Multi-beam particle microscope and method for operating same

Patent metadata

Field	Value
Publication number	US-9536702-B2
Application number	US-201514724541-A
Country	US
Kind code	B2
Filing date	May 28, 2015
Priority date	May 30, 2014
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A multi-beam particle microscope includes first particle optics in order to direct particle beams onto an object, a detector with detection regions, with a transducer being assigned to each detection region, and a data acquisition system, which has a control computer system, image recording computer systems and a screen. The image recording computer systems receive electrical signals from the transducers and generates a first file, which represents a high resolution image, and a second file, which represents a low resolution image. The control computer system maintains a data structure which represents an assignment of transducers to two-dimensional spatial vectors and depicts the images on the screen, wherein a reference point in each image is arranged on the screen in a coordinate system of the screen at a location which is defined by a sum of a leading vector, which is the same for all images, and the spatial vector.

First claim

The invention claimed is:

1. A multi-beam particle microscope, comprising:
a multi-beam source configured to generate a first array of a plurality of first particle beams;
first particle optics configured to direct the first particle beams onto an object so that the first particle beams are incident at locations of incidence on the object, which form a second array;
a detector comprising a plurality of detection regions or a plurality of detectors which each have one detection region, the detection regions being arranged in a third array, the detector or detectors comprising a plurality of transducers, a transducer being assigned to each detection region and configured to generate an electrical signal representing a particle intensity incident on the detection region; and
a data acquisition system comprising a control computer system and at least one image recording computer system,
wherein:
i) the at least one image recording computer system is configured to:
a) receive the electrical signals from at least one of the transducers;
b) generate a first file from the received electrical signals, the first file representing a first particle-microscopic image of a region of the object scanned by one of the plurality of first particle beams, the image represented by the first file being an image with a high image resolution, and the first file having a file size that is greater than a first value;
c) generate a second file from the received electrical signals, the second file representing a second particle-microscopic image of the region of the object, the image represented by the second file being an image with a low image resolution, the second file having a file size that is less than a second value, and the second value being less than the first value; and
d) transmit the second file to the control computer system; and
ii) the control computer system is configured to:
a) receive the second images from the at least one image recording computer system;
b) maintain a data structure representing an assignment of transducers to two-dimensional spatial vectors; and
c) display the images received from the transducers on a screen, a reference point in each image on the screen being arranged, in a coordinate system of the screen, at a location which is definable by a sum of:
a) a leading vector which is the same for all images; and
b) a spatial vector assigned to the transducer from which the image recording computer system has received the electrical signals in order to generate the image.

2. The multi-beam particle microscope of claim 1 , further comprising second particle optics configured to direct second particle beams emanating from the locations of incidence in the second array from locations of incidence at the object to the third array of detection regions so that:
each second particle beam is incident on at least one of the detection regions arranged in the third array; and
second particle beams that differ from one another are incident on detection regions that differ from one another.

3. The multi-beam particle microscope of claim 2 , wherein:
the locations of incidence in the second array, in a coordinate system of the object, are respectively defined as a sum of: a leading vector which is the same for all locations of incidence; and a vector; and
each spatial vector in the coordinate system of the screen is a product of: one of the vectors in the coordinate system of the object; and a factor which is the same for all spatial vectors.

4. The multi-beam particle microscope of claim 1 , wherein:
the locations of incidence in the second array, in a coordinate system of the object, are respectively defined as a sum of: a leading vector which is the same for all locations of incidence; and a vector; and
each spatial vector in the coordinate system of the screen is a product of: one of the vectors in the coordinate system of the object; and a factor which is the same for all spatial vectors.

5. The multi-beam particle microscope of claim 1 , wherein the locations of incidence in the second array are arranged in a hexagonal pattern.

6. A method of operating a multi-beam particle microscope, a field of view of the multi-beam microscope being smaller than a region of interest of an object to be examined, the method comprising:
providing an overview image of an object and a region of interest of the object contained in the overview image;
arranging the object to be examined at a sample holder of the multi-beam particle microscope;
determining a coordinate transformation which transforms coordinates of the overview image into coordinates of the sample holder;
calculating a tessellation of the region of interest with area pieces which, with respect to their form and size, correspond to a field of view of the multi-beam particle microscope such that the region of interest is covered without gaps and substantially without overlap by way of the area pieces;
repeatedly: a) position the sample stage relative to the multi-beam particle microscope so that the field of view of the multi-beam particle microscope corresponds to one of the area pieces; and b) record and store a particle-microscopic image of the area piece for all area pieces of the tessellation; and
stitching the stored particle-microscopic images such that the stitched image represents a particle-microscopic image of at least the whole region of interest.

7. The method of claim 6 , wherein each area piece used for the tessellation has the same form.

8. The method of claim 7 , wherein the area pieces are stitched together from rectangles having the same size.

9. The method of claim 8 , wherein the rectangles are arranged in the area piece line-by-line so that center points of the rectangles within the lines are arranged along first straight lines parallel to one another.

10. The method of claim 9 , wherein the area piece has at least one group made of more than three lines in which the number of rectangles per line differs by one between mutually adjacent lines.

11. The method of claim 10 , wherein:
the area piece has a first edge defined by a first edge of a first line of rectangles, the first line containing a minimum number of rectangles;
at least three further lines are adjacent to the first line, the at least three further lines respectively containing a number of rectangles which increases from line to line until at least a central line of the area piece contains a maximum number of rectangles; and
at least three further lines are adjacent to the at least one central line, the at least three further lines respectively containing a number of rectangles which decreases from line to line until a last line of the area piece contains the minimum number of rectangles.

12. The method of claim 9 , wherein the area piece has at least one group made of more than four lines in which the number of rectangles per line differs by one between mutually adjacent lines.

13. The method of claim 12 , wherein:
the area piece has a first edge defined by a first edge of a first line of rectangles, the first line containing a minimum number of rectangles;
at least three further lines are adjacent to the first line, the at least three further lines respectively containing a number of rectangles which increases from line to line until at least a central line of the area piece contains a maximum number of rectangles; and
at least three further lines are adjacent to the at least one central line, the at least three further lines respectively containing a number of rectangles which decreases from line to line until a last line of the area piece contains the minimum number of rectangles.

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Lang Uwe
• Crueger Christian
• Kaemmer Nico
• Riedesel Christof

Classifications

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/1205

  Microlenses · CPC title

• H01J2237/063

  Electron sources · CPC title

• H01J2237/0453

  multiple apertures · CPC title