Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing

Patent metadata

Field	Value
Publication number	US-11244846-B2
Application number	US-201916408303-A
Country	US
Kind code	B2
Filing date	May 9, 2019
Priority date	May 18, 2018
Publication date	Feb 8, 2022
Grant date	Feb 8, 2022

Abstract

Electronic device manufacturing apparatus and robot apparatus are described. The apparatus are configured to efficiently pick and place substrates wherein the robot apparatus includes an upper arm and three blades B1, B2, B3 that are independently rotatable. The three blades are configured to service a first dual load lock and second dual load lock wherein each dual load lock includes a different pitch. In some embodiments, a first pitch P1 is smaller than a second pitch P2. Blades B2 and B3 (or optionally blades B1 and B2) can service the first dual load lock with Pitch P1 and blades B1 and B3 can service the second dual load lock including the second pitch P2. Methods of operating the electronic device manufacturing apparatus and the robot apparatus are provided, as are numerous other aspects.

First claim

What is claims is:

1. A robot apparatus, comprising:
a drive motor assembly;
an upper arm configured to rotate relative to the drive motor assembly, the upper arm comprising an inboard end and an outboard end, wherein the inboard end is configured to rotate about a shoulder axis;
a first blade configured for independent rotation relative to the upper arm about an outboard axis, the first blade comprising a first end effector and a second end effector, wherein the second end effector is positioned above the first end effector;
a second blade configured for independent rotation relative to the upper arm about the outboard axis, the second blade comprising a third end effector and a fourth end effector, wherein the fourth end effector is positioned above the third end effector; and
an inboard drive assembly coupled to the drive motor assembly, the inboard drive assembly comprising:
a first driving pulley mounted for rotation on a first inboard pilot and configured to facilitate the independent rotation of the first blade relative to the upper arm about an outboard axis; and
a second driving pulley mounted for rotation on a second inboard pilot and configured to facilitate the independent rotation of the second blade relative to the upper arm about the outboard axis.

2. The robot apparatus of claim 1 , wherein the drive motor assembly comprises:
an upper arm drive motor configured to cause the independent rotation of the upper arm;
a first drive motor configured to cause the independent rotation of the first blade; and
a second drive motor configured to cause the independent rotation of the second blade.

3. The robot apparatus of claim 1 , wherein the drive motor assembly includes an upper arm shaft, a first blade shaft, and a second blade shaft, wherein the upper arm shaft, the first blade shaft, and the second blade shaft are co-axial.

4. The robot apparatus of claim 3 ,
wherein the first driving pulley coupled to the first blade shaft and
the second driving pulley coupled to the second blade shaft.

5. The robot apparatus of claim 1 , wherein:
the first end effector comprises a first substrate support location having a first nominal center and the second end effector comprises a second substrate support location having a second nominal center, wherein the first nominal center and the second nominal center are aligned along a first vertical axis; and
the third end effector comprises a third substrate support location having a third nominal center and the fourth end effector comprises a fourth substrate support location having a fourth nominal center, wherein the third nominal center and the fourth nominal center are aligned along a second vertical axis.

6. The robot apparatus of claim 1 , wherein:
the first end effector has a fixed position relative to the second end effector such that the first end effector and the second end effector are movable in unison; and
the third end effector has a fixed position relative to the fourth end effector such that the third end effector and the fourth end effector are movable in unison.

7. The robot apparatus of claim 1 , wherein the first end effector, the second end effector, the third end effector and the fourth end effector lie one above another when configured in a folded and zeroed configuration.

8. The robot apparatus of claim 1 , wherein a first length L 1 from the shoulder axis to the outboard axis and a second length L 2 between the outboard axis and a substrate support center of each of the first end effector, the second end effector, the third end effector, and the fourth end effector, is related by L 1 ≤L 2 ≤2L 1 .

9. The robot apparatus of claim 1 , further comprising:
a third blade configured for independent rotation relative to the upper arm about the outboard axis, the third blade comprising a fifth end effector and a sixth end effector, wherein the sixth end effector is positioned above the fifth end effector.

10. The robot apparatus of claim 9 , wherein the drive motor assembly further comprises:
a third drive motor configured to cause the independent rotation of the third blade.

11. A robot apparatus comprising:
a drive motor assembly;
an upper arm configured to rotate relative to the drive motor assembly, the upper arm comprising an inboard end and an outboard end, wherein the inboard end is configured to rotate about a shoulder axis;
a first blade configured for independent rotation relative to the upper arm about an outboard axis, the first blade comprising a first end effector and a second end effector, wherein the second end effector is positioned above the first end effector;
a second blade configured for independent rotation relative to the upper arm about the outboard axis, the second blade comprising a third end effector and a fourth end effector, wherein the fourth end effector is positioned above the third end effector; and
an outboard drive assembly coupled to the drive motor assembly, the outboard drive assembly comprising:
a first driven pulley mounted for rotation on a first outboard pilot and configured to facilitate the independent rotation of the first blade relative to the upper arm about an outboard axis; and
a second driven pulley mounted for rotation on a second outboard pilot and configured to facilitate the independent rotation of the second blade relative to the upper arm about the outboard axis.

Assignees

• Applied Materials Inc

Inventors

• Hudgens Jeffrey C
• Rice Michael R
• Muthukamatchi Karuppasamy
• Merry Nir

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/0454

  surrounding a central transfer chamber · CPC title

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• H10P72/3311

  Horizontal transfer of a batch of workpieces · CPC title

• H10P72/0466 Primary

  characterised by the construction of the load-lock chamber · CPC title