FinFET resistive switching device having interstitial charged particles for memory and computational applications

Patent metadata

Field	Value
Publication number	US-11201244-B2
Application number	US-201916410179-A
Country	US
Kind code	B2
Filing date	May 13, 2019
Priority date	May 13, 2019
Publication date	Dec 14, 2021
Grant date	Dec 14, 2021

Abstract

Embodiments of the invention are directed to a resistive switching device (RSD). A non-limiting example of the RSD includes a fin-shaped element formed on a substrate, wherein the fin-shaped element includes a source region, a central channel region, and a drain region. A gate is formed over a top surface and sidewalls of the central channel region. The fin-shaped element is doped with impurities that generate interstitial charged particles configured to move interstitially through a lattice structure of the fin-shaped element under the influence of an electric field applied to the RSD.

First claim

What is claimed is:

1. An apparatus comprising:
an addressable non-volatile memory (NVM) array comprising a plurality of addressable resistive random-access memory (RRAM) storage cells;
wherein each addressable RRAM storage cell of the plurality of RRAM storage cells comprises an addressable resistive switching device (RSD) comprising:
a fin-shaped element formed on a substrate, wherein the fin-shaped element comprises a source region, a central channel region, and a drain region; and
a gate formed over a top surface and sidewalls of the central channel region;

wherein the fin-shaped element is doped with impurities that generate interstitial charged particles configured to move interstitially through a lattice structure of the fin-shaped element under the influence of an electric field applied to the addressable RSD to set a state of the addressable RSD;
wherein the state of the addressable RSD functions as stored data of the addressable RRAM storage cell; and
wherein the source region, the drain region, and the central region are doped with the impurities that generate the impurities that generate the interstitial charged particles.

2. The apparatus of claim 1 , wherein the impurities are selected from a group consisting of lithium, sodium, and potassium.

3. The apparatus of claim 1 , wherein the addressable RSD is configured to generate the electric field based at least in part on a bias applied between the gate and the drain region.

4. The apparatus of claim 1 , wherein the addressable RSD is configured to generate the electric field based at least in part on a bias applied between the gate and the source region.

5. The apparatus of claim 1 , wherein:
the addressable RSD functions as both an addressable field effect transistor (FET) and the addressable RSD;
when the addressable RSD functions as the addressable FET, a threshold voltage of the addressable RSD applied to the gate generates current-flow from the source region through the central channel region to the drain region;
when the addressable RSD functions as the addressable RSD, interstitially moving the interstitial charged particles through the lattice structure of the fin-shaped element results in the threshold voltage of the addressable RSD changing;
the threshold voltage of the addressable RSD changing results in a resistance of the addressable RSD changing;
the state of the addressable RSD comprises the resistance of the addressable RSD; and
the addressable RSD is further configured to:
change the state of the addressable RSD based at least in part on an application of the electric field to the addressable RSD; and
maintain the state of the addressable RSD based at least in part on the electric field not being applied to the addressable RSD.

6. The apparatus of claim 1 further comprising a gate dielectric positioned between the gate and the central channel region, wherein the gate dielectric functions as a barrier to substantially prevent the interstitial charged particles from leaving the fin-shaped element.

7. The apparatus of claim 1 , wherein the substrate comprises a bulk semiconductor material.

8. The apparatus of claim 1 , wherein:
the substrate comprises a semiconductor-on-insulator (SOI) material; and
an insulator region of the SOI material functions as a barrier to substantially prevent the interstitial charged particles from leaving the fin-shaped element.

9. The apparatus of claim 1 , wherein:
the substrate comprises a substrate material selected from a group consisting of silicon, silicon germanium, gallium, and gallium arsenide; and
the fin-shaped element comprises a fin material selected from a group consisting of silicon, silicon germanium, gallium, and gallium arsenide.

10. A method of forming an apparatus, the method comprising:
forming an addressable non-volatile memory (NVM) array comprising a plurality of addressable resistive random-access memory (RRAM) storage cells;
wherein each addressable RRAM storage cell of the plurality of RRAM storage cells comprises an addressable resistive switching device (RSD) comprising:
a fin-shaped element on a substrate, wherein the fin-shaped element comprises a source region, a central channel region, and a drain region; and
a gate over a top surface and sidewalls of the central channel region;

wherein the fin-shaped element is doped with impurities that generate interstitial charged particles configured to move interstitially through a lattice structure of the fin-shaped element under the influence of an electric field applied to the addressable RSD to set a state of the addressable RSD;
wherein the state of the addressable RSD functions as stored data of the addressable RRAM storage cell; and
wherein the source region, the drain region, and the central region are doped with the impurities that generate the impurities that generate the interstitial charged particles.

11. The method of claim 10 , wherein the impurities that generate the interstitial charged particles are selected from a group consisting of lithium, sodium, and potassium.

12. The method of claim 10 further comprising forming a gate dielectric between the gate and the central channel region, wherein the gate dielectric functions as a barrier to substantially prevent the interstitial charged particles from leaving the fin-shaped element.

13. The method of claim 10 , wherein the substrate is selected from a group consisting of:
a bulk semiconductor material; and
a semiconductor-on-insulator (SOI) material.

14. The method of claim 10 , wherein:
the substrate is selected from a group consisting of silicon, silicon germanium, gallium, and gallium arsenide; and
the fin-shaped element is selected from a group consisting of silicon, silicon germanium, gallium, and gallium arsenide.

Assignees

• IBM

Inventors

• De Souza Joel P
• Khan Babar
• Kumar Arvind
• Lee Yun Seog
• Li Ning
• Sadana Devendra K

Classifications

• H10D30/024

  of fin field-effect transistors [FinFET] · CPC title

• H10D30/62

  Fin field-effect transistors [FinFET] · CPC title

• H10D64/017

  using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes · CPC title

• H10D62/854

  further characterised by the dopants · CPC title

• H10D62/834 Primary

  further characterised by the dopants · CPC title