Methods Of Operating A Spatial Deposition Tool
US-2026047394-A1 · Feb 12, 2026 · US
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Rice Michael patents
Rice Michael is listed as an inventor on 36 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Rice Michael |
| Total patents | 36 |
| First publication | May 12, 2016 |
| Latest publication | Feb 12, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Parallel atomic layer deposition of target element interiors
US-2025354262-A1 · Nov 20, 2025 · US
Methods of operating a spatial deposition tool
US-12469739-B2 · Nov 11, 2025 · US
Parallel atomic layer deposition of target element interiors
US-12404584-B2 · Sep 2, 2025 · US
Methods of operating a spatial deposition tool
US-2025239479-A1 · Jul 24, 2025 · US
Dithering or dynamic offsets for improved uniformity
US-12305283-B2 · May 20, 2025 · US
Methods of forming silicon nitride films
US-2025087477-A1 · Mar 13, 2025 · US
Parallel atomic layer deposition of target element interiors
US-2025027195-A1 · Jan 23, 2025 · US
Immersed plasma source and process chamber for large area substrates
US-2024420921-A1 · Dec 19, 2024 · US
Dithering or dynamic offsets for improved uniformity
US-12077861-B2 · Sep 3, 2024 · US
Recent patents
Latest publications not already listed above.
Single wafer processing environments with spatial separation
US-11894257-B2 · Feb 6, 2024 · US
Multi-zone lamp heating for chemical vapor deposition
US-2023352322-A1 · Nov 2, 2023 · US
Gas distribution plate for thermal deposition
US-11583816-B2 · Feb 21, 2023 · US
Gas-pulsing-based shared precursor distribution system and methods of use
US-11520358-B2 · Dec 6, 2022 · US
Spatial wafer processing with improved temperature uniformity
US-11479855-B2 · Oct 25, 2022 · US
Gas-Pulsing-Based Shared Precursor Distribution System And Methods Of Use
US-2022075396-A1 · Mar 10, 2022 · US
Complementary pattern station designs
US-11220747-B2 · Jan 11, 2022 · US
Gas distribution plate for thermal deposition
US-2021394144-A1 · Dec 23, 2021 · US
Gas-pulsing-based shared precursor distribution system and methods of use
US-11169547-B2 · Nov 9, 2021 · US
Gas distribution plate for thermal deposition
US-11110425-B2 · Sep 7, 2021 · US
Multi-station chamber lid with precise temperature and flow control
US-11098404-B2 · Aug 24, 2021 · US
Dithering Or Dynamic Offsets For Improved Uniformity
US-2021087681-A1 · Mar 25, 2021 · US
Spatial Wafer Processing With Improved Temperature Uniformity
US-2020392621-A1 · Dec 17, 2020 · US
Spatial wafer processing with improved temperature uniformity
US-10787739-B2 · Sep 29, 2020 · US
Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing
US-2020256228-A1 · Aug 13, 2020 · US
Complementary Pattern Station Designs
US-2020131636-A1 · Apr 30, 2020 · US
Spatial Wafer Processing With Improved Temperature Uniformity
US-2020131635-A1 · Apr 30, 2020 · US
Multi-Station Chamber Lid With Precise Temperature And Flow Control
US-2020102651-A1 · Apr 2, 2020 · US
Methods Of Operating A Spatial Deposition Tool
US-2020090978-A1 · Mar 19, 2020 · US
Methods Of Operating A Spatial Deposition Tool
US-2020066572-A1 · Feb 27, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 36 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4584 | 19 |
| C23C16/45544 | 17 |
| C23C16/52 | 17 |
| H10P72/7621 | 15 |
| H10P72/7618 | 15 |