Methods of operating a spatial deposition tool

Patent metadata

Field	Value
Publication number	US-12469739-B2
Application number	US-201916664406-A
Country	US
Kind code	B2
Filing date	Oct 25, 2019
Priority date	Oct 27, 2017
Publication date	Nov 11, 2025
Grant date	Nov 11, 2025

Abstract

Apparatus and methods to process one or more wafers are described. A spatial deposition tool comprises a plurality of substrate support surfaces on a substrate support assembly and a plurality of spatially separated and isolated processing stations. The spatially separated isolated processing stations have independently controlled temperature, processing gas types, and gas flows. In some embodiments, the processing gases on one or multiple processing stations are activated using plasma sources. The operation of the spatial tool comprises rotating the substrate assembly in a first direction, and rotating the substrate assembly in a second direction, and repeating the rotations in the first direction and the second direction until a predetermined thickness is deposited on the substrate surface(s).

First claim

What is claimed is:

1 . A method comprising:
providing a processing chamber comprising x number of spatially separated isolated processing stations within the processing chamber, x being an integer in a range of from 4 to 10, the processing chamber having a processing chamber temperature and each processing station independently having a processing station temperature, the processing chamber temperature different from the processing station temperatures; rotating a substrate support assembly within the processing chamber, the substrate support assembly having a plurality of substrate support surfaces aligned with the x number of spatially separated isolated processing stations rx times so that each substrate support surface rotates (360/x) degrees in a first direction to a location of an adjacent substrate support surface, r being a whole number greater than or equal to 1, each of the plurality of substrate support surfaces respectively comprising a heater and having a sealing platform connected to the heater at a position below and surrounding the heater so that a top surface of the sealing platform is below a top surface of the heater, the sealing platform configured to provide a seal or barrier to minimize gas flowing to a region below the substrate support assembly; and rotating the substrate support assembly rx times within the processing chamber so that each substrate support surface rotates (360/x) degrees in a second direction to the location of the adjacent substrate support surface.

2 . The method of claim 1 , wherein r is in the range of 1 to 10.

3 . The method of claim 1 , wherein r is 1, 2, 3 or 4.

4 . The method of claim 1 , wherein the plurality of substrate support surfaces are substantially coplanar.

5 . The method of claim 1 , further comprising controlling one or more of the processing chamber temperature or the processing station temperatures.

6 . The method of claim 1 , further comprising controlling the speed of rotation of the plurality of substrate support assembly.

7 . A method comprising:
providing a processing chamber comprising x number of spatially separated isolated processing stations within the processing chamber, x being an integer in a range of from 4 to 10, the processing chamber having a processing chamber temperature and each processing station independently having a processing station temperature, the processing chamber temperature different from the processing station temperatures; rotating a substrate support assembly within the process chamber, the substrate support assembly having a plurality of substrate support surfaces aligned with the x number of spatially separated isolated processing stations (360/x) degrees in a first direction to a location of an adjacent substrate support surface, each of the plurality of substrate support surfaces respectively comprising a heater and having a sealing platform connected to the heater at a position below and surrounding the heater so that a top surface of the of the sealing platform is below a top surface of the heater, the sealing platform configured to provide a seal or barrier to minimize gas flowing to a region below the substrate support assembly; rotating the substrate support assembly (360/x) degrees within the processing chamber in a second direction to the location of the adjacent substrate support surface, wherein the rotations in the first direction and the rotations in the second direction are repeated n times, with n being a whole number greater than or equal to 1; rotating the substrate support assembly (360/x) degrees within the processing chamber in a first direction two times; rotating the substrate support assembly (360/x) degrees in the first direction within the processing chamber and then rotating the substrate support assembly (360/x) degrees in the second direction within the processing chamber, the rotations in the first direction and the second direction are repeated m times, with m being a whole number greater than or equal to 1; and rotating the substrate support assembly (360/x) degrees in the second direction within the processing chamber.

8 . The method of claim 7 , wherein the plurality of substrate support surfaces are substantially coplanar.

9 . The method of claim 7 , further comprising controlling one or more of the processing chamber temperature or the processing station temperatures.

10 . The method of claim 7 , further comprising controlling the speed of rotation of the plurality of substrate support assembly.

11 . A method of forming a film, the method comprising:
loading at least one wafer onto x number of substrate support surfaces in a substrate support assembly within a processing chamber, each of the substrate support surfaces aligned with x number of spatially separated isolated processing stations within the processing chamber, x being an integer in a range of from 4 to 10, each of the substrate support surfaces respectively comprising a heater and having a sealing platform connected to the heater at a position below and surrounding the heater so that a top surface of the of the sealing platform is below a top surface of the heater, the sealing platform configured to provide a seal or barrier to minimize gas flowing to a region below the substrate support assembly; rotating the substrate support assembly rx times within the processing chamber so that each substrate support surface rotates (360/x) degrees in a first direction to a location of an adjacent substrate support surface, r being a whole number greater than or equal to 1; rotating the substrate support assembly rx times within the processing chamber so that each substrate support surface rotates (360/x) degrees in a second direction to the location of the adjacent substrate support surface; and at each processing station, exposing a top surface of the at least one wafer to a process condition to form a film having a substantially uniform thickness, the at least one wafer being stationary when the film is formed, wherein all parts of the at least one wafer on the x number of substrate support surfaces are aligned with the x number of spatially separated isolated processing stations at the same time.

12 . The method of claim 11 , wherein r is in the range of 1 to 10.

13 . The method of claim 11 , wherein r is 1, 2, 3 or 4.

14 . The method of claim 11 , wherein the substrate support surfaces further comprise electrostatic chucks.

15 . The method of claim 11 , further comprising immersing the at least one wafer in plasma to eliminate plasma damage.

16 . The method of claim 11 , wherein at least one of the x number of spatially separated isolated processing stations within the processing chamber is configured to operate as a plasma station.

17 . The method of claim 16 , wherein the plasma station is turned off while the at least one wafer is stationary.

Assignees

• Applied Materials Inc

Inventors

• Aubuchon Joseph
• Baluja Sanjeev
• Rice Michael
• Dan Arkaprava
• Chen Hanhong

Classifications

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10P14/40

  of conductive or resistive materials · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• H10P14/00

  Formation of materials, e.g. in the shape of layers or pillars · CPC title

• H10P72/7618 Primary

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title