Optical component
US-10078271-B2 · Sep 18, 2018 · US
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Waldis Severin patents
Waldis Severin is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Waldis Severin |
| Total patents | 8 |
| First publication | Jul 2, 2015 |
| Latest publication | Sep 18, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
US-9946161-B2 · Apr 17, 2018 · US
Optical component
US-9804501-B2 · Oct 31, 2017 · US
Mirror array
US-9791691-B2 · Oct 17, 2017 · US
Microlithographic projection exposure apparatus
US-9535336-B2 · Jan 3, 2017 · US
Illumination system of a microlithographic projection exposure apparatus having a temperature control device
US-9523922-B2 · Dec 20, 2016 · US
Light modulator and illumination system of a microlithographic projection exposure apparatus
US-9274434-B2 · Mar 1, 2016 · US
Method for regulating the tilting of a mirror element
US-2015185469-A1 · Jul 2, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 8 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70116 | 8 |
| G03F7/702 | 5 |
| G02B26/0833 | 5 |
| G03F7/70075 | 4 |
| G03F7/70291 | 4 |