Refractory components for a semiconductor processing chamber
US-2025372351-A1 · Dec 4, 2025 · US
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Pape Eric A patents
Pape Eric A is listed as an inventor on 60 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Pape Eric A |
| Total patents | 60 |
| First publication | Jun 18, 2015 |
| Latest publication | Dec 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Surface coating for plasma processing chamber components
US-2025263838-A1 · Aug 21, 2025 · US
Matched tcr joule heater designs for electrostatic chucks
US-12387964-B2 · Aug 12, 2025 · US
Encapsulated compression washer for bonding ceramic plate and metal baseplate of electrostatic chucks
US-2025191953-A1 · Jun 12, 2025 · US
Single crystal metal oxide plasma chamber component
US-12249490-B2 · Mar 11, 2025 · US
Permanent secondary erosion containment for electrostatic chuck bonds
US-12074049-B2 · Aug 27, 2024 · US
Yttrium aluminum perovskite (yap) based coatings for semiconductor processing chamber components
US-2024212991-A1 · Jun 27, 2024 · US
Determining and controlling substrate temperature during substrate processing
US-12020960-B2 · Jun 25, 2024 · US
Reflectometer to monitor substrate movement
US-2023420281-A1 · Dec 28, 2023 · US
Ceramic component with channels
US-2023411124-A1 · Dec 21, 2023 · US
Recent patents
Latest publications not already listed above.
Reflectometer to monitor substrate movement
US-11791189-B2 · Oct 17, 2023 · US
Metal oxide with low temperature fluorination
US-2023295798-A1 · Sep 21, 2023 · US
Remote plasma source showerhead assembly with aluminum fluoride plasma exposed surface
US-2023282450-A1 · Sep 7, 2023 · US
Matched chemistry component body and coating for semiconductor processing chamber
US-2023223240-A1 · Jul 13, 2023 · US
Atomic layer deposition coated powder coating for processing chamber components
US-2023207278-A1 · Jun 29, 2023 · US
Component with protective surface for processing chamber
US-2023081544-A1 · Mar 16, 2023 · US
Single crystal metal oxide plasma chamber component
US-2022392753-A1 · Dec 8, 2022 · US
Two-stage pin lifter for de-chuck operations
US-11430688-B2 · Aug 30, 2022 · US
Method for conditioning a ceramic coating
US-11384430-B2 · Jul 12, 2022 · US
Ceramic baseplate with channels having non-square corners
US-11133211-B2 · Sep 28, 2021 · US
Surface coating for plasma processing chamber components
US-2021292893-A1 · Sep 23, 2021 · US
Method for conditioning a ceramic coating
US-2021280393-A1 · Sep 9, 2021 · US
Determining and controlling substrate temperature during substrate processing
US-2021143037-A1 · May 13, 2021 · US
Matched tcr joule heater designs for electrostatic chucks
US-2020335378-A1 · Oct 22, 2020 · US
Power switching system for ESC with array of thermal control elements
US-10770363-B2 · Sep 8, 2020 · US
Laminated heater with different heater trace materials
US-10764966-B2 · Sep 1, 2020 · US
Matched TCR joule heater designs for electrostatic chucks
US-10707110-B2 · Jul 7, 2020 · US
Multi-plane heater for semiconductor substrate support
US-10690414-B2 · Jun 23, 2020 · US
Connections between laminated heater and heater voltage inputs
US-10667379-B2 · May 26, 2020 · US
Reflectometer to monitor substrate movement
US-2020111696-A1 · Apr 9, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 60 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/72 | 35 |
| H01L21/6831 | 25 |
| H10P72/0602 | 25 |
| H10P72/722 | 24 |
| H01L21/67248 | 20 |