Side storage pods, equipment front end modules, and methods for operating the same

Patent metadata

Field	Value
Publication number	US-11610794-B2
Application number	US-201916656191-A
Country	US
Kind code	B2
Filing date	Oct 17, 2019
Priority date	Oct 26, 2018
Publication date	Mar 21, 2023
Grant date	Mar 21, 2023

Abstract

Electronic device processing assemblies including an equipment front end module (EFEM) with at least one side storage pod attached thereto are described. The side storage pod has a side storage container. In some embodiments, an exhaust conduit extends between the chamber and a pod plenum that can contain a chemical filter proximate thereto. A supplemental fan may draw purge gas from the pod plenum through the chemical filter and route the gas through a return duct to an upper plenum of the EFEM. Methods and side storage pods in accordance with these and other embodiments are also disclosed.

First claim

What is claimed is:

1. A side storage pod, comprising:
one or more interior chambers;
one or more side storage containers located in the one or more interior chambers, each of the one or more side storage containers configured to receive one or more substrates, each of the one or more side storage containers further comprising:
an opening configured to be located adjacent an opening of a body of an equipment front end module; and
an exhaust port configured to exhaust gas entering the opening;

a pod plenum; and
an exhaust conduit coupled between the exhaust port and the pod plenum.

2. The side storage pod of claim 1 , further comprising a chemical filter located proximate the pod plenum.

3. The side storage pod of claim 1 , further comprising the pod plenum configured to be couplable to a return duct.

4. The side storage pod of claim 1 , further comprising a heater proximate to the pod plenum, the heater configured to heat purge gas passing through the pod plenum.

5. The side storage pod of claim 1 , further comprising a supplemental fan coupled to the pod plenum and configured to flow exhaust gas into a return duct.

6. The side storage pod of claim 5 , wherein the supplemental fan is located in the side storage pod.

7. The side storage pod of claim 1 further comprising an exhaust baffle located in the one or more side storage containers between the opening and the exhaust port.

8. The side storage pod of claim 7 wherein the exhaust baffle is located between the opening and an exhaust plenum containing the exhaust port.

9. The side storage pod of claim 1 , further comprising one or more sensors located along an exhaust flow path from the one or more side storage containers.

10. The side storage pod of claim 9 , wherein the one or more sensors comprise a flow sensor or a pressure sensor.

11. The side storage pod of claim 1 , comprising a supplemental fan comprising a variable speed fan configured to achieve a desired flow rate through the one or more side storage containers.

12. An electronic device processing assembly, comprising:
an equipment front end module including an equipment front end module chamber having one or more interface openings;
one or more side storage pods attached to a body of the equipment front end module, the one or more side storage pods comprising:
one or more interior chambers;
one or more side storage containers located in the one or more interior chambers, each of the one or more side storage containers configured to receive one or more substrates from the equipment front end module chamber, each of the one or more side storage containers further comprising:
an opening located adjacent one of the interface openings of the equipment front end module; and
an exhaust port configured to exhaust gas entering the opening;

a pod plenum; and

an exhaust conduit coupled between the exhaust port and the pod plenum.

13. The electronic device processing assembly of claim 12 , further comprising a chemical filter located proximate the pod plenum.

14. The electronic device processing assembly of claim 12 , further comprising a heater proximate the pod plenum, the heater configured to heat purge gas flowing through the pod plenum.

15. The electronic device processing assembly of claim 12 , further comprising a supplemental fan coupled to the pod plenum and configured to flow exhaust gas into a return duct extending to an upper plenum of the equipment front end module.

16. The electronic device processing assembly of claim 15 , wherein the supplemental fan is located in the side storage pod.

17. The electronic device processing assembly of claim 12 further comprising an exhaust baffle located in the one or more side storage containers between the opening and the exhaust port.

18. A method of operating an equipment front end module, comprising:
flowing purge gas from an upper plenum to an equipment front end module chamber and into an interior chamber of a side storage pod, the interior chamber comprising a side storage container within the side storage pod; and
exhausting purge gas from the side storage container through a return duct that couples the side storage pod of the side storage container to the upper plenum of the equipment front end module.

19. The method of operating an equipment front end module of claim 18 , further comprising exhausting purge gas from the equipment front end module chamber through the return duct.

20. The method of operating an equipment front end module of claim 18 , further comprising flowing the exhausted purge gas from the side storage container through a chemical filter to generate filtered gas.

Assignees

• Applied Materials Inc

Inventors

• Reuter Paul
• Hruzek Dean C
• Merry Nir
• Menk John C
• Baumgarten Douglas B

Classifications

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/1924 Primary

  characterised by atmosphere control · CPC title

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/0464

  characterised by the construction of the transfer chamber · CPC title

• B01D2259/4525

  for storage and dispensing systems · CPC title