Multi-zone lamp heating for chemical vapor deposition
US-2023352322-A1 · Nov 2, 2023 · US
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Vellore Kim patents
Vellore Kim is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Vellore Kim |
| Total patents | 14 |
| First publication | Feb 12, 2015 |
| Latest publication | Nov 2, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate carrier having hard mask
US-11047039-B2 · Jun 29, 2021 · US
Substrate carrier having hard mask
US-2019211442-A1 · Jul 11, 2019 · US
Hydrophobic electrostatic chuck
US-2019115241-A1 · Apr 18, 2019 · US
Visual feedback for process control in RTP chambers
US-10109514-B2 · Oct 23, 2018 · US
Process sheet resistance uniformity improvement using multiple melt laser exposures
US-9953851-B2 · Apr 24, 2018 · US
Visual feedback for process control in rtp chambers
US-2017345693-A1 · Nov 30, 2017 · US
Visual feedback for process control in RTP chambers
US-9735034-B2 · Aug 15, 2017 · US
Multi-substrate thermal management apparatus
US-9696097-B2 · Jul 4, 2017 · US
Process sheet resistance uniformity improvement using multiple melt laser exposures
US-2017040194-A1 · Feb 9, 2017 · US
Recent patents
Latest publications not already listed above.
Process sheet resistance uniformity improvement using multiple melt laser exposures
US-9390926-B2 · Jul 12, 2016 · US
Multi-substrate thermal management apparatus
US-2016033205-A1 · Feb 4, 2016 · US
Low temperature rtp control using ir camera
US-2015131698-A1 · May 14, 2015 · US
Visual feedback for process control in rtp chambers
US-2015041453-A1 · Feb 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0436 | 8 |
| H01L21/67115 | 7 |
| H10P72/0602 | 4 |
| H01L21/67248 | 4 |
| H10P95/90 | 3 |