Systems for cooling RF heated chamber components
US-9978565-B2 · May 22, 2018 · US
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Paterson Alex patents
Paterson Alex holds 7 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 7 |
| Recent patents | 0 |
| First publication | Jan 26, 2016 |
| Latest publication | May 22, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Powered grid for plasma chamber
US-9966236-B2 · May 8, 2018 · US
Chamber filler kit for plasma etch chamber useful for fast gas switching
US-9679751-B2 · Jun 13, 2017 · US
Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil
US-9490106-B2 · Nov 8, 2016 · US
Plasma processing systems including side coils and methods related to the plasma processing systems
US-9336996-B2 · May 10, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Systems for cooling RF heated chamber components
US-9978565-B2 · May 22, 2018 · US
Powered grid for plasma chamber
US-9966236-B2 · May 8, 2018 · US
Chamber filler kit for plasma etch chamber useful for fast gas switching
US-9679751-B2 · Jun 13, 2017 · US
Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil
US-9490106-B2 · Nov 8, 2016 · US
Plasma processing systems including side coils and methods related to the plasma processing systems
US-9336996-B2 · May 10, 2016 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/321 | 5 |
| H01J37/32651 | 4 |
| H10P50/242 | 3 |
| H01J37/32119 | 2 |
| H01J37/32458 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 7 |
| Chemistry & Metallurgy | 3 |
| Operations & Transport | 1 |
| Cross-Sectional Technologies | 1 |