Composition for forming organic film

Patent metadata

Field	Value
Publication number	US-11042090-B2
Application number	US-201816044015-A
Country	US
Kind code	B2
Filing date	Jul 24, 2018
Priority date	Aug 4, 2017
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

The present invention provides a composition for forming an organic film, containing a polymer compound having one or more of repeating units shown by the general formulae (1) to (4) and an organic solvent containing one or more compounds selected from propylene glycol esters, ketones, and lactones, with a total concentration of more than 30 wt % with respect to the whole organic solvent. There can be provided a composition capable of forming an organic film that can be easily removed, together with a silicon residue modified by dry etching, in a wet manner with a removing liquid harmless to a semiconductor apparatus substrate and an organic resist underlayer film required in the patterning process, for example, an ammonia aqueous solution containing hydrogen peroxide called SC1, which is commonly used in the semiconductor manufacturing process.

First claim

What is claimed is:

1. A composition for forming an organic film, comprising:
a polymer compound having one or more repeating units shown by the following general formulae (2-1), (2-2), (3-1), and (3-2), wherein a proportion of the one or more repeating units shown by the general formulae (2-1), (2-2), (3-1) and (3-2) to all repeating units is 10% or more, with a whole of repeating units being 100%;
an organic solvent containing one or more compounds selected from propylene glycol esters, ketones, and lactones, the compounds having a total concentration of more than 30 wt % with respect to a whole organic solvent; and
a thermal acid generator, or a crosslinking agent, or both,
wherein the general formulae (2-1), (2-2), (3-1), and (3-2) are:

wherein
R 1 represents a hydrocarbon group having 1 to 19 carbon atoms, a halogen atom, an alkoxy group, a carboxyl group, a sulfo group, a methoxycarbonyl group, a hydroxyphenyl group, or an amino group;
R 2 represents a hydrogen atom or AL which is a group capable of generating an acidic functional group by heat or acid, and in the general formula (2-1), R 2 represents a hydrogen atom or a t-butyl group;
k 2 and k 3 represent 1 or 2;
“l” represents 1 to 3;
“m” represents 0 to 3.

2. The composition for forming an organic film according to claim 1 , wherein when the composition is applied onto a substrate by spin coating and then heated, the composition can provide an organic film that exhibits a dissolution rate of 5 nm/min or more by treatment with a solution containing 29% ammonia water, 35% hydrogen peroxide water, and water with a ratio of 1:1:8 at 65° C.

3. The composition for forming an organic film according to claim 1 , wherein the composition can provide an organic film having a thickness of 10 nm or more and less than 100 nm.

4. The composition for forming an organic film according to claim 2 , wherein the composition can provide an organic film having a thickness of 10 nm or more and less than 100 nm.

5. The composition for forming an organic film according to claim 1 , wherein R 1 represents a hydrocarbon group having 1 to 19 carbon atoms, an alkoxy group, a carboxyl group, a methoxycarbonyl group, and a hydroxyphenyl group.

6. The composition for forming an organic film according to claim 5 , wherein the propylene glycol esters include propylene glycol methyl ether acetate.

7. The composition for forming an organic film according to claim 6 , wherein the polymer compound has one or more of the repeating units shown by the general formulae (2-2), (3-1), and (3-2).

Assignees

• Shinetsu Chemical Co

Inventors

• Tachibana Seiichiro
• Nagai Hiroko
• Kori Daisuke
• Ogihara Tsutomu

Classifications

• G03F7/094 Primary

  Multilayer resist systems, e.g. planarising layers · CPC title

• G03F7/162

  Coating on a rotating support, e.g. using a whirler or a spinner · CPC title

• G03F7/11 Primary

  having cover layers or intermediate layers, e.g. subbing layers {(G03F7/091 - G03F7/093, B41N3/03 take precedence)} · CPC title

• C08G8/20

  with polyhydric phenols · CPC title

• C08G8/22

  Resorcinol · CPC title