Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product

Patent metadata

Field	Value
Publication number	US-12340973-B2
Application number	US-202217663323-A
Country	US
Kind code	B2
Filing date	May 13, 2022
Priority date	Nov 27, 2019
Publication date	Jun 24, 2025
Grant date	Jun 24, 2025

Abstract

A particle beam system, such as a multi-beam particle microscope, includes a multi-beam deflection device and a beam stop. The multi-beam deflection device is arranged in the particle-optical beam path downstream of the multi-beam generator and upstream of the beam switch of the particle beam system. The multi-beam deflection device serves collectively blanks a multiplicity of charged individual particle beams. These impinge on a beam stop, which is arranged in the particle-optical beam path level with a site at which a particle beam diameter is reduced or is at a minimum. By way of example, such sites are the cross-over plane of the individual particle beams or an intermediate image plane. Associated methods for operating the particle beam system and associated computer program products are disclosed.

First claim

What is claimed is:

1. A particle beam system, comprising:
a particle source configured to generate a beam of charged particles;
a first particle-optical unit having a first particle-optical beam path, the first particle-optical unit comprising:
a multi-beam generator configured to generate a multiplicity of first individual charged particle beams from the beam of charged particles generated by the particle source, the first individual charged particle beams following the first particle-optical beam path;
an objective lens configured to direct the multiplicity of first individual charged particle beams to an object plane so that the first individual charged particle beams follow the first particle-optical path and impinge on the object plane at a multiplicity of sites of incidence;
a beam switch in the first particle-optical beam path between the multi-beam generator and the objective lens;
a beam stop in the first particle-optical beam path; and
a multi-beam deflection device in the first particle-optical beam path downstream of the multi-beam generator and upstream of the beam switch;

a detector unit;
a second particle-optical unit to image a multiplicity of second individual charged particle beams, which emanate from sites of incidence in the object plane, onto the detector unit along a second particle-optical beam path,
wherein:
the beam switch is in the second particle-optical beam path between the objective lens and the detector unit;
the particle beam system is configured so that the first particle-optical beam path and the second particle-optical beam path branch within the beam switch;
the multi-beam deflection device comprises a controller configured to collectively deflect the first individual charged particle beams temporarily via the multi-beam deflection device so that the first individual charged particle beams are substantially incident on the beam stop and not on the object plane;
the beam stop is arranged in the first particle-optical beam path level with a site at which a particle beam diameter is reduced or is at a minimum;
the beam stop comprises a cup; and
the cup is at least partly embedded in the objective lens, and/or the cup is replaceable.

2. The particle beam system of claim 1 , wherein the first particle-optical beam path has a cross-over plane of the first individual charged particle beams upstream of the objective lens, and the beam stop is arranged in the first particle-optical beam path level with the cross-over plane.

3. The particle beam system of claim 1 , wherein the beam stop is arranged in the first particle-optical beam path level with an upper focal plane of the objective lens facing the multi-beam generator.

4. The particle beam system of claim 1 , wherein at least one of the following holds:
the first particle-optical beam path has a cross-over plane of the first individual charged particle beams, and the multi-beam deflection device is controllable so that the deflected first individual charged particle beams substantially experience a parallel offset in the cross-over plane; and
the objective lens has an upper focal plane, and the multi-beam deflection device is controllable so that the deflected first individual charged particle beams substantially experience a parallel offset in the upper focal plane.

5. The particle beam system of claim 1 , wherein the cup is substantially rotationally symmetric with respect to the optical axis of the particle beam system.

6. The particle beam system of claim 1 , wherein:
the cup comprises a passage opening along its longitudinal axis;
the cup comprises a trench with an annular cross section around the passage opening; and
the cup is configured so that the optical axis of the particle beam system extends through the passage opening of the cup.

7. The particle beam system of claim 6 , wherein a beam entry opening of the trench has a sharp edge on its inner annulus, a surface extends into the trench from the sharp edge, and the surface is inclined with respect to the longitudinal axis of the cup and points away from the longitudinal axis.

8. The particle beam system of claim 7 , wherein a diameter of the passage opening in the beam entry region increases starting from the beam entry opening of the passage opening.

9. The particle beam system of claim 6 , further comprising an absorber material at the bottom of the annular trench.

10. The particle beam system of claim 1 , wherein a distance between the multi-beam deflection device and the beam stop is at least 20 cm.

11. The particle beam system of claim 1 , wherein the multi-beam deflection device comprises deflection plates.

12. The particle beam system of claim 1 , wherein the multi-beam deflection device comprises a multi-stage device.

13. The particle beam system of claim 1 , wherein the multi-beam deflection device is configured to deflect the first individual charged particle beams in different deflection directions.

14. A method, comprising:
providing the particle beam system of claim 1 ;
scanning an object via the first individual charged particle beams in a first line; and
scanning the object via the first individual charged particle beams in a second line;
deflecting the first individual charged particle beams via the multi-beam deflection device during a line jump from the first line to the second line in accordance with a first setting of the multi-beam deflection device.

15. One or more machine-readable hardware storage devices comprising instructions that are executable by one or more processing devices to perform operations comprising the method of claim 14 .

16. A system, comprising:
one or more processing devices; and
one or more machine-readable hardware storage devices comprising instructions that are executable by the one or more processing devices to perform operations comprising the method of claim 14 .

17. The method of claim 14 , further comprising:
scanning the object via the first individual particle beams along a third line; and
deflecting the individual particle beams via the multi-beam deflection device during a line jump from the second line to the third line according to a second setting of the multi-beam deflection device,
wherein the second setting is different from the first setting.

18. The method of claim 14 , further comprising randomly selecting different settings of the multi-beam deflection device.

19. A method, comprising:
providing the particle beam system of claim 1 ;
scanning a first region of an object via the first individual particle beams;
scanning a second region of the object via the first individual particle beams; and
deflecting the individual particle beams via the multi-beam deflection device during a change of region from the first region to the second region at least according to a first setting of the multi-beam deflection device.

20. The method of claim 19 , further comprising alternately using different settings of the multi-beam deflection device during the change of region.

Assignees

• Carl Zeiss Multisem Gmbh

Inventors

• Schubert Stefan
• Schumacher Dieter
• Essers Erik
• Mueller Ingo
• Thoma Arne
• Jacobi Joerg
• Bolsinger Wilhelm
• Zeidler Dirk

Classifications

• H01J2237/0435

  Multi-aperture · CPC title

• H01J37/3177

  Multi-beam, e.g. fly's eye, comb probe · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/1474

  Scanning means · CPC title

• H01J37/045

  Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge · CPC title