Switch circuit and method of switching radio frequency signals

Patent metadata

Field	Value
Publication number	US-11206017-B2
Application number	US-202016930215-A
Country	US
Kind code	B2
Filing date	Jul 15, 2020
Priority date	Oct 10, 2001
Publication date	Dec 21, 2021
Grant date	Dec 21, 2021

Abstract

A novel RF switch circuit and method for switching RF signals is described. The RF switch circuit is fabricated in a silicon-on-insulator (SOI) technology. The RF switch includes pairs of switching and shunting transistor groupings used to alternatively couple RF input signals to a common RF node. The switching and shunting transistor grouping pairs are controlled by a switching control voltage (SW) and its inverse (SW_). The switching and shunting transistor groupings comprise one or more MOSFET transistors connected together in a “stacked” or serial configuration. The stacking of transistor grouping devices, and associated gate resistors, increase the breakdown voltage across the series connected switch transistors and operate to improve RF switch compression. A fully integrated RF switch is described including digital control logic and a negative voltage generator integrated together with the RF switch elements. In one embodiment, the fully integrated RF switch includes a built-in oscillator, a charge pump circuit, CMOS logic circuitry, level-shifting and voltage divider circuits, and an RF buffer circuit. Several embodiments of the charge pump, level shifting, voltage divider, and RF buffer circuits are described. The inventive RF switch provides improvements in insertion loss, switch isolation, and switch compression.

First claim

What is claimed is:

1. A method of fabricating a radio frequency (RF) switch circuit comprising:
fabricating an integrated circuit (IC) that includes the RF switch circuit;
wherein the fabricating the IC includes forming at least a plurality of respective N-type metal oxide semiconductor field effect transistors (NMOSFETs) in a silicon layer over a substrate and further includes forming metal oxide semiconductor field effect transistors in the silicon layer for a negative voltage generator circuit comprising a charge pump and for a digital control logic circuit;
wherein the fabricating the IC further includes fabricating one or more layers of metallization over the silicon layer;
wherein the one or more layers of metallization are fabricated to couple the plurality of respective NMOSFETs into a transistor stack configuration to pass an RF signal through the transistor stack configuration of the plurality of respective NMOSFETs in an ON state of the transistor stack configuration of the plurality of respective NMOSFETs;
wherein the one or more layers of metallization are fabricated to couple the plurality of respective NMOSFETs of the transistor stack configuration to not pass an RF signal through the transistor stack configuration of the plurality of respective NMOSFETs in an OFF state of the transistor stack configuration of the plurality of respective NMOSFETs;
wherein the one or more layers of metallization are fabricated to further couple the metal oxide semiconductor field effect transistors for the negative voltage generator circuit comprising the charge pump and for the digital control logic circuit;
wherein the digital control logic circuit is fabricated to provide one or more control signals to the RF switch circuit, and wherein the negative voltage generator circuit that comprises the charge pump is fabricated to generate a negative voltage with respect to a reference voltage;
wherein the RF switch circuit is fabricated to comprise a switch transistor grouping comprising the plurality of respective NMOSFETs arranged in the transistor stack configuration coupled between a first switch node and a second switch node, the switch transistor grouping fabricated to be controlled by a switch transistor grouping control signal of the one or more control signals in either a switch enable state or a switch disable state, the snitch transistor grouping, in the switch enable state, is fabricated to pass an RF signal between the first and second switch nodes and, in the switch disable state, is fabricated to not pass an RF signal between the first and second switch nodes; and
wherein the negative voltage generator circuit comprising the charge pump is fabricated to generate the negative voltage with respect to the reference voltage in which the negative voltage is to at least in part be employed with respect to one or more gates of the plurality of respective NMOSFETs of the switch transistor grouping in the switch disable state.

2. The method of claim 1 , wherein the substrate comprises a silicon on insulator (SOI) substrate.

3. The method of claim 2 , wherein the forming the plurality of respective NMOSFETs in the silicon layer comprises:
forming a gate from a conductive layer and an oxide layer over the silicon layer; and
forming two N+ regions in the silicon layer via ion implantation or diffusion to form a source, a drain, and a body.

4. The method of claim 3 , wherein the forming the gate from the conductive layer comprises forming the gate from a polysilicon gate layer.

5. The method of claim 3 , wherein the silicon layer comprises a thin-film silicon layer with a thickness of less than 150 nm.

6. The method of claim 3 , wherein the forming the two N+ regions comprises forming the two N+ regions to extend through the silicon layer to an insulating layer of the SOI substrate.

7. The method of claim 1 , wherein the IC is fabricated to connect the reference voltage to a ground node.

8. The method of claim 1 , wherein the RF switch circuit is fabricated to be operable either to pass or not pass a high-power RF signal in connection with RF transmission of one or more RF signals.

9. The method of claim 1 , wherein the plurality of respective NMOSFETs arranged in the transistor stack configuration is fabricated to comprise at least three NMOSFETs in which one or more gates of the plurality of respective NMOSFETs are respectively coupled to one or more respective resistors.

10. The method of claim 9 , wherein at least one respective resistor of the one or more respective resistors is fabricated to have a value of at least 30 kohms.

11. The method of claim 1 , wherein the transistor stack configuration is fabricated to be capable to withstand an RF voltage across the switch transistor grouping having a voltage magnitude greater than a breakdown voltage of an individual NMOSFET in the transistor stack configuration.

12. The method of claim 1 , wherein the IC is fabricated to operate in a cellular wireless communication system.

13. The method of claim 1 , wherein the IC is fabricated to operate to at least achieve electrical isolation between the RF switch circuit and the negative voltage generator circuit for use of the IC in an at least GSM compliant cellular wireless communication system.

14. The method of claim 1 , wherein the fabricating the IC further comprises forming another plurality of respective NMOSFETs in the silicon layer over the substrate;
wherein the one or more layers of metallization are fabricated to couple the another plurality of respective NMOSFETs into another transistor stack configuration to shunt a shunt node to a ground node in an ON state of the another transistor stack configuration of the another plurality of respective NMOSFETs;
wherein the one or more layers of metallization are fabricated to couple the another plurality of respective NMOSFETs of the another transistor stack configuration to not shunt the shunt node to the ground node in an OFF state of the another transistor stack configuration of the another plurality of respective NMOSFETs;
wherein the RF switch circuit is fabricated to comprise a shunt transistor grouping comprising the another plurality of respective NMOSFETs arranged in the another stack transistor configuration and coupled between the shunt node and the ground node, wherein the shunt node is fabricated to be coupled with the first switch node, the shunt transistor grouping is fabricated to be controlled by a shunt transistor grouping control signal to be in either a shunt enable state or a shunt disable state, the shunt transistor grouping, in the shunt enable state, is fabricated to shunt the shunt node to the ground node and, in the shunt disable state, is fabricated to not shunt the shunt node to the ground node; and
the negative voltage generator circuit comprising the charge pump is fabricated to generate the negative voltage with respect to the reference voltage in which the negative voltage is to at least in part be employed with respect to one or more gates of the another plurality of respective NMOSFETs of the shunt transistor grouping in the shunt disable state.

15. The method of claim 14 , wherein the another plurality of respective NMOSFETs arranged in the another transistor stack configuration is fabricated to comprise at least three NMOSFETs in which one or more gates of the the another plurality of respective NMOSFETs are respectively coupled to one or more respective resistors.

16. The method of claim 15 , wherein at least one respective resistor of the one or more respective resistors is fabricated to have a value of at least 30

Assignees

• Psemi Corp

Inventors

• Burgener Mark L
• Cable James S
• Benton Robert H

Classifications

• H01P1/15 Primary

  by semiconductor devices · CPC title

• H03K17/6871 Primary

  the output circuit comprising more than one controlled field-effect transistor · CPC title

• H03K2017/0803

  against radiation hardening · CPC title

• H03K17/102

  in field-effect transistor switches · CPC title

• H03K17/693

  Switching arrangements with several input- or output-terminals, e.g. multiplexers, distributors (logic circuits H03K19/00; code converters H03M5/00, H03M7/00) · CPC title