Chemical mechanical polishing system cleaning module
US-2026048419-A1 · Feb 19, 2026 · US
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Mikhaylichenko Ekaterina patents
Mikhaylichenko Ekaterina is listed as an inventor on 30 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mikhaylichenko Ekaterina |
| Total patents | 30 |
| First publication | Apr 2, 2015 |
| Latest publication | Feb 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Integrated clean and dry module for cleaning a substrate
US-12525468-B2 · Jan 13, 2026 · US
Chemical mechanical polishing method using foamed slurry and apparatus for foamed slurry generation
US-2025360596-A1 · Nov 27, 2025 · US
Processing module having a priming system
US-2025332615-A1 · Oct 30, 2025 · US
Substrate handling in a modular polishing system with single substrate cleaning chambers
US-12198944-B2 · Jan 14, 2025 · US
Multi head pad conditioning apparatus and method of use
US-2024383099-A1 · Nov 21, 2024 · US
Integrated clean and dry module for cleaning a substrate
US-2024222152-A1 · Jul 4, 2024 · US
Pad carrier for horizontal pre-clean module
US-11942319-B2 · Mar 26, 2024 · US
Spray system for slurry reduction during chemical mechanical polishing (cmp)
US-11819976-B2 · Nov 21, 2023 · US
Asymmetry correction via variable relative velocity of a wafer
US-11764069-B2 · Sep 19, 2023 · US
Recent patents
Latest publications not already listed above.
Non-contact clean module
US-11721563-B2 · Aug 8, 2023 · US
Spray system for slurry reduction during chemical mechanical polishing (cmp)
US-2022410336-A1 · Dec 29, 2022 · US
Asymmetry correction via variable relative velocity of a wafer
US-2022379428-A1 · Dec 1, 2022 · US
Pad carrier for horizontal pre-clean module
US-2022199396-A1 · Jun 23, 2022 · US
Substrate handling in a modular polishing system with single substrate cleaning chambers
US-2022143780-A1 · May 12, 2022 · US
Non-contact clean module
US-11289347-B2 · Mar 29, 2022 · US
Non-contact clean module
US-2022044946-A1 · Feb 10, 2022 · US
Thin plastic polishing article for CMP applications
US-10786885-B2 · Sep 29, 2020 · US
Spray bar design for uniform liquid flow distribution on a substrate
US-10751738-B2 · Aug 25, 2020 · US
Non-contact clean module
US-2020043756-A1 · Feb 6, 2020 · US
Thin plastic polishing article for cmp applications
US-2018207770-A1 · Jul 26, 2018 · US
Spray bar design for uniform liquid flow distribution on a substrate
US-2018185857-A1 · Jul 5, 2018 · US
Systems and methods for rinsing and drying substrates
US-9984867-B2 · May 29, 2018 · US
Substrate rinsing systems and methods
US-9859135-B2 · Jan 2, 2018 · US
Substrate holder assembly, apparatus, and methods
US-2016201986-A1 · Jul 14, 2016 · US
Systems and methods for rinsing and drying substrates
US-2016181086-A1 · Jun 23, 2016 · US
Substrate edge residue removal systems, apparatus, and methods
US-2016178279-A1 · Jun 23, 2016 · US
Substrate rinsing systems and methods
US-2016175857-A1 · Jun 23, 2016 · US
Method and apparatus for high efficiency post cmp clean using engineered viscous fluid
US-2016083676-A1 · Mar 24, 2016 · US
Processes and apparatus for cleaning, rinsing, and drying substrates
US-2015090299-A1 · Apr 2, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 30 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 14 |
| H10P72/0406 | 13 |
| H01L21/67051 | 9 |
| H10P52/402 | 9 |
| H10P72/0408 | 7 |