Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distance
US-2026081105-A1 · Mar 19, 2026 · US
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Mueller Ingo patents
Mueller Ingo is listed as an inventor on 43 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mueller Ingo |
| Total patents | 43 |
| First publication | Dec 10, 2015 |
| Latest publication | Mar 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
High throughput multi-beam charged particle inspection system with dynamic control
US-2026024721-A1 · Jan 22, 2026 · US
Particle beam system
US-2025379030-A1 · Dec 11, 2025 · US
Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distance
US-12494343-B2 · Dec 9, 2025 · US
Multi-beam charged particle microscope design with adaptive detection system
US-2025372343-A1 · Dec 4, 2025 · US
Multi-beam particle microscope comprising an aberration correction unit having geometry-based correction electrodes, and method for adjusting the aberration correction, and computer program product
US-2025285831-A1 · Sep 11, 2025 · US
Particle beam system
US-2025232951-A1 · Jul 17, 2025 · US
Multi-beam particle microscope with improved beam tube
US-2025218719-A1 · Jul 3, 2025 · US
Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product
US-12340973-B2 · Jun 24, 2025 · US
Particle beam system
US-12293896-B2 · May 6, 2025 · US
Recent patents
Latest publications not already listed above.
Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt
US-12283457-B2 · Apr 22, 2025 · US
Multiple charged particle beam system with a mirror mode of operation, method for operating a multi-beam charged particle microscope system with a mirror mode of operation and associated computer program product
US-2024371596-A1 · Nov 7, 2024 · US
Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system
US-2024347316-A1 · Oct 17, 2024 · US
Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system
US-12057290-B2 · Aug 6, 2024 · US
Method for operating a multi-beam particle microscope with fast closed-loop beam current control, computer program product and multi-beam particle microscope
US-2024128048-A1 · Apr 18, 2024 · US
Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distance
US-2023245852-A1 · Aug 3, 2023 · US
Particle beam system with multi-source system and multi-beam particle microscope
US-2023065475-A1 · Mar 2, 2023 · US
High throughput multi-beam charged particle inspection system with dynamic control
US-2023043036-A1 · Feb 9, 2023 · US
Charged particle beam system
US-11562881-B2 · Jan 24, 2023 · US
Particle beam system for adjusting the current of individual particle beams
US-11562880-B2 · Jan 24, 2023 · US
Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product
US-2022277927-A1 · Sep 1, 2022 · US
Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt
US-2022246388-A1 · Aug 4, 2022 · US
Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system
US-2022130640-A1 · Apr 28, 2022 · US
Charged Particle Beam System
US-2022108864-A1 · Apr 7, 2022 · US
Charged particle beam system
US-11164715-B2 · Nov 2, 2021 · US
Particle beam system for adjusting the current of individual particle beams
US-2021210303-A1 · Jul 8, 2021 · US
Particle Beam System
US-2021142980-A1 · May 13, 2021 · US
Charged particle beam system
US-2020411274-A1 · Dec 31, 2020 · US
Adaptive dictionary compression/decompression for column-store databases
US-10824596-B2 · Nov 3, 2020 · US
Charged particle beam system
US-10811215-B2 · Oct 20, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Carl Zeiss Multisem Gmbh | 29 |
| Sap Se | 9 |
| Zeiss Carl Microscopy Gmbh | 5 |
| Mueller Ingo | 1 |
| Ratsch Cornelius | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 34 |
| H01J37/21 | 17 |
| H01J37/244 | 15 |
| H01J37/10 | 15 |
| H01J37/153 | 13 |