Apparatus and methods to improve ALD uniformity

Patent metadata

Field	Value
Publication number	US-10655226-B2
Application number	US-201815986197-A
Country	US
Kind code	B2
Filing date	May 22, 2018
Priority date	May 26, 2017
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

Apparatus and methods to deposit a film using a batch processing chamber with a plurality of heating zones are described. The film is deposited on one or more substrates and the uniformity of the deposition thickness is determined at a plurality of points. The heating zones set points are applied to a sensitivity matrix and new temperature or power set points for the heating zones are determined and set. One or more substrates are processed using the new set points and the thickness uniformity is determined and may be adjusted again to increase the uniformity.

First claim

What is claimed is:

1. A processing chamber comprising:
a gas distribution assembly;
a susceptor assembly having a central support post and a top surface adjacent to and spaced from the gas distribution assembly;
a heater assembly comprising a plurality of heating elements arranged in heating zones, each heating zone spaced a distance from the central support post so that each heating zone is a different distance from the support post, and a heat shield positioned between two of the heating zones; and
a controller operatively connected to the plurality of heating elements, the controller configured to adjust power or temperature of one or more of the heating elements based on a plurality of film thickness measurement and a sensitivity matrix characterizing effects of changes in temperature or power set points for the individual heating zones.

2. The processing chamber of claim 1 , wherein the heater assembly comprises four heating elements spaced at increasing distances from the central support post, the four heating elements forming a first heating zone, a second heating zone, a third heating zone and a fourth heating zone.

3. The processing chamber of claim 2 , wherein the controller is configured to hold one of the heating zones at a fixed temperature or power set point and determine adjustment values for the other three heating zones.

4. The processing chamber of claim 3 , wherein the heating zone held at the fixed temperature or power set point is the second zone.

5. The processing chamber of claim 3 , wherein the heating zone held at the fixed temperature or power set point is the third zone.

6. The processing chamber of claim 2 , wherein the heat shield is positioned between the first heating zone and the second heating zone.

7. The processing chamber of claim 2 , wherein the heat shield is positioned between the third heating zone and the fourth heating zone.

8. The processing chamber of claim 1 , wherein the heat shield is quartz.

9. The processing chamber of claim 1 , wherein the heat shield is stainless steel.

10. The processing chamber of claim 1 , wherein the controller is configured to move the heat shield.

11. The processing chamber of claim 1 , wherein each of the heating elements comprise graphite.

12. A processing chamber comprising:
a gas distribution assembly;
a susceptor assembly having a central support post and a top surface adjacent to and spaced from the gas distribution assembly;
a heater assembly comprising four heating elements spaced at increasing distances from the central support post, the four heating elements forming a first heating zone, a second heating zone, a third heating zone and a fourth heating zone, the heater assembly including a heat shield positioned between one or more of the first heating zone and the second heating zone or the third heating zone and the fourth heating zone, the heat shield comprising one or more of quartz or stainless steel; and
a controller operatively connected to the plurality of heating elements, the controller configured to adjust power or temperature of one or more of the heating elements based on a plurality of film thickness measurement and a sensitivity matrix characterizing effects of changes in temperature or power set points for the individual heating zones.

13. A method of forming a film, the method comprising:
depositing a film on a substrate using a predetermined processing method, the processing method including temperature or power set points for a plurality of heating zones;
measuring a thickness of the film at a plurality of locations on the substrate and converting the plurality of thickness measurements to temperature;
adjusting the temperature or power set points of at least one of the heating zones based on the plurality of thickness measurements, wherein adjusting the temperature or power set points comprises applying a sensitivity matrix to adjust at least one of the heating zones, the sensitivity matrix characterizing effects of changes in temperature or power set points for individual heating zones on deposited material thickness at the plurality of locations on the substrate;
depositing a second film on a second substrate using the predetermined method with the adjusted temperature or power set points and measuring a thickness of the second film at the plurality of locations; and
repeating adjusting the temperature or power set points, depositing a film and measuring the thickness at a plurality of locations on the substrate to lower a thickness non-uniformity of the deposited film.

14. The method of claim 13 , wherein depositing the film occurs on a plurality of substrates and the plurality of thickness measurements are average values of the plurality of substrates.

15. The method of claim 13 , wherein depositing the second film on the second substrate occurs on a plurality of second substrates and the plurality of thickness measurements are average values of the plurality of substrates.

16. The method of claim 13 , wherein applying the sensitivity matrix comprises fixing the temperature or power set points for one of the individual heating zones and determining new set points for the other heating zones.

17. The method of claim 16 , wherein there are four heating zones arranged at increasing distances from a central support post about which the substrates are rotated during processing.

18. The method of claim 17 , wherein the fixed heating zone is the second heating zone or the third heating zone.

19. The method of claim 13 , further comprising positioning a shield between one or more of the first heating zone and the second heating zone or the third heating zone and the fourth heating zone.

Assignees

• Applied Materials Inc

Inventors

• Wilson Gregory J
• Mchugh Paul
• Ramanathan Karthik

Classifications

• C23C16/52 Primary

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• C23C16/45544

  characterized by the apparatus · CPC title

• C23C16/46

  characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P74/238

  comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title