Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods

Patent metadata

Field	Value
Publication number	US-10758045-B2
Application number	US-201916358280-A
Country	US
Kind code	B2
Filing date	Mar 19, 2019
Priority date	Apr 25, 2014
Publication date	Sep 1, 2020
Grant date	Sep 1, 2020

Abstract

A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.

First claim

What is claimed is:

1. A method of operating a load lock door assembly, comprising:
providing a load lock door assembly including a load lock door sealable against a sealing surface proximate to a load lock entry, and a door support bracket coupled to the load lock door;
actuating one or more separator side actuator coupled to the door support bracket to separate the load lock door from the sealing surface, wherein the actuating comprises performing a peeling action to allow opening a first lateral side of the load lock door before opening a second lateral side of the load lock door; and
actuating one or more pivot side actuator to pivot the load lock door.

2. The method of claim 1 , wherein the actuating one or more separator side actuator comprises:
first actuating of a first side actuator; and
second actuating of a second side actuator after the first actuating of the first side actuator.

3. The method of claim 1 , wherein the actuating one or more pivot side actuator to pivot the load lock door comprises action of the one or more pivot side actuator to pivot a pivot member.

4. The method of claim 1 , wherein the actuating one or more separator side actuator comprises sliding the door support bracket relative to a pivot member on a slide mechanism.

5. The method of claim 1 , wherein the actuating one or more pivot side actuator comprises pivoting a pivot member on a side of a load lock body.

6. The method of claim 1 , wherein the actuating one or more separator side actuator comprises pivoting a pivot joint of the door support bracket.

7. The method of claim 1 , wherein performing the peeling action comprises flexing a spring to allow opening of the first lateral side of the load lock door before the second lateral side of the load lock door.

8. The method of claim 1 , wherein the actuating one or more separator side actuator comprising pivoting one or more pivot joints to allow opening of the first lateral side of the load lock door before opening the second lateral side of the load lock door.

9. A method of operating a load lock door assembly, comprising:
providing a load lock door assembly including a load lock door sealable against a sealing surface proximate to a load lock entry, and a door support bracket coupled to the load lock door; and
actuating one or more separator side actuator coupled to the door support bracket to separate the load lock door from the sealing surface by performing a peeling action to allow opening a first lateral side of the load lock door before opening a second lateral side of the load lock door.

10. The method of claim 9 , further comprising actuating one or more pivot side actuator to pivot the load lock door.

11. The method of claim 9 , wherein the actuating one or more separator side actuator comprises sliding the door support bracket relative to a pivot member on a slide mechanism.

12. The method of claim 9 , wherein the actuating one or more separator side actuator comprises pivoting a pivot joint of the door support bracket.

13. The method of claim 9 , wherein performing the peeling action comprises flexing a spring to allow opening of the first lateral side of the load lock door before the second lateral side of the load lock door.

14. A method comprising:
providing a load lock door assembly including a load lock door sealable against a sealing surface proximate to a load lock entry, and a door support bracket coupled to the load lock door;
sending, with a processor of a controller of the load lock door assembly, a signal to actuate one or more separator side actuator coupled to the door support bracket to separate the load lock door from the sealing surface, wherein to actuate the one or more separator side actuator comprises performing a peeling action to allow opening a first lateral side of the load lock door before opening a second lateral side of the load lock door; and
sending, with the processor, a signal from the controller to actuate one or more pivot side actuator to pivot the load lock door.

15. The method of claim 14 , wherein the actuating one or more separator side actuator comprises:
first actuating of a first side actuator; and
second actuating of a second side actuator after the first actuating of the first side actuator.

16. The method of claim 14 , wherein the actuating one or more pivot side actuator to pivot the load lock door comprises action of the one or more pivot side actuator to pivot a pivot member.

17. The method of claim 14 , wherein the actuating one or more separator side actuator comprises sliding the door support bracket relative to a pivot member on a slide mechanism.

18. The method of claim 14 , wherein the actuating one or more pivot side actuator comprises pivoting a pivot member on a side of a load lock body.

19. The method of claim 14 , wherein the actuating one or more separator side actuator comprises pivoting a pivot joint of the door support bracket.

20. The method of claim 14 , wherein the actuating one or more separator side actuator comprising pivoting one or more pivot joints to allow opening of the first lateral side of the load lock door before opening the second lateral side of the load lock door.

Assignees

• Applied Materials Inc

Inventors

• Weiss Eran
• Morey Travis
• Merry Nir
• Reuter Paul B
• Kremerman Izya
• Hudgens Jeffrey C
• Hruzek Dean C

Classifications

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/0441 Primary

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• A47B96/00 Primary

  Details of cabinets, racks or shelf units not covered by a single one of groups A47B43/00 - A47B95/00; General details of furniture (doors E06B) · CPC title

• H01L21/67201

  Electricity · mapped topic

• H01L21/67126

  Electricity · mapped topic