Visual feedback for process control in RTP chambers

Patent metadata

Field	Value
Publication number	US-10109514-B2
Application number	US-201715675825-A
Country	US
Kind code	B2
Filing date	Aug 14, 2017
Priority date	Aug 12, 2013
Publication date	Oct 23, 2018
Grant date	Oct 23, 2018

Abstract

Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.

First claim

What is claimed is:

1. A process chamber, comprising:
a chamber body;
a lamp array coupled to the chamber body;
a chamber lid disposed over the chamber body;
a probe comprising a gradient index rod lens disposed through an opening in the chamber lid, the probe having a wide-angle lens at one end thereof; and
an imaging device to capture an image of the lamp array, wherein the imaging device is coupled to a second end of the probe.

2. The process chamber of claim 1 , wherein the wide-angle lens comprises a plurality of lenses separated by spacers.

3. The process chamber of claim 1 , wherein the probe comprises a housing and a spring positioned therein.

4. The process chamber of claim 3 , wherein the housing comprises stainless steel.

5. The process chamber of claim 1 , further comprising a control unit coupled to the imaging device, the control unit adapted to receive an image from the imaging device.

6. The process chamber of claim 1 , wherein the chamber lid includes a cooling body having cooling channels therein, and wherein the probe is disposed through the cooling body.

7. The process chamber of claim 1 , wherein the wide-angle lens comprises five or more lenses.

8. A process chamber, comprising:
a chamber body;
a lamp array disposed in the chamber body;
a chamber lid disposed over the chamber body;
a probe comprising a gradient index rod lens disposed through an opening in the chamber lid, the probe having a spring at a first end thereof and a wide-angle lens at a second end thereof, the wide-angle lens comprising a plurality of lenses separated by spacers; and
an imaging device coupled to a second end of the probe, the imaging device adapted to capture an image of the lamp array.

9. The process chamber of claim 8 , wherein the chamber lid includes a cooling body having cooling channels therein, and wherein the probe is disposed through the cooling body.

10. The process chamber of claim 8 , further comprising a control unit coupled to the imaging device, the control unit adapted to receive an image from the imaging device.

11. The process chamber of claim 10 , wherein the control unit facilitates comparison of a captured image to a reference image.

12. The process chamber of claim 11 , wherein the lamp array includes a plurality of zones.

13. The process of claim 12 , wherein the control unit is adapted to control power applied to each of the plurality of zones.

14. The process chamber of claim 11 , wherein the control unit is adapted to control power applied to each lamp of the lamp array.

15. A process chamber, comprising:
a chamber body;
a lamp array coupled to the chamber body;
a chamber lid disposed over the chamber body;
a probe disposed through an opening in the chamber lid, the probe having a wide-angle lens at one end thereof, the probe positioned about five inches or less from the lamp array; and
an imaging device to capture an image of the lamp array, wherein the imaging device is coupled to a second end of the probe.

16. The process chamber of claim 15 , wherein the probe is comprises a gradient index rod lens.

17. The process chamber of claim 16 , wherein the probe is positioned about three inches or less from the lamp array.

18. The process chamber of claim 17 , wherein the chamber lid includes a cooling body having cooling channels therein, and wherein the probe is disposed through the cooling body.

19. The process chamber of claim 18 , wherein the probe comprises a housing and a spring positioned therein.

20. The process chamber of claim 19 , wherein the housing comprises stainless steel.

21. A process chamber, comprising:
a chamber body;
a lamp array coupled to the chamber body;
a chamber lid disposed over the chamber body;
a probe comprising a gradient index rod lens disposed through an opening in the chamber lid, the probe having a wide-angle lens at one end thereof, the probe positioned about five inches or less from the lamp array; and
an imaging device, wherein the imaging device is coupled to a second end of the probe.

22. The process chamber of claim 21 , wherein the probe is positioned about three inches or less from the lamp array.

Assignees

• Applied Materials Inc

Inventors

• Vellore Kim
• Kanawade Dinesh
• Moffatt Stephen
• Miller Aaron
• Tertitski Leonid M
• Tam Norman L
• Liu Michael
• Fox Colin

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• H01L21/67115

  Electricity · mapped topic

• H01L21/67248 Primary

  Electricity · mapped topic