Absorbing lamphead face
US-9842753-B2 · Dec 12, 2017 · US
by radiant heating of the substrate
by radiant heating of the substrate · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C16/481 |
| Official title | {by radiant heating of the substrate} |
| Display label | by radiant heating of the substrate |
| Total patents | 258 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 24 |
| 2016 | 22 |
| 2017 | 26 |
| 2018 | 19 |
| 2019 | 16 |
| 2020 | 22 |
| 2021 | 23 |
| 2022 | 26 |
| 2023 | 17 |
| 2024 | 28 |
| 2025 | 25 |
| 2026 | 10 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Off-angled heating of the underside of a substrate using a lamp assembly
US-9818587-B2 · Nov 14, 2017 · US
Substrate processing apparatus, substrate processing method and storage medium
US-9790597-B2 · Oct 17, 2017 · US
Apparatus for variable substrate temperature control
US-9783889-B2 · Oct 10, 2017 · US
Conductive adhesive with spherical graphene and manufacturing method thereof
US-2017283665-A1 · Oct 5, 2017 · US
System and Method for Temperature Control in Plasma Processing System
US-2017278761-A1 · Sep 28, 2017 · US
Susceptor support
US-2017275777-A1 · Sep 28, 2017 · US
Parallel plate inline substrate processing tool
US-2017244006-A1 · Aug 24, 2017 · US
Substrate Processing Apparatus, Substrate Processing Method and Storage Medium
US-2017226639-A1 · Aug 10, 2017 · US
Conductive adhesive with spherical graphene and manufacturing method thereof
US-9725625-B2 · Aug 8, 2017 · US
Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same
US-9679779-B2 · Jun 13, 2017 · US
Multizone control of lamps in a conical lamphead using pyrometers
US-2017130359-A1 · May 11, 2017 · US
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
US-9587314-B2 · Mar 7, 2017 · US
Systems and methods for depositing materials on either side of a freestanding film using laser-assisted chemical vapor deposition (LA-CVD), and structures formed using same
US-9583354-B2 · Feb 28, 2017 · US
Heating system comprising semiconductor light sources
US-2016381732-A1 · Dec 29, 2016 · US
Process chamber with reflector
US-2016348276-A1 · Dec 1, 2016 · US
Absorbing lamphead face
US-2016336205-A1 · Nov 17, 2016 · US
Method for forming manganese-containing film
US-2016326646-A1 · Nov 10, 2016 · US
Apparatus and method for uv treatment, chemical treatment, and deposition
US-2016289838-A1 · Oct 6, 2016 · US
Conductive Adhesive with Spherical Graphene and Manufacturing Method thereof
US-2016280968-A1 · Sep 29, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C16/481?
- CPC C23C16/481 is the Cooperative Patent Classification code for “by radiant heating of the substrate.”
- How many patents are filed under CPC C23C16/481 (by radiant heating of the substrate)?
- Our database includes 258 publications tagged with this CPC code.
- Is patent activity under CPC C23C16/481 growing?
- Publication counts under this code: 28 in 2024 vs 25 in 2025 (latest complete years).