor having a gate connected to a first secondary winding of the pulse transformer, the second transistor having a gate connected to a second secondary winding of the pulse transformer, the output of the first direct-drive radiofrequency power supply provided at a connection between the first transistor and the second transistor.

4 . The plasma processing system as recited in claim 2 , wherein the first reactive circuit includes a variable capacitor.

5 . A method for operating a plasma processing system, comprising:
operating a first direct-drive radiofrequency signal generator to generate a first shaped-amplified square waveform signal; transmitting the first shaped-amplified square waveform signal to a first reactive circuit; operating the first reactive circuit to transform the first shaped-amplified square waveform signal into a first shaped-sinusoidal signal; transmitting the first shaped-sinusoidal signal to a first end of a coil of a plasma processing chamber, the first shaped-sinusoidal signal conveying radiofrequency power to the coil; operating a second direct-drive radiofrequency signal generator to generate a second shaped-amplified square waveform signal; transmitting the second shaped-amplified square waveform signal to a second reactive circuit; operating the second reactive circuit to transform the second shaped-amplified square waveform signal into a second shaped-sinusoidal signal; and transmitting the second shaped-sinusoidal signal to a second end of the coil of the plasma processing chamber, the second shaped-sinusoidal signal conveying radiofrequency power to the coil.

6 . The method as recited in claim 5 , wherein the first shaped-sinusoidal signal conveys about one-half of a total amount of radiofrequency power to the coil, and the second shaped-sinusoidal signal conveys about one-half of the total amount of radiofrequency power to the coil.

7 . The method as recited in claim 5 , wherein the first direct-drive radiofrequency signal generator and the second direct-drive radiofrequency signal generator have matching configurations, and wherein the first reactive circuit and the second reactive circuit have matching configurations.

8 . The method as recited in claim 5 , wherein the first direct-drive radiofrequency signal generator and the second direct-drive radiofrequency signal generator are operated at a same direct current rail voltage.

9 . The method as recited in claim 8 , wherein the same direct current rail voltage is less than a voltage across the coil.

10 . The method as recited in claim 5 , further comprising:
adjusting a capacitance setting within the first reactive circuit so that a peak amount of radiofrequency power is transmitted from the first direct-drive radiofrequency power supply through the first reactive circuit to the first end of the coil; and adjusting a capacitance setting within the second reactive circuit so that a peak amount of radiofrequency power is transmitted from the second direct-drive radiofrequency power supply through the second reactive circuit to the second end of the coil.

11 . A plasma processing system, comprising:
a plasma processing chamber; a coil disposed next to the plasma processing chamber, the coil having a first end and a second end; a direct-drive radiofrequency power supply having an output through which a shaped-amplified square waveform signal is transmitted; a reactive circuit connected between the output of the direct-drive radiofrequency power supply and the first end of the coil, the reactive circuit configured to transform the shaped-amplified square waveform signal into a shaped-sinusoidal signal in route to the first end of the coil; and a variable capacitor having an input terminal connected to the second end of the coil, the variable capacitor having an output terminal connected to a reference ground potential.

12 . The plasma processing system as recited in claim 11 , wherein the second end of the coil is connected to one electrical component capable of affecting radiofrequency power transmission from the coil to a plasma within the plasma processing chamber, the one electrical component being the variable capacitor.

13 . The plasma processing system as recited in claim 11 , wherein the direct-drive radiofrequency power supply includes an electrical signal generator connected to transmit a first electrical signal through a first gate driver to a first end of a primary winding of a pulse transformer, the electrical signal generator also connected to transmit a second electrical signal through a second gate driver to a second end of the primary winding of the pulse transformer, the direct-drive radiofrequency power supply including a half-bridge transistor circuit that includes a first transistor and a second transistor connected in series between a voltage supply and another reference ground potential, the first transistor having a gate connected to a first secondary winding of the pulse transformer, the second transistor having a gate connected to a second secondary winding of the pulse transformer, the output of the direct-drive radiofrequency power supply provided at a connection between the first transistor and the second transistor.

14 . A method for operating a plasma processing system, comprising:
operating a direct-drive radiofrequency signal generator to generate a shaped-amplified square waveform signal; transmitting the shaped-amplified square waveform signal to a reactive circuit; oper

Assignees

• Lam Res Corp

Inventors

• Drewery John
• Paterson Alexander Miller

Classifications

• H01J37/32183

  Matching circuits · CPC title

• H01J37/32146

  Amplitude modulation, includes pulsing · CPC title

• H01J37/32128

  using particular waveforms, e.g. polarised waves · CPC title

• H01J37/32165 Primary

  Plural frequencies · CPC title

• H01J37/32174

  Circuits specially adapted for controlling the RF discharge · CPC title