Linear arrangement for substrate processing tools
US-12562356-B2 · Feb 24, 2026 · US
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Kellogg Michael C patents
Kellogg Michael C is listed as an inventor on 46 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kellogg Michael C |
| Total patents | 46 |
| First publication | Feb 12, 2015 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Plasma processing devices having multi-port valve assemblies
US-12100575-B2 · Sep 24, 2024 · US
Ring structures and systems for use in a plasma chamber
US-2024266151-A1 · Aug 8, 2024 · US
Multi-sectional plasma confinement ring structure
US-2024234104-A1 · Jul 11, 2024 · US
Ring structures and systems for use in a plasma chamber
US-2024162015-A1 · May 16, 2024 · US
Wafer transport assembly with integrated buffers
US-11764086-B2 · Sep 19, 2023 · US
Slide and pivot assemblies for process module bias assemblies of substrate processing systems
US-2023154772-A1 · May 18, 2023 · US
Linear arrangement for substrate processing tools
US-2023085987-A1 · Mar 23, 2023 · US
Wafer transport assembly with integrated buffers
US-2022344183-A1 · Oct 27, 2022 · US
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
US-11195706-B2 · Dec 7, 2021 · US
Recent patents
Latest publications not already listed above.
Monolithic gas distribution manifold and various construction techniques and use cases therefor
US-10914003-B2 · Feb 9, 2021 · US
Ring Structures and Systems for Use in a Plasma Chamber
US-2020365378-A1 · Nov 19, 2020 · US
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
US-10825656-B2 · Nov 3, 2020 · US
Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A Coupling Ring
US-2020227238-A1 · Jul 16, 2020 · US
Chamber with vertical support stem for symmetric conductance and RF delivery
US-10665435-B2 · May 26, 2020 · US
Monolithic gas distribution manifold and various construction techniques and use cases therefor
US-2020141002-A1 · May 7, 2020 · US
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
US-10615003-B2 · Apr 7, 2020 · US
Monolithic gas distribution manifold and various construction techniques and use cases therefor
US-10557197-B2 · Feb 11, 2020 · US
Chamber with vertical support stem for symmetric conductance and rf delivery
US-2019371579-A1 · Dec 5, 2019 · US
Chamber with vertical support stem for symmetric conductance and RF delivery
US-10395902-B2 · Aug 27, 2019 · US
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge rf generators
US-2019244788-A1 · Aug 8, 2019 · US
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators
US-10283330-B2 · May 7, 2019 · US
Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A Coupling Ring
US-2019057839-A1 · Feb 21, 2019 · US
Chamber with vertical support stem for symmetric conductance and rf delivery
US-2018323044-A1 · Nov 8, 2018 · US
Plasma processing devices having multi-port valve assemblies
US-2018323041-A1 · Nov 8, 2018 · US
Monolithic manifold mask and substrate concepts
US-10118263-B2 · Nov 6, 2018 · US
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
US-10115568-B2 · Oct 30, 2018 · US
Chamber with vertical support stem for symmetric conductance and RF delivery
US-10049862-B2 · Aug 14, 2018 · US
Plasma processing devices having multi-port valve assemblies
US-10037869-B2 · Jul 31, 2018 · US
Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A Coupling Ring
US-2018082822-A1 · Mar 22, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 46 |
| Kellogg Michael C | 2 |
| Marakhtanov Alexei | 2 |
| Dhindsa Rajinder | 2 |
| Lam Researech Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32642 | 20 |
| H01J37/32183 | 17 |
| H01J37/32431 | 17 |
| H01J37/32623 | 16 |
| H01J37/32715 | 15 |