Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same

Patent metadata

Field	Value
Publication number	US-9679779-B2
Application number	US-201313797549-A
Country	US
Kind code	B2
Filing date	Mar 12, 2013
Priority date	Mar 30, 2011
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

Embodiments of the present invention provide systems and methods for depositing materials on either side of a freestanding film using selectively thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same. A freestanding film, which is suspended over a cavity defined in a substrate, is exposed to a fluidic CVD precursor that reacts to form a solid material when exposed to heat. The freestanding film is then selectively heated in the presence of the precursor. The CVD precursor preferentially deposits on the surface(s) of the freestanding film.

First claim

What is claimed:

1. A structure comprising:
a substrate having a cavity defined therein, the cavity having a lower surface and a side surface each belonging to the substrate;
a film having first and second major film surfaces opposing one another and each suspended over and spanning the cavity, the film being thin relative to the substrate and including a different material than the substrate;
a first layer disposed on and in contact with the first major film surface at a portion of an area spanning the cavity, the first layer being disposed within the cavity and spatially separated from the side surface belonging to the substrate; and
a second layer disposed on and in contact with the second major film surface at the portion of the area spanning the cavity, the second layer having a different conductivity type than the first layer and being spatially separated from the side surface belonging to the substrate.

2. The structure of claim 1 , wherein the substrate has an upper surface, and wherein the film is disposed on the upper surface of the substrate.

3. The structure of claim 1 , wherein the substrate has an upper surface, and wherein the film is buried below the upper surface of the substrate.

4. The structure of claim 1 , wherein the film is substantially continuous.

5. The structure of claim 1 , wherein the film comprises an electrical insulator.

6. The structure of claim 5 , wherein one of the first layer or the second layer comprises an electrical conductor.

7. The structure of claim 6 , wherein the other of the first layer and the second layer comprises an electrical insulator or semiconductor.

8. The structure of claim 1 , wherein the cavity is isotropically defined in the substrate.

9. The structure of claim 1 , wherein the cavity has a substantially uniform depth.

10. A structure comprising:
a substrate haying a cavity defined therein, the cavity having a lower surface and a side surface each belonging to the substrate;
a film having first and second major film surfaces opposing one another and each suspended over and spanning the cavity, the film being thin relative to the substrate and including a different material than the substrate wherein the film comprises thermal oxide, hafnium oxide, silicon nitride, diamond-like carbon, graphene, or silicon carbide;
a first layer disposed on the first major film surface at a portion of an area spanning the cavity, the first layer being disposed within the cavity and spatially separated from the side surface belonging to the substrate; and
a second layer disposed on the second major film surface at the portion of the area spanning the cavity and being spatially separated from the side surface belonging to the substrate.

11. The structure of claim 1 , wherein the substrate comprises silicon, germanium, gallium phosphide, gallium nitride, gallium arsenide, or indium phosphide.

12. The structure of claim 1 , wherein the first and second layers each independently comprise a conductor, a semiconductor, or an insulator.

13. A method of preparing a structure, the method comprising:
providing a film including first and second major film surfaces opposing one another and each suspended over and spanning a cavity defined in a substrate, the cavity being shallow relative to the substrate and having a lower surface and a side surface each belonging to the substrate, the film being thin relative to the cavity;
forming a first layer disposed on and in contact with the first major film surface at a portion of an area spanning the cavity, the first layer being disposed within the cavity and spatially separated from the side surface belonging to the substrate;
forming a second layer disposed on and in contact with the second major film surface at the portion of the area spanning the cavity, the second layer having a different conductivity type than the first layer and being spatially separated from the side surface belonging to the substrate.

14. The method of claim 13 , wherein said selectively heating the film comprises irradiating the film with a laser beam, an electron beam, or an ion beam.

15. The method of claim 13 , wherein said selectively heating the film comprises exposing the film to directional thermal radiation.

16. The method of claim 13 , wherein said selectively heating the film comprises heating both the substrate and the film and preferentially cooling the substrate relative to the film.

17. The method of claim 13 , comprising concurrently exposing the first and second major film surfaces to the first and second CVD precursors, respectively, while selectively heating the film relative to the substrate.

18. The method of claim 13 , wherein the first CVD precursor or the second CVD precursor, or both, comprises a gas.

19. The method of claim 13 , wherein the film comprises an electrical insulator, wherein the first CVD precursor comprises a metalorganic compound, and wherein the first layer comprises a metal.

20. The method of claim 19 , wherein the second layer comprises an electrical insulator or a semiconductor.

21. The method of claim 13 , wherein providing the film comprises:
providing the substrate;
affixing the film to the substrate;
exposing the film and the substrate to an etchant while transmitting a laser beam through the film,
the etchant etching the substrate in a region defined by the laser beam so as to define the cavity wider the film.

22. The method of claim 21 , wherein the laser beam isotropically defines the cavity.

23. The method of claim 21 , comprising exposing the film to the etchant and to the first and second CVD precursors in a single gas cell.

24. The structure of claim 1 , wherein the film comprises hafnium oxide, silicon nitride, diamond-like carbon, graphene, or silicon carbide.

25. The structure of claim 1 , wherein the substrate comprises germanium, gallium phosphide, gallium nitride, gallium arsenide, or indium phosphide, or consists essentially of silicon.

Assignees

• Aerospace Corp

Inventors

• Taylor David P
• Abraham Margaret H

Classifications

• H10P50/242

  of Group IV materials · CPC title

• H10P14/40 Primary

  of conductive or resistive materials · CPC title

• H01L21/28506 Primary

  Electricity · mapped topic

• G02B5/285

  comprising deposited thin solid films (G02B5/281 - G02B5/289 take precedence; multilayered film filters for fibre optic multiplexing G02B6/29361) · CPC title

• H01L28/87

  Electricity · mapped topic