Dual actuating tilting slit valve

Patent metadata

Field	Value
Publication number	US-11749540-B2
Application number	US-202016999248-A
Country	US
Kind code	B2
Filing date	Aug 21, 2020
Priority date	Aug 21, 2020
Publication date	Sep 5, 2023
Grant date	Sep 5, 2023

Abstract

Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a shaft, a first gate and a second gate coupled to the shaft at opposite sides thereof, and an actuator coupled to the shaft. The actuator is configured to tilt together the shaft, the first gate, and the second gate to a first sealed gate position or to a second sealed gate position. The actuator can be operated using a pneumatic mechanism, an electro-magnetic mechanism, or a cam follower mechanism.

First claim

We claim:

1. A method for operating a dual gate system, comprising:
controlling an actuator to move together, along a first cam follower track, a shaft, a first gate coupled to a first side of the shaft, and a second gate coupled to a second side of the shaft, wherein the first cam follower track is configured to tilt together, about a pivot point and in a first direction, at a controlled velocity and/or force, the shaft, the first gate, and the second gate to a first sealed gate position, wherein the first sealed gate position comprise a first seal of the first gate against a first slot on a first side of the dual gate system that couples to a first chamber of an electronics device processing system; and
controlling the actuator to move together, along a second cam follower track, the shaft, the first gate, and the second gate, to a second sealed gate position, wherein the second cam follower track is configured to tilt together, about the pivot point and in a second direction, at the controlled velocity and/or force, the shaft, the first gate, and the second gate, wherein the second sealed gate position comprises a second seal of the second gate against a second slot on a second side of the dual gate system that couples to a second chamber of the electronics device processing system;

wherein the velocity and/or the force are controlled via the actuator configured to control motion of the shaft along the first cam follower track or the second cam follower track, and wherein the motion of the shaft is laterally switchable between the first cam follower track or the second cam follower track via a cam follower track switch comprising a laterally moveable guide.

2. The method of claim 1 , wherein at least a portion of the first side to which the first gate makes contact is at a first angle to vertical such that the first gate orthogonally contacts the portion of the first side upon tilting to the first sealed gate position to seal the first slot; and
wherein at least a portion of the second side to which the second gate makes contact is at a second angle to vertical such that the second gate orthogonally contacts the portion of the second side upon tilting to the second sealed gate position to seal the second slot.

3. The method of claim 1 , further comprising vertically moving together the shaft, the first gate, and the second gate via a vertical actuator,
wherein to open a sealed first gate or a sealed second gate, the method comprises:
moving together the shaft, the first gate, and the second gate to an initial non-tilted position, and
moving together the shaft, the first gate, and the second gate vertically downward to an open gate position;

wherein to seal the first gate or to seal the second gate, the method comprises:
moving together the shaft, the first gate, and the second gate vertically upward from the open gate position prior to tilting, and

wherein both the first gate and the second gate are open in the open gate position.

4. The method of claim 1 , comprising:
receiving, by a controller, a position trajectory for the shaft, the first gate, and the second gate;
receiving, by the controller, a position measurement from a continuous position sensor that continuously determines the position of the shaft, the first gate, and the second gate;
generating, by the controller, a control signal based on the position trajectory, the position measurement, and the actuator coupled to the shaft;
transmitting, by the controller, the control signal to the tilting mechanism; and
causing, by the controller, operation of the actuator.

5. A dual gate system, comprising:
a first gate configured to form a first seal against a first slot on a first side of the dual gate system that couples to a first chamber of an electronics device processing system;
a second gate configured to form a second seal against a second slot on a second side of the dual gate system that couples to a second chamber of the electronics device processing system, wherein the second side is opposite the first side;
a first cam follower track;
a second cam follower track;
a cam follower track switch comprising a laterally moveable guide;
a shaft coupled to the first gate, to the second gate, and to an actuator configured to control motion of the shaft along the first cam follower track or the second cam follower track, wherein motion of the shaft is laterally switchable between the first cam follower track or the second cam follower track via the cam follower track switch, wherein the first gate is coupled to a first side of the shaft, and wherein the second gate is coupled to a second side of the shaft;
wherein the first cam follower track is configured to:
seal the first gate to the first slot by tilting together, about a pivot point, the shaft, the first gate, and the second gate to a first sealed gate position where the first gate is compressed against the first side of the dual gate system, wherein the second cam follower track is configured to:
seal the second gate to the second slot by tilting together, about the pivot point, the shaft, the first gate, and the second gate to a second sealed gate position where the second gate is compressed against the second side of the dual gate system, and

wherein the actuator is further configured to:
control at least one of a velocity or a force of the shaft, the first gate, and the second gate.

6. The dual gate system of claim 5 , wherein:
at least a portion of the first side to which the first gate makes contact is at a first angle to vertical such that the first gate orthogonally contacts the portion of the first side upon tilting to the first sealed gate position to seal the first slot; and
at least a portion of the second side to which the second gate makes contact is at a second angle to vertical such that the second gate orthogonally contacts the portion of the second side upon tilting to the second sealed gate position to seal the second slot.

7. The dual gate system of claim 6 , wherein the first angle is about 1° to about 20 to vertical in the first direction, and wherein the second angle is about 1° to about 20 to vertical in the second direction.

8. The dual gate system of claim 5 , wherein the shaft is further coupled to a vertical actuator configured to move the shaft, the first gate and the second gate vertically,
wherein the vertical actuator is configured to:
move together the shaft, the first gate, and the second gate vertically downward to an open gate position, and
move together the shaft, the first gate, and the second gate vertically upward from an open gate position prior to tilting to seal the first gate or to seal the second gate, and

wherein both the first gate and the second gate are open in the open gate position.

9. The dual gate system of claim 5 , wherein the first gate and the second gate are both removable from the shaft.

10. A dual gate system comprising:
a first gate configured to form a first seal against a first slot on a first side of the dual gate system that couples to a first chamber of an electronics device processing system;
a second gate configured to form a second seal against a second slot on a second side of the dual gate system that couples to a second chamber of the electronics device processing system, wherein the second side is opposite the first side;
a shaft coupled to the first gate, to the second gate, and to a sealing mechanism, wherein the first gate is coupled to a first side of the shaft, and wherein the second gate is coupled to a second side of the shaft;
wherein the sealing mechanism comprises:
a first cam follower track configured to seal the first gate to the first slot by moving the shaft, the fi

Assignees

• Applied Materials Inc

Inventors

• Merry Nir
• Hudgens Jeff

Classifications

• H10P72/0441 Primary

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H01L21/67126 Primary

  Electricity · mapped topic

• F16K11/052

  with pivoted closure members, e.g. butterfly valves · CPC title

• F16K31/52416

  comprising a multiple-way lift valve · CPC title

• F16K31/52441

  with a pivoted disc or flap · CPC title