Visual feedback for process control in RTP chambers

Patent metadata

Field	Value
Publication number	US-9735034-B2
Application number	US-201414456682-A
Country	US
Kind code	B2
Filing date	Aug 11, 2014
Priority date	Aug 12, 2013
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.

First claim

What is claimed is:

1. A process chamber, comprising:
a chamber body;
a lamp array disposed in the chamber body;
a chamber lid disposed over the chamber body;
a probe disposed through an opening in the chamber lid, the probe having a wide-angle lens at a first end of the probe, the wide-angle lens having a viewing angle of about 160 degrees to about 170 degrees; and
an imaging device positioned to capture an image of the lamp array, wherein the imaging device is coupled to a second end of the probe.

2. The process chamber of claim 1 , wherein the wide-angle lens comprises a plurality of lenses separated by spacers.

3. The process chamber of claim 1 , wherein the probe comprises a housing and a spring positioned therein.

4. The process chamber of claim 1 , further comprising a control unit coupled to the imaging device, the control unit adapted to receive the image from the imaging device.

5. The process chamber of claim 1 , wherein the lid includes cooling channels therein, the cooling channels in thermal communication with the probe.

6. A process chamber, comprising:
a chamber body;
a lamp array disposed in the chamber body;
a lid disposed over the chamber body;
a probe disposed through an opening in the chamber lid, the probe having a spring at a first end of the probe and a wide-angle lens at a second end of the probe, the wide-angle lens comprising a plurality of lenses separated by spacers and having a viewing angle of about 160 degrees to about 170 degrees; and
an imaging device to capture an image of the lamp array, wherein the imaging device is coupled to a second end of the probe.

7. The process chamber of claim 6 , wherein the lid includes cooling channels therein, the cooling channels in thermal communication with the probe.

8. The process chamber of claim 6 , further comprising a control unit coupled to the imaging device, the control unit adapted to receive the image from the imaging device.

9. The process chamber of claim 8 , wherein the control unit facilitates comparison of the image to a reference image.

10. The process chamber of claim 9 , wherein the lamp array includes a plurality of zones.

11. The process of claim 10 , wherein the control unit is adapted to control power applied to each of the plurality of zones.

12. The process chamber of claim 9 , wherein the control unit is adapted to control power applied to each lamp of the lamp array.

13. A method for monitoring lamp performance in a process chamber, comprising:
a lamp array within the process chamber;
capturing an image of the lamp array within the process chamber using a wide-angle lens;
transferring the image to a control unit;
comparing the image to a reference image to determine if the lamp array is operating at a desired output; and
providing an indication that one or more lamps in the lamp array are not functioning.

14. The method of claim 13 , further comprising adjusting the power provided to the one or more lamps in the lamp array after the comparing the image to a reference image.

15. The method of claim 13 , further comprising elevating a pre-heat ring within the process chamber prior to the capturing an image.

16. The method of claim 13 , wherein a transparent substrate is located within the process chamber while capturing the image.

17. The method of claim 13 , further comprising:
elevating a pre-heat ring within the process chamber prior to the capturing an image.

Assignees

• Applied Materials Inc

Inventors

• Vellore Kim
• Kanawade Dinesh
• Moffatt Stephen
• Miller Aaron
• Tertitski Leonid M
• Tam Norman L
• Liu Michael
• Fox Colin

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• H01L21/67115

  Electricity · mapped topic

• H01L21/67248 Primary

  Electricity · mapped topic