Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
US-2025054804-A1 · Feb 13, 2025 · US
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Ulavi Tejas patents
Ulavi Tejas is listed as an inventor on 51 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ulavi Tejas |
| Total patents | 51 |
| First publication | Mar 22, 2018 |
| Latest publication | Feb 13, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
US-12183618-B2 · Dec 31, 2024 · US
Method and system for cleaning a process chamber
US-12087555-B2 · Sep 10, 2024 · US
Heater assembly with process gap control for batch processing chambers
US-12020957-B2 · Jun 25, 2024 · US
Apparatus and methods for motor shaft and heater leveling
US-12018376-B2 · Jun 25, 2024 · US
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
US-11950384-B2 · Apr 2, 2024 · US
Dual-function wafer backside pressure control and edge purge
US-11923233-B2 · Mar 5, 2024 · US
Apparatus and methods for real-time wafer chucking detection
US-11791190-B2 · Oct 17, 2023 · US
Wafer heater with backside and integrated bevel purge
US-11769684-B2 · Sep 26, 2023 · US
Pedestal heater for spatial multi-wafer processing tool
US-11682576-B2 · Jun 20, 2023 · US
Recent patents
Latest publications not already listed above.
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
US-2023175131-A1 · Jun 8, 2023 · US
Method and system for cleaning a process chamber
US-2023128297-A1 · Apr 27, 2023 · US
Wafer Heater With Backside And Integrated Bevel Purge
US-2023113057-A1 · Apr 13, 2023 · US
In-situ DC plasma for cleaning pedestal heater
US-11623253-B2 · Apr 11, 2023 · US
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
US-11602064-B2 · Mar 7, 2023 · US
Ground path systems for providing a shorter and symmetrical ground path
US-2022403520-A1 · Dec 22, 2022 · US
Method and system for cleaning a process chamber
US-11532462-B2 · Dec 20, 2022 · US
Spatial wafer processing with improved temperature uniformity
US-11479855-B2 · Oct 25, 2022 · US
Pedestal heater for Spatial Multi-Wafer Processing Tool
US-2022319899-A1 · Oct 6, 2022 · US
Ground path systems for providing a shorter and symmetrical ground path
US-11434569-B2 · Sep 6, 2022 · US
Pedestal heater for spatial multi-wafer processing tool
US-11430686-B2 · Aug 30, 2022 · US
In-Situ DC Plasma For Cleaning Pedestal Heater
US-2022152668-A1 · May 19, 2022 · US
Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
US-2022106683-A1 · Apr 7, 2022 · US
Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers
US-2022071037-A1 · Mar 3, 2022 · US
Heater Assembly with Process Gap Control for Batch Processing Chambers
US-2022068674-A1 · Mar 3, 2022 · US
In-situ DC plasma for cleaning pedestal heater
US-11260432-B2 · Mar 1, 2022 · US
Apparatus and Methods for Real-Time Wafer Chucking Detection
US-2021351060-A1 · Nov 11, 2021 · US
Pedestal Geometry for Fast Gas Exchange
US-2021292898-A1 · Sep 23, 2021 · US
Gas input system for a substrate processing chamber
US-11107704-B2 · Aug 31, 2021 · US
Gas box for CVD chamber
US-11049699-B2 · Jun 29, 2021 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 51 |
| Applies Mat Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4586 | 21 |
| H10P72/7621 | 20 |
| H10P72/0432 | 20 |
| C23C16/45544 | 18 |
| H10P72/0602 | 17 |