Micro-electromechanical device for use in a flow control apparatus
US-12235144-B2 · Feb 25, 2025 · US
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Merry Nir patents
Merry Nir is listed as an inventor on 60 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Merry Nir |
| Total patents | 60 |
| First publication | Feb 19, 2015 |
| Latest publication | Feb 25, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Semiconductor processing tool platform configuration with reduced footprint
US-2024258137-A1 · Aug 1, 2024 · US
Semiconductor processing tool platform configuration with reduced footprint
US-11996307-B2 · May 28, 2024 · US
Mass flow control based on micro-electromechanical devices
US-11772958-B2 · Oct 3, 2023 · US
Dual actuating tilting slit valve
US-11749540-B2 · Sep 5, 2023 · US
Side storage pods, equipment front end modules, and methods for operating equipment front end modules
US-11749537-B2 · Sep 5, 2023 · US
Side storage pods, equipment front end modules, and methods for operating EFEMs
US-11640915-B2 · May 2, 2023 · US
Side storage pods, equipment front end modules, and methods for operating the same
US-11610794-B2 · Mar 21, 2023 · US
Substrate processing systems, apparatus, and methods with factory interface environmental controls
US-2022392789-A1 · Dec 8, 2022 · US
Substrate processing systems, apparatus, and methods with factory interface environmental controls
US-11450539-B2 · Sep 20, 2022 · US
Recent patents
Latest publications not already listed above.
Front-ducted equipment front end modules, side storage pods, and methods of operating the same
US-2022293444-A1 · Sep 15, 2022 · US
Front-ducted equipment front end modules, side storage pods, and methods of operating the same
US-11373891-B2 · Jun 28, 2022 · US
Semiconductor processing tool platform configuration with reduced footprint
US-2022199436-A1 · Jun 23, 2022 · US
Integrated system and method
US-11294164-B2 · Apr 5, 2022 · US
Substrate processing systems, apparatus, and methods with factory interface environmental controls
US-11282724-B2 · Mar 22, 2022 · US
Side storage pods, equipment front end modules, and methods for operating efems
US-2022084860-A1 · Mar 17, 2022 · US
Micro-electromechanical device for use in a flow control apparatus
US-2022081282-A1 · Mar 17, 2022 · US
Mass flow control based on micro-electromechanical devices
US-2022083081-A1 · Mar 17, 2022 · US
Dual actuating tilting slit valve
US-2022059373-A1 · Feb 24, 2022 · US
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US-11244846-B2 · Feb 8, 2022 · US
High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
US-11244844-B2 · Feb 8, 2022 · US
Batch wafer degas chamber and integration into factory interface and vacuum-based mainframe
US-2021398824-A1 · Dec 23, 2021 · US
Side storage pods, equipment front end modules, and methods for operating EFEMs
US-11189511-B2 · Nov 30, 2021 · US
Multi-finger robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US-2021146554-A1 · May 20, 2021 · US
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US-10943805-B2 · Mar 9, 2021 · US
Integrated system and method
US-2021026123-A1 · Jan 28, 2021 · US
Semiconductor device manufacturing platform with single and twinned processing chambers
US-10847391-B2 · Nov 24, 2020 · US
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods
US-10758045-B2 · Sep 1, 2020 · US
Side storage pods, equipment front end modules, and methods for operating equipment front end modules
US-2020135499-A1 · Apr 30, 2020 · US
High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
US-2020135521-A1 · Apr 30, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 59 |
| Merry Nir | 3 |
| Applied Materials Israel Ltd | 2 |
| Newman Jacob | 1 |
| Kanawade Dinesh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0464 | 21 |
| H10P72/3402 | 16 |
| H10P72/1926 | 15 |
| H10P72/0402 | 15 |
| H10P72/0466 | 14 |