Dithering or dynamic offsets for improved uniformity

Patent metadata

Field	Value
Publication number	US-12305283-B2
Application number	US-202418761994-A
Country	US
Kind code	B2
Filing date	Jul 2, 2024
Priority date	Sep 19, 2019
Publication date	May 20, 2025
Grant date	May 20, 2025

Abstract

Apparatus and methods to process one or more substrates are described. A plurality of process stations are arranged in a circular configuration around a rotational axis. A support assembly with a rotatable center base defining a rotational axis, at least two support arms extending from the center base and heaters on each of the support arms is positioned adjacent the processing stations so that the heaters can be moved amongst the various process stations to perform one or more process condition. The support assembly configured to offset the position of the substrate with respect to the processing stations.

First claim

What is claimed is:

1. A support assembly comprising:
a support surface positioned a distance from a central axis of the support assembly, the support surface rotatable around the central axis; and,
a controller configured to move a center of the support surface from a first process position of a first processing station to a first process position of a second processing station, and to a second process position within the first processing station having an angular offset from the first process position in the first processing station.

2. The support assembly of claim 1 , wherein the controller is further configured to move the support surface to the second processing station and back to the first processing station in a second angular offset position defining a third processing position of a first processing station.

3. The support assembly of claim 1 , wherein the angular offset position is located within a range of process positions.

4. The support assembly of claim 3 , wherein the angular offset position is located along an arc within the range of process positions, the arc having a radius defined by the distance from the central axis of the support assembly to a center of the support surface.

5. The support assembly of claim 4 , wherein the arc within the range of process positions extends within ±3.25° from a first process position.

6. A processing chamber comprising:
a housing having walls, a bottom and a top defining an interior volume;
a support assembly comprising a plurality of support surfaces positioned a distance from a central axis of the support assembly, the support surfaces rotatable around the central axis;
a plurality of process stations in the interior volume of the housing, the process stations positioned in a circular arrangement around the central axis, each process station comprising a gas injector having a front face;
a motor connected to the support assembly configured to rotate the support assembly around the central axis; and
a controller configured to move a center of the support surface from a first process position of a first processing station to a first process position of a second processing station, and to a second process position within the first processing station having an angular offset from the first process position in the first processing station.

7. The processing chamber of claim 6 , wherein the controller is further configured to angularly rotate the support assembly within ±5° around the central axis of the support assembly relative to a center of the process station.

8. The processing chamber of claim 7 , wherein the controller is further configured to angularly rotate the support assembly within ±3.25° of the central axis of the support assembly.

9. The processing chamber of claim 6 , wherein the controller is configured to oscillate the support assembly along an arc with a radius defined from the central axis of the support assembly to the center of the support surfaces and during processing in the plurality of process stations.

10. The processing chamber of claim 6 , wherein the controller is further configured to bring the substrate support to a complete stop within a process station for processing.

11. The processing chamber of claim 6 , wherein the controller is configured so that each stop within the same process station is at a different angular offset than the angular offset of the most recent stop in that process station.

12. The processing chamber of claim 6 , wherein each process station has a range of process positions within a reaction region, the range of process positions extending from a point where a leading edge and trailing edge of a substrate on the substrate support is within a reaction region of the process station.

Assignees

• Applied Materials Inc

Inventors

• Aubuchon Joseph
• Baluja Sanjeev
• Rice Michael
• Dan Arkaprava
• Chen Hanhong

Classifications

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• C23C16/45544

  characterized by the apparatus · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• C23C16/4586

  Elements in the interior of the support, e.g. electrodes, heating or cooling devices · CPC title

• C23C16/4584 Primary

  the substrate being rotated · CPC title