High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods

Patent metadata

Field	Value
Publication number	US-11244844-B2
Application number	US-201916657685-A
Country	US
Kind code	B2
Filing date	Oct 18, 2019
Priority date	Oct 26, 2018
Publication date	Feb 8, 2022
Grant date	Feb 8, 2022

Abstract

In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.

First claim

What is claimed is:

1. A side storage pod apparatus of an equipment front end module, comprising:
a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module and to receive a flow of purge gas from the equipment front end module;
a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon;
a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber; and
an exhaust port coupled to the plenum chamber and to an exhaust conduit that sends the purge gas to an exhaust treatment scrubber.

2. The side storage pod apparatus of claim 1 , wherein the plenum chamber is positioned on a side of the side storage enclosure opposite from the opening.

3. The side storage pod apparatus of claim 1 , wherein the plenum chamber is separated from the side storage chamber by a baffle plate.

4. The side storage pod apparatus of claim 3 , wherein the baffle plate is adapted to cause substantial gas flow uniformity through the side storage chamber.

5. The side storage pod apparatus of claim 3 , further comprising a series of flow passages formed through the baffle plate.

6. The side storage pod apparatus of claim 5 , wherein at least some of the series of flow passages have a different cross-sectional area.

7. The side storage pod apparatus of claim 5 , wherein the series of flow passages comprises a set of larger flow passages positioned at one vertical portion of the baffle plate and a set of smaller flow passages positioned at another vertical portion of the baffle plate.

8. The side storage pod apparatus of claim 7 , wherein the set of larger flow passages are located towards one end of the baffle plate.

9. The side storage pod apparatus of claim 7 , wherein the set of larger flow passages are positioned vertically away from the exhaust port.

10. The side storage pod apparatus of claim 1 , wherein the exhaust port is coupled to a bottom portion of the plenum chamber.

11. The side storage pod apparatus of claim 1 , further comprising a baffle plate to separate the plenum chamber from the side storage chamber, wherein the baffle plate comprises a series of flow passages having different cross-sectional areas through the baffle plate, the series of flow passages including a set of larger flow passages located proximate a top end of the plenum chamber and a set of smaller flow passages located proximate a bottom end of the plenum chamber.

12. The side storage pod apparatus of claim 1 , further comprising a retaining enclosure surrounding the side storage enclosure.

13. The side storage pod apparatus of claim 12 , further comprising an exhaust conduit coupled to the exhaust port, and the exhaust conduit passes through a wall of the retaining enclosure.

14. The side storage pod apparatus of claim 1 , further comprising a supplemental fan coupled to the exhaust port or an exhaust conduit coupled to the exhaust port.

15. The side storage pod apparatus of claim 1 , further comprising:
the exhaust conduit; and
the exhaust treatment scrubber attached to the exhaust conduit, wherein the exhaust treatment scrubber comprises a chemical filter.

16. An equipment front end module, comprising:
an equipment front end body; and
a side storage pod apparatus coupled to a side wall of the equipment front end body, the side storage pod apparatus, further comprising:
a side storage pod enclosure having a surface configured to couple to a side wall of the equipment front end body,
an opening to receive substrates from the equipment front end module and to receive a flow of purge gas from the equipment front end module,
a side storage pod chamber within the side storage enclosure having a plurality of vertically-spaced storage members each configured to support a substrate,
a plenum chamber within the side storage enclosure comprising a separate chamber from the side storage pod chamber,
a baffle plate configured to separate the plenum chamber from the side storage pod chamber, and
an exhaust port coupled to the plenum chamber and to an exhaust conduit that sends the gas to an exhaust treatment scrubber.

17. An electronic device processing assembly, comprising:
an equipment front end module, including:
an equipment front end module body forming an equipment front end module chamber;
one or more load ports coupled to a front wall of the equipment front end module body, each load port configured to dock a substrate carrier thereat; and
a side storage pod apparatus coupled to a side wall of the equipment front end module body, the side storage pod apparatus comprising:
a side storage enclosure defining walls of a side storage pod chamber, and having a sealing surface configured to couple to the equipment front end module body, the walls including a plurality of vertically-spaced support members configured to support substrate thereon;
an opening to receive substrates from the equipment front end module and to receive a flow of purge gas from the equipment front end module;
a plenum chamber within the side storage enclosure comprising a separate chamber from the side storage pod chamber;
a baffle plate configured to separate the plenum chamber from the side storage pod chamber;
an exhaust port;
an exhaust conduit coupled to the exhaust port, the exhaust conduit to send the gas to an exhaust treatment scrubber; and
a supplemental fan coupled to the exhaust port or the exhaust conduit.

18. The electronic device processing assembly of claim 17 , further comprising an environmental control system coupled to the equipment front end module chamber, the environmental control system to provide an environmentally-controlled atmosphere to the equipment front end module chamber.

19. A method of processing substrates, comprising:
providing an equipment front end module including an equipment front end module body and an equipment front end module chamber, the equipment front end module including one or more load ports coupled to a front wall of the equipment front end module body, each load port configured to support a substrate carrier, and a side storage pod apparatus coupled to a side wall of the equipment front end module body;
providing, in the side storage pod apparatus, a side storage pod chamber and a plenum chamber separated by a baffle plate, and an exhaust port coupled to the plenum chamber;
flowing, from the equipment front end module through the baffle plate and into the plenum chamber, a purge gas across substrates stored in the side storage pod chamber;
exhausting the purge gas from the plenum chamber through the exhaust port; and
sending the purge gas to an exhaust treatment scrubber.

20. The method of claim 19 , further comprising assisting the purge gas flowing through the side storage pod chamber with a supplemental fan.

21. The method of claim 19 , wherein the flowing of the purge gas across the substrates comprises a gas flow velocity of greater than or equal to 100 cubic feet per minute (cfm).

22. The method of claim 21 , wherein the gas flow velocity is greater than or equal to 140 cfm.

23. The method of claim 21 , wherein the gas flow velocity is greater than or equal to 160 cfm.

24. The method of claim 21 , wherein the gas flow velocity is grea

Assignees

• Applied Materials Inc

Inventors

• Reuter Paul B
• Narasimhan Murali
• Athayde Amulya L
• Pannese Patrick
• Hruzek Dean C
• Merry Nir

Classifications

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/0464

  characterised by the construction of the transfer chamber · CPC title

• H10P72/3404 Primary

  Storage means · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1921

  characterised by substrate supports · CPC title