Systems and methods for removing contaminants in electroplating systems
US-2026035828-A1 · Feb 5, 2026 · US
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Mchugh Paul patents
Mchugh Paul is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mchugh Paul |
| Total patents | 20 |
| First publication | Jun 23, 2016 |
| Latest publication | Feb 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Systems and methods for improving within die co-planarity uniformity
US-11984358-B2 · May 14, 2024 · US
Systems and methods for improving within die co-planarity uniformity
US-2022270923-A1 · Aug 25, 2022 · US
Systems and methods for improving within die co-planarity uniformity
US-11367653-B2 · Jun 21, 2022 · US
Drying high aspect ratio features
US-10971354-B2 · Apr 6, 2021 · US
Controlled etch of nitride features
US-10840104-B2 · Nov 17, 2020 · US
Apparatus and methods to improve ALD uniformity
US-10655226-B2 · May 19, 2020 · US
Systems and methods for improving within die co-planarity uniformity
US-2020098628-A1 · Mar 26, 2020 · US
Drying high aspect ratio features
US-10546762-B2 · Jan 28, 2020 · US
Electroplating dynamic edge control
US-10494731-B2 · Dec 3, 2019 · US
Recent patents
Latest publications not already listed above.
Systems and methods for removing contaminants in electroplating systems
US-2019345624-A1 · Nov 14, 2019 · US
Systems and methods for wetting substrates
US-10373864-B2 · Aug 6, 2019 · US
Electroplating dynamic edge control
US-2019177869-A1 · Jun 13, 2019 · US
Controlled etch of nitride features
US-2019019688-A1 · Jan 17, 2019 · US
Apparatus and Methods to Improve ALD Uniformity
US-2018340259-A1 · Nov 29, 2018 · US
Systems and methods for wetting substrates
US-2018182664-A1 · Jun 28, 2018 · US
Drying high aspect ratio features
US-2018144954-A1 · May 24, 2018 · US
Drying high aspect ratio features
US-2018019119-A1 · Jan 18, 2018 · US
Substrate rinsing systems and methods
US-9859135-B2 · Jan 2, 2018 · US
Substrate rinsing systems and methods
US-2016175857-A1 · Jun 23, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 21 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/47 | 8 |
| H01L21/2885 | 8 |
| H10P95/90 | 6 |
| H10W20/056 | 6 |
| H01L21/76877 | 5 |