Absorbing lamphead face

Patent metadata

Field	Value
Publication number	US-2016336205-A1
Application number	US-201615220974-A
Country	US
Kind code	A1
Filing date	Jul 27, 2016
Priority date	Apr 26, 2013
Publication date	Nov 17, 2016
Grant date	—

Abstract

The embodiments described herein generally relate to a lamphead assembly with an absorbing upper surface in a thermal processing chamber. In one embodiment, a processing chamber includes an upper structure, a lower structure, a base ring connecting the upper structure to the lower structure, a substrate support disposed between the upper structure and the lower structure, a lower structure disposed below the substrate support, a lamphead positioned proximate to the lower structure with one or more fixed lamphead positions formed therein, the lamphead comprising a first surface proximate the lower structure and a second surface opposite the first surface, wherein the first surface comprises an absorptive coating and one or more lamp assemblies each comprising a radiation generating source and positioned in connection with the one or more fixed lamphead positions.

First claim

1 . A lamphead, comprising:
a radiation source structure, the radiation source structure comprising a first surface with an absorptive coating; and one or more radiation source positions formed in the radiation source structure, wherein the one or more radiation source positions increase in depth extending from an inner radius to an outer radius.

2 . The lamphead of claim 1 , wherein the absorptive coating is a carbon black paint.

3 . The lam phead of claim 1 , wherein the radiation source structure is conical.

4 . The lamphead of claim 1 , wherein the radiation source structure is water cooled.

5 . The lamphead of claim 1 , further comprising a printed circuit board disposed adjacent a second surface, wherein the second surface is opposite the first surface.

6 . The lamphead of claim 1 , wherein the radiation source structure comprises aluminum or copper.

7 . The lamphead of claim 1 , wherein the absorptive coating has a variety of thicknesses across the first surface.

8 . A lamphead, comprising:
a conical radiation source structure, the radiation source structure comprising a first surface with an absorptive coating; one or more radiation source positions formed in the radiation source structure, wherein the one or more radiation source positions increase in depth extending from an inner radius to an outer radius; and one or more channels disposed between the one or more radiation source positions.

9 . The lamphead of claim 8 , wherein the absorptive coating is a carbon black paint.

10 . The lamphead of claim 8 , wherein the radiation source structure is water cooled.

11 . The lamphead of claim 8 , further comprising a printed circuit board disposed adjacent a second surface, wherein the second surface is opposite the first surface.

12 . The lamphead of claim 8 , wherein the radiation source structure comprises aluminum or copper.

13 . The lamphead of claim 8 , wherein the absorptive coating is thicker near the inner radius and becomes subsequently thinner toward the outer radius.

14 . A lamphead, comprising:
a radiation source structure, the radiation source structure comprising a first surface with an absorptive coating, wherein the radiation source structure has a first thickness located at an outer radius and a second thickness located at an inner radius, and wherein the first thickness is greater than a second thickness; and one or more radiation source positions formed in the radiation source structure.

15 . The lamphead of claim 14 , wherein the absorptive coating is a carbon black paint.

16 . The lamphead of claim 14 , wherein the radiation source structure is water cooled.

17 . The lamphead of claim 14 , further comprising a printed circuit board disposed adjacent a second surface, wherein the second surface is opposite the first surface.

18 . The lamphead of claim 14 , wherein the radiation source structure comprises aluminum or copper.

19 . The lamphead of claim 14 , wherein the absorptive coating has a variety of thicknesses across the first surface.

20 . The lamphead of claim 14 , wherein the radiation source structure is conical.

Assignees

• Applied Materials Inc

Inventors

• Brillhart Paul
• Ranish Joseph M
• Kuppurao Satheesh
• Ramachandran Balasubramanian
• Zhu Zuoming

Classifications

• H10P72/0436 Primary

  mainly by radiation · CPC title

• C23C16/481

  by radiant heating of the substrate · CPC title

• F27B17/0025

  specially adapted for treating semiconductor wafers · CPC title

• H05B3/0047

  for semiconductor manufacture · CPC title

• F27D5/0037

  Supports specially adapted for semi-conductors · CPC title