Side storage pods, equipment front end modules, and methods for operating EFEMs

Patent metadata

Field	Value
Publication number	US-11640915-B2
Application number	US-202117532954-A
Country	US
Kind code	B2
Filing date	Nov 22, 2021
Priority date	Oct 26, 2018
Publication date	May 2, 2023
Grant date	May 2, 2023

Abstract

Electronic device processing systems including an equipment front end module (EFEM) with a side storage pod are described. The EFEM includes an EFEM chamber and a recirculation duct. The side storage pod is fluidly coupled to the recirculation duct. The side storage pod includes an interior chamber and a side storage container disposed within the interior chamber. The side storage container is configured to receive one or more substrates from the EFEM chamber. The electronic device processing system further includes an environmental control system. The environmental control system is configured to circulate a purge gas between the EFEM chamber and the side storage pod via the recirculation duct.

First claim

What is claimed is:

1. An electronic device processing system, comprising:
an equipment front end module (EFEM) comprising an EFEM chamber and a recirculation duct;
a side storage pod that is fluidly coupled to the recirculation duct, the side storage pod comprising:
an interior chamber; and
a side storage container disposed within the interior chamber, wherein the side storage container is configured to receive one or more substrates from the EFEM chamber; and

an environmental control system, wherein the environmental control system is configured to circulate a purge gas between the EFEM chamber and the side storage pod via the recirculation duct.

2. The electronic device processing system of claim 1 , wherein the circulated purge gas is drawn from at least one of the EFEM chamber or the side storage container.

3. The electronic device processing system of claim 1 , wherein the environmental control system is configured to circulate the purge gas using a fan disposed between the EFEM chamber and the side storage pod.

4. The electronic device processing system of claim 1 , further comprising a heater configured to heat the circulated purge gas between the EFEM chamber and the side storage pod.

5. The electronic device processing system of claim 1 , wherein the side storage pod further comprises a supply baffle including a plurality of openings, wherein the supply baffle is configured to distribute the purge gas evenly throughout the side storage container.

6. The electronic device processing system of claim 1 , further comprising a chemical filter disposed between the EFEM chamber and the side storage container of the side storage pod, wherein the chemical filter is configured to filter chemicals from the purge gas.

7. The electronic device processing system of claim 1 , further comprising a particulate filter disposed between the EFEM chamber and the side storage container of the side storage pod, wherein the particulate filter is configured to filter particles from the purge gas.

8. The electronic device processing system of claim 1 , further comprising an exhaust port, wherein the environmental control system is further configured to exhaust a portion of the purge gas from the EFEM chamber via the exhaust port.

9. The electronic device processing system of claim 1 , further comprising:
an upper plenum that is in fluid communication with the EFEM chamber, wherein the upper plenum is coupled to a purge gas supply.

10. The electronic device processing system of claim 1 , wherein the side storage pod is a first side storage pod, and wherein the electronic device processing system further comprises one or more second side storage pods that are fluidly coupled to the recirculation duct, wherein each of the one or more second side storage pods comprise:
an additional interior chamber; and
an additional side storage container disposed within the additional interior chamber, wherein the additional side storage container is configured to receive one or more substrates from the EFEM chamber.

11. A method comprising:
flowing, by an environmental control system of a processing system, purge gas into a chamber of an equipment front end module (EFEM); and
circulating, by the environmental control system, a portion of the purge gas between the EFEM chamber and a side storage container disposed within an interior chamber of a side storage pod, wherein the portion of the purge gas is circulated via a recirculation duct fluidly coupled to the EFEM chamber and the side storage pod.

12. The method of claim 11 , further comprising:
flowing the circulated portion of the purge gas from the side storage container into the EFEM chamber via an opening of the side storage container that interfaces with an opening of the EFEM chamber.

13. The method of claim 11 , wherein the purge gas is flowed into the EFEM chamber via an upper plenum that is in fluid communication with the EFEM chamber, wherein the upper plenum is coupled to a purge gas supply.

14. The method of claim 11 , further comprising:
exhausting at least a portion of the purge gas in the EFEM chamber via an exhaust port of the EFEM.

15. The method of claim 11 , further comprising:
filtering chemicals from the circulated portion of the purge gas using a chemical filter disposed between the EFEM chamber and the side storage container of the side storage pod.

16. The method of claim 11 , further comprising:
filtering particles from the circulated portion of the purge gas using a particulate filter disposed between the EFEM chamber and the side storage container of the side storage pod.

17. The method of claim 11 , wherein the circulated portion of the purge gas is drawn from at least one of the EFEM chamber or the side storage container of the side storage pod.

18. The method of claim 11 , further comprising:
heating the circulated portion of the purge gas via a heater.

19. The method of claim 11 , wherein the side storage pod comprises a supply baffle including a plurality of openings, wherein the supply baffle is configured to distribute the circulated portion of the purge gas evenly throughout the side storage container.

20. A side storage pod, comprising:
an interior chamber;
a side storage container disposed within the interior chamber, the side storage container configured to receive one or more substrates from a chamber of an equipment front end module (EFEM);
a container plenum in fluid communication with the side storage container; and
a fan, wherein the fan is configured to flow gas between the EFEM chamber and the container plenum via a recirculation duct fluidly connected to the EFEM chamber and the container plenum.

Assignees

• Applied Materials Inc

Inventors

• Reuter Paul B
• Hruzek Dean C
• Merry Nir
• Menk John C
• Baumgarten Douglas B

Classifications

• H10P72/3411

  involving loading and unloading of wafers · CPC title

• H10P72/3408

  Docking arrangements · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/3404

  Storage means · CPC title

• H10P72/1924

  characterised by atmosphere control · CPC title