Optical component

Patent metadata

Field	Value
Publication number	US-10078271-B2
Application number	US-201414334281-A
Country	US
Kind code	B2
Filing date	Jul 17, 2014
Priority date	Feb 17, 2012
Publication date	Sep 18, 2018
Grant date	Sep 18, 2018

Abstract

An optical component comprises a mirror array having a multiplicity of mirror elements, which are each connected to at least one actuator for displacement, a multiplicity of signal lines for the signal-transmitting connection of the actuators to an external, global control/regulating device for predefining an absolute position of the individual mirror elements, and a multiplicity of local regulating devices for regulating the positioning of the mirror elements, wherein the regulating devices are in each case completely integrated into the component.

First claim

The invention claimed is:

1. A system, comprising:
an optical component, comprising:
a mirror array comprising a multiplicity of mirror elements, each mirror element having at least one degree of freedom of displacement;
a multiplicity of actuators, each actuator configured to displace an associated mirror element;
a carrying structure mechanically connected to the mirror array;
a multiplicity of signal lines; and
a multiplicity of local regulating devices configured to regulate a position of the mirror elements; and

a global control/regulating device configured to displace the mirror elements,
wherein:
the multiplicity of signal lines are configured to provide a signal connection between the actuators and the global control/regulating device to predefine an absolute position of the individual mirror elements;
a totality of the mirror elements defines a parquet of a total reflection surface of the mirror array;
the mirror array has a total surface extending perpendicular to a surface normal;
the carrying structure projects beyond the total surface of the mirror array in a direction perpendicular to the surface normal;
each regulating device is completely integrated into the component; and
the global control/regulating device and the local regulating devices have bandwidths whose ratio is at most 1:1000.

2. The system of claim 1 , wherein the global control/regulating device has a look-up table to determine correction values to displace the mirror elements.

3. An illumination system, comprising:
an EUV radiation source; and
an optical unit which comprises a mirror system, the mirror system comprising:
a component, comprising:
a mirror array comprising a multiplicity of mirror elements, each mirror element having at least on degree of freedom of displacement;
a multiplicity of actuators, each actuator configured to displace an associated mirror element;
a carrying structure mechanically connected to the mirror array;
a multiplicity of signal lines configured to provide a signal connection between the actuators and an external, global control/regulating device to predefine an absolute position of the individual mirror elements; and
a multiplicity of local regulating devices configured to regulate a position of the mirror elements, wherein:
a totality of the mirror elements defines a parquet of a total reflection surface of the mirror array;
the mirror array has a total surface extending perpendicular to a surface normal;
the carrying structure projects beyond the total surface of the mirror array in a direction perpendicular to the surface normal;
each local regulating device has a bandwidth of at least 500 Hz;
each local regulating device is completely integrated into the component; and
the global control/regulating device and the local regulating devices have bandwidths whose ratio is at most 1:1000; and
the global control/regulating device configured to displace the mirror elements.

4. The illumination system of claim 3 , wherein each mirror element has an associated local regulating device.

5. The illumination system of claim 4 , wherein each local regulating device is arranged completely within a volume defined by parallel projection of its associated mirror element.

6. The illumination system of claim 3 , wherein each local regulating device comprises at least one electronic circuit.

7. The illumination system of claim 6 , wherein the electronic circuits are arranged in the carrying structure.

8. The illumination system of claim 3 , wherein an active damping device of each local regulating device is configured to finely position the mirror elements.

9. The illumination system of claim 3 , comprising an interface configured to connect the signal lines to the external, global control/regulating device.

10. The illumination system of claim 3 , wherein each mirror element has an associated local regulating device, and each local regulating device comprises at least one electronic circuit.

11. The illumination system of claim 3 , further comprising an optical assembly, the optical assembly comprising:
a baseplate;
a fixing device; and
the component, wherein the fixing device fixes the component to the baseplate.

12. The illumination system of claim 3 , wherein each local regulating device comprises an active damping device configured to actively dampen oscillations of the mirror elements.

13. An apparatus, comprising:
an EUV radiation source; and
an optical unit which comprises a mirror system, the mirror system comprising:
a component; and
a device configured to displace the mirror elements; and

a projection optical unit,
wherein the apparatus is an EUV microlithography projection exposure apparatus, and the component comprises:
a mirror array comprising a multiplicity of mirror elements, each mirror element having at least one degree of freedom of displacement;
a multiplicity of actuators, each actuator configured to displace an associated mirror element;
a carrying structure mechanically connected to the mirror array;
a multiplicity of signal lines configured to provide a signal connection between the actuators and an external, global control/regulating device to predefine an absolute position of the individual mirror elements; and
a multiplicity of local regulating devices configured to regulate a position of the mirror elements,
wherein:
a totality of the mirror elements defines a parquet of a total reflection surface of the mirror array;
the mirror array has a total surface extending perpendicular to a surface normal;
the carrying structure projects beyond the total surface of the mirror array in a direction perpendicular to the surface normal;
each local regulating device has a bandwidth of at least 500 Hz;
each local regulating device is completely integrated into the component; and
the global control/regulating device and the local regulating devices have bandwidths whose ratio is at most 1:1000.

14. The apparatus of claim 13 , wherein each local regulating device comprises an active damping device configured to actively dampen oscillations of the mirror elements.

15. A method, comprising:
using a global control/regulating device to predefine position data for positioning each mirror element of a component; and
using the local regulating devices to dampen disturbances of the positioning of the mirror elements,
wherein the component comprises:
a mirror array comprising a multiplicity of mirror elements, each mirror element having at least one degree of freedom of displacement;
a multiplicity of actuators, each actuator configured to displace an associated mirror element;
a carrying structure mechanically connected to the mirror array;
a multiplicity of signal lines configured to provide a signal connection between the actuators and an external, global control/regulating device to predefine an absolute position of the individual mirror elements; and
a multiplicity of local regulating devices configured to regulate a position of the mirror elements, and
wherein:
a totality of the mirror elements defines a parquet of a total reflection surface of the mirror array;
the mirror array has a total surface extending perpendicular to a surface normal;
the carrying structure projects beyond the total surface of the mirror array in a direction perpendicular to the surface normal;
each local regulating device has a bandwidth of at least 500 Hz;
each local regulating device is completely integrated into the component; and

the global control/regulating device and the local regulating devices have bandwidths whose ratio i

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Waldis Severin
• Orth Matthias
• Bostock Roger Marc
• Deng Jian
• Lani Sebastian
• Knauf Benedikt
• Kempter Christian

Classifications

• G03F7/00

  Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K) · CPC title

• G03F7/702 Primary

  Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems · CPC title

• G03F7/7015

  Details of optical elements · CPC title

• G03F7/70291

  Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices · CPC title

• G03F7/70116

  Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets · CPC title