Pad carrier for horizontal pre-clean module

Patent metadata

Field	Value
Publication number	US-11942319-B2
Application number	US-202117511437-A
Country	US
Kind code	B2
Filing date	Oct 26, 2021
Priority date	Dec 18, 2020
Publication date	Mar 26, 2024
Grant date	Mar 26, 2024

Abstract

A horizontal pre-clean module includes a chamber including a basin and a lid which collectively define a processing area, a rotatable vacuum table disposed in the processing area, a pad conditioning station, a pad carrier positioning arm having a first end and a second end distal from the first end, a pad carrier assembly coupled to the first end of the pad carrier positioning arm, and an actuator coupled to the second end of the pad carrier positioning arm and configured to swing the pad carrier assembly between a first position over the rotatable vacuum table and a second position over the pad conditioning station. The pad carrier assembly includes a gimbal base and a pad carrier coupled to the gimbal base, the gimbal base and the pad carrier are configured to support a buffing pad by a mechanical clamping mechanism and a suction clamping mechanism.

First claim

The invention claimed is:

1. A horizontal pre-clean module, comprising:
a chamber comprising a basin and a lid which collectively define a processing area;
a rotatable vacuum table disposed in the processing area, the rotatable vacuum table comprising a substrate receiving surface;
a pad conditioning station disposed proximate to the rotatable vacuum table;
a pad carrier positioning arm having a first end and a second end distal from the first end;
a pad carrier assembly coupled to the first end of the pad carrier positioning arm; and
an actuator coupled to the second end of the pad carrier positioning arm and configured to swing the pad carrier assembly between a first position over the rotatable vacuum table and a second position over the pad conditioning station, wherein:
the pad carrier assembly comprises a gimbal base and a pad carrier coupled to the gimbal base, the gimbal base and the pad carrier are configured to support a buffing pad by a mechanical clamping mechanism and a suction clamping mechanism,
the gimbal base comprises a lip portion on a peripheral edge of the gimbal base,
the pad carrier comprises a tapered portion on a peripheral edge of the pad carrier, and
the lip portion and the pad carrier are configured to provide the mechanical clamping mechanism by mechanically clamping the buffing pad along a peripheral edge of the buffing pad.

2. The horizontal pre-clean module of claim 1 , wherein:
the gimbal base comprises magnets,
the pad carrier comprises magnets, and
the gimbal base and the pad carrier are coupled via magnetic force.

3. The horizontal pre-clean module of claim 1 , wherein
the pad carrier has a slot that receives a rod configured to be pushed into the buffing pad supported by the pad carrier, to provide the suction clamping mechanism to the buffing pad.

4. The horizontal pre-clean module of claim 1 , wherein
the pad carrier comprises a plastic backing that is in contact with the buffing pad supported by the pad carrier, to provide stiffness to the buffing pad.

5. The horizontal pre-clean module of claim 1 , wherein
the pad carrier has a plurality of slots that receive raised features formed on a surface of the buffing pad supported by the pad carrier, to provide the suction clamping mechanism to the buffing pad.

6. A pad carrier assembly for use in a horizontal pre-clean module, comprising:
a gimbal base; and
a pad carrier coupled to the gimbal base, wherein:
the gimbal base and the pad carrier are configured to support a buffing pad by a mechanical clamping mechanism and a suction clamping mechanism,
the gimbal base comprises a lip portion on a peripheral edge of the gimbal base,
the pad carrier comprises a tapered portion on a peripheral edge of the pad carrier, and
the lip portion and the pad carrier are configured to provide the mechanical clamping mechanism by mechanically clamping the buffing pad along a peripheral edge of the buffing pad.

7. The pad carrier assembly of claim 6 , wherein:
the gimbal base comprises magnets,
the pad carrier comprises magnets, and
the gimbal base and the pad carrier are coupled via magnetic force.

8. The pad carrier assembly of claim 6 , wherein
the pad carrier has a slot that receives a rod configured to be pushed into the buffing pad supported by the pad carrier, to provide the suction clamping mechanism to the buffing pad.

9. The pad carrier assembly of claim 6 , wherein
the pad carrier comprises a plastic backing that is in contact with the buffing pad supported by the pad carrier, to provide stiffness to the buffing pad.

10. The pad carrier assembly of claim 6 , wherein
the pad carrier has a plurality of slots that receive raised features formed on a surface of the buffing pad supported by the pad carrier, to provide the suction clamping mechanism to the buffing pad.

11. A method of supporting a buffing pad in a horizontal pre-clean module, comprising:
mechanically clamping a buffing pad along a peripheral edge of the buffing pad by a lip portion of a gimbal base and a tapered portion of a pad carrier, wherein:
the lip portion of the gimbal base is disposed on a peripheral edge of the gimbal base, and the tapered portion of the pad carrier is disposed on a peripheral edge of the pad carrier, and
the gimbal base and the pad carrier are coupled and disposed in a horizontal pre-clean module; and

supporting the buffing pad and preventing the buffing pad from sagging, by a suction clamping mechanism.

12. The method of claim 11 , wherein the buffing pad comprises polyvinyl alcohol (PVA) material.

13. The method of claim 11 , wherein the suction clamping mechanism comprises a rod pushed into the buffing pad through a slot of the pad carrier.

14. The method of claim 11 , further comprising
disposing a plastic backing to a surface of the pad carrier, the plastic backing being in contact with the buffing pad.

15. The method of claim 11 , wherein the suction clamping mechanism comprises a plurality of slots and raised features formed on a surface of the buffing pad, the plurality of slots each receives one of the raised features.

Assignees

• Applied Materials Inc

Inventors

• Golubovsky Edward
• Rangarajan Jagan
• Mikhaylichenko Ekaterina

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P70/20 Primary

  Cleaning during device manufacture · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title