Evaporative cooling of electrostatic chucks

Patent metadata

Field	Value
Publication number	US-2023178344-A1
Application number	US-202117924618-A
Country	US
Kind code	A1
Filing date	May 4, 2021
Priority date	May 14, 2020
Publication date	Jun 8, 2023
Grant date	—

Abstract

A baseplate of a substrate support assembly includes a cavity between an upper region, a lower region, and sidewalls of the baseplate, a plurality of pillars arranged in the cavity between the upper and lower regions, an inlet to supply a liquid to the cavity, and an outlet to vent vapor of the liquid. In another implementation, a baseplate of a substrate support assembly includes a first channel arranged in the baseplate, a second channel arranged above the first channel, a plurality of vertical channels connecting the first channel to the second channel, an inlet to supply a liquid to the first channel, and an outlet to vent vapor of the liquid from the second channel.

First claim

What is claimed is:

1 . A baseplate of a substrate support assembly comprising:
a cavity between an upper region, a lower region, and sidewalls of the baseplate; a plurality of pillars arranged in the cavity between the upper and lower regions; an inlet to supply a liquid to the cavity; and an outlet to vent vapor of the liquid.

2 . The baseplate of claim 1 wherein the pillars are coated with a wicking material.

3 . The baseplate of claim 1 wherein the cavity is cylindrical and a height of the cavity is less than a diameter of the cavity.

4 . The baseplate of claim 1 wherein the pillars are cylindrical and extend from a bottom of the cavity to a top of the cavity.

5 . The baseplate of claim 1 wherein the pillars are cylindrical and extend vertically from a bottom of the cavity to a top of the cavity.

6 . The baseplate of claim 1 wherein the baseplate and the cavity are cylindrical and wherein the cavity extends radially along a diameter of the baseplate.

7 . The baseplate of claim 1 wherein the inlet is smaller in size than the outlet.

8 . The baseplate of claim 1 wherein the inlet is adjacent to a bottom of the cavity and wherein the outlet is adjacent to a top of the cavity.

9 . The baseplate of claim 1 further comprising:
a channel arranged in the baseplate above the cavity, wherein the outlet is connected to a first end of the channel; and
a second end of the channel is connected to a vent in the baseplate.

10 . The baseplate of claim 9 wherein:
the baseplate and the cavity are cylindrical;
the channel is spiral shaped; and
the cavity and the channel extend radially along a diameter of the baseplate.

11 . The baseplate of claim 9 wherein:
the baseplate and the cavity are cylindrical;
the channel is bifilar; and
the cavity and the channel extend radially along a diameter of the baseplate.

12 . The baseplate of claim 1 further comprising:
a second cavity between the cavity and the lower region of the baseplate;
wherein the outlet is connected to the second cavity; and
wherein the second cavity is connected to a vent in the baseplate.

13 . The baseplate of claim 1 further comprising:
a channel arranged in the baseplate above the cavity; and
a second cavity between the cavity and the lower region of the baseplate;
wherein the outlet is connected to a first end of the channel and to the second cavity; and
wherein the second cavity and a second end of the channel are connected to respective vents in the baseplate.

14 . The baseplate of claim 13 wherein the channel is bifilar or spiral shaped.

15 . The baseplate of claim 13 wherein the baseplate is cylindrical and wherein the cavity, the channel, and the second cavity extend radially across a diameter of the baseplate.

16 . A baseplate of a substrate support assembly comprising:
a first channel arranged in the baseplate; a second channel arranged above the first channel; a plurality of vertical channels connecting the first channel to the second channel; an inlet to supply a liquid to the first channel; and an outlet to vent vapor of the liquid from the second channel.

17 . The baseplate of claim 16 wherein the second channel has a larger cross-section than the first channel.

18 . The baseplate of claim 16 wherein inner walls of the second channel are coated with a wicking material.

19 . The baseplate of claim 16 wherein the first and second channels are spiral shaped.

20 . The baseplate of claim 16 wherein the first and second channels are bifilar.

21 . The baseplate of claim 16 wherein the first and second channels are parallel to each other.

22 . The baseplate of claim 16 wherein the baseplate is cylindrical and wherein the first and second channels extend radially across a diameter of the baseplate.

23 . The baseplate of claim 16 wherein:
the inlet is connected to a first end of the first channel;
a second end of the first channel is terminated;
a first end of the second channel is terminated; and
a second end of the second channel is connected to the outlet.

24 . The baseplate of claim 16 wherein:
the inlet is connected to a first end of the first channel;
a second end of the first channel is terminated; and
the baseplate further comprises:
a third channel arranged above the second channel;
a first end of the second channel is connected to a first end of the third channel;
a second end of second channel is terminated; and
a second end of the third channel is connected to the outlet.

25 . The baseplate of claim 24 wherein the second channel has a larger cross-section than the first channel and wherein the third channel has a larger cross-section than the second channel.

26 . The baseplate of claim 24 wherein the third channel is bifilar or spiral shaped and is parallel to the first and second channels.

27 . The baseplate of claim 24 wherein the first, second, and third channels are spiral shaped and wherein the third channel spirals in an opposite direction relative to the first and second channels.

28 . The baseplate of claim 24 wherein the baseplate is cylindrical and wherein the first, second, and third channels extend radially across a diameter of the baseplate.

29 . The baseplate of claim 16 wherein:
the inlet is connected to a first end of the first channel;
a second end of the first channel is terminated;
the baseplate further comprises:
a cavity between the first channel and a bottom region of the baseplate;
a first end of the second channel is connected to the cavity;
a second end of second channel is terminated; and
the cavity is connected to the outlet.

30 . The baseplate of claim 29 wherein the baseplate is cylindrical and wherein the first and second channels and the cavity extend radially across a diameter of the baseplate.

31 . The baseplate of claim 29 further comprising a plurality of porous plugs, each of the porous plugs having a first end connected to the first channel and a second end connected to a passage connecting the first end of the second channel to the cavity.

32 . The baseplate of claim 31 wherein the vertical channels connecting the first channel to the second channel extend below the first ends of the porous plugs towards a center of the first channel.

33 . The baseplate of claim 16 wherein:
the inlet is connected to a first end of the first channel;
a second end of the first channel is terminated; and
the baseplate further comprises:
a third channel arranged above the second channel;
a cavity between the first channel and a bottom region of the baseplate;
a first end of the second channel is connected to a first end of the third channel and to the cavity;
a second end of second channel is terminated; and
a second end of the third channel and the cavity are connected to respective vents in the baseplate.

34 . The baseplate of claim 33 wherein the second channel has a larger cross-section than the first channel and wherein the third channel has a larger cross-section than the second channel.

35 . The baseplate of claim 33 wherein the third channel is bifilar or spiral shaped and is parallel to the first and second channels.

Assignees

• Lam Res Corp

Inventors

• Drewery John
• Flynn Kevin
• Smith Jeremy George
• Kamp Tom A

Classifications

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• C23C16/463

  Cooling of the substrate · CPC title