Optical component

Patent metadata

Field	Value
Publication number	US-9804501-B2
Application number	US-201414334107-A
Country	US
Kind code	B2
Filing date	Jul 17, 2014
Priority date	Feb 17, 2012
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein each of the regulating devices in each case has at least one capacitive sensor having at least one moveable electrode and at least one electrode arranged rigidly relative to the carrying structure.

First claim

The invention claimed is:

1. An optical component, comprising:
a mirror array comprising a multiplicity of mirror elements, each mirror element having at least one degree of freedom of displacement;
a multiplicity of actuators, each actuator configured to displace an associated mirror element;
a carrying structure mechanically connected to the mirror array; and
a multiplicity of local regulating devices, each local regulating device configured to dampen oscillations of an associated mirror element,
wherein:
a totality of the mirror elements defines a parquet of a total reflection surface of the mirror array;
the mirror array has a total surface extending perpendicular to a surface normal;
the carrying structure projects beyond the total surface of the mirror array in a direction perpendicular to the surface normal by at most 5 mm;
each local regulating device comprises a capacitive sensor;
each capacitive sensor comprises:
a moveable electrode in the form of an actuator pin; and
an electrode arranged rigidly relative to the carrying structure; and

for each capacitive sensor:
the moveable electrode is a constituent part of the actuator for the associated mirror element; and
the moveable electrode is electrically decoupled from its associated mirror element.

2. The component of claim 1 , wherein each capacitive sensor comprises an electrode arranged rigidly relative to the carrying structure for each degree of freedom of displacement of the associated mirror element.

3. The component of claim 1 , wherein, for each capacitive sensor, the rigidly arranged electrode is configured so that the capacitive sensor has a predefined characteristic.

4. The component of claim 1 , wherein, for each capacitive sensor, the rigidly arranged electrode is integrated into an application-specific integrated circuit.

5. The component of claim 1 , wherein each local regulating device comprises an electronic circuit.

6. The component of claim 1 , wherein:
each capacitive sensor comprises an electrode arranged rigidly relative to the carrying structure for each degree of freedom of displacement of the associated mirror element; and
for each capacitive sensor, each rigidly arranged electrode is configured so that the capacitive sensor has a predefined characteristic.

7. The component of claim 1 , wherein:
each capacitive sensor comprises an electrode arranged rigidly relative to the carrying structure for each degree of freedom of displacement of the associated mirror element; and
for each capacitive sensor, each rigidly arranged electrode is integrated into an application-specific integrated circuit.

8. The component of claim 1 , wherein:
each capacitive sensor comprises an electrode arranged rigidly relative to the carrying structure for each degree of freedom of displacement of the associated mirror element; and
each local regulating device comprises an electronic circuit.

9. A system, comprising:
a component according to claim 1 ; and
a global control/regulating device configured to displace the mirror elements.

10. An optical assembly, comprising:
a baseplate;
a fixing device; and
an optical component according to claim 1 ,
wherein the fixing device fixes the optical component to the baseplate.

11. An optical unit, comprising
a system, comprising:
a component according to claim 1 ; and
a global control/regulating device configured to displace the mirror elements.

12. An illumination system, comprising:
an EUV radiation source; and
an optical unit which comprises a mirror system, the mirror system comprising:
a component according to claim 1 ; and
a global control/regulating device configured to displace the mirror elements.

13. An apparatus, comprising:
an EUV radiation source; and
an optical unit which comprises a mirror system, the mirror system comprising:
a component according to claim 1 ; and
a global control/regulating device configured to displace the mirror elements; and

a projection optical unit,
wherein the apparatus is an EUV microlithography projection exposure apparatus.

14. A method, comprising:
making a component according to claim 1 , including using lithography to fashion the rigid electrodes.

15. A method, comprising:
using a global control/regulating device to predefine position data for positioning each mirror element of a component according to claim 1 ; and
using the local regulating devices to dampen disturbances of the positioning of the mirror elements.

16. A method, comprising:
using an optical unit to illuminate a reticle comprising structures with EUV radiation, the optical unit comprising a component according to claim 1 ; and
using a projection optical unit to project at least a part of the reticle onto a light-sensitive material.

17. The component of claim 1 , wherein each actuator pin has a circular cross section.

18. The component of claim 1 , wherein each rigidly arranged electrode has a form so that the sensor has a linearized characteristic or a characteristic which is proportional to the characteristic of the actuator.

19. The component of claim 1 , wherein, for at least one capacitive sensor, the component comprises three or more electrodes are arranged in a plane around the actuator pin.

20. An optical component, comprising:
a mirror array comprising a multiplicity of mirror elements, each mirror element having at least one degree of freedom of displacement;
a multiplicity of actuators, each actuator configured to displace an associated mirror element;
a carrying structure mechanically connected to the mirror array; and
a multiplicity of local regulating devices, each local regulating device configured to dampen oscillations of an associated mirror element,
wherein:
a totality of the mirror elements defines a parquet of a total reflection surface of the mirror array;
the mirror array has a total surface extending perpendicular to a surface normal;
the carrying structure projects beyond the total surface of the mirror array in a direction perpendicular to the surface normal by at most 5 mm;
each local regulating device comprises a capacitive sensor;
each capacitive sensor comprises:
a moveable electrode in the form of an actuator pin; and
an electrode arranged rigidly relative to the carrying structure; and

for at least one capacitive sensor:
the moveable electrode is a constituent part of the actuator for the associated mirror element; and
the moveable electrode is electrically decoupled from its associated mirror element.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Waldis Severin
• Jassmann Marco
• Ataman Caglar
• Bostock Roger Marc
• Deng Jian
• Lani Sebastian
• Knauf Benedikt

Classifications

• G03F7/70291

  Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices · CPC title

• G03F7/70116

  Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets · CPC title

• G03F7/7085

  Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load · CPC title

• G02B26/0816

  by means of one or more reflecting elements · CPC title

• G03F7/702 Primary

  Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems · CPC title