Chamber with vertical support stem for symmetric conductance and RF delivery

Patent metadata

Field	Value
Publication number	US-10049862-B2
Application number	US-201615068508-A
Country	US
Kind code	B2
Filing date	Mar 11, 2016
Priority date	Apr 17, 2015
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

A plasma chamber is provided to increase conductance within the plasma chamber and to increase uniformity of the conductance. A radio frequency (RF) path for supplying power to the plasma chamber is symmetric with respect to a center axis of the plasma chamber. Moreover, pumps used to remove materials from the plasma chamber are located symmetric with respect to the center axis. The symmetric arrangements of the RF paths and the pumps facilitate an increase in conductance uniformity within the plasma chamber.

First claim

The invention claimed is:

1. A system for increasing uniformity in conductance within a plasma chamber, comprising:
a side wall;
a chuck support column;
a lower electrode situated within an enclosure surrounded by the side wall, wherein the lower electrode is supported by the chuck support column; and
a transition flange located below and adjacent to the side wall, wherein the transition flange includes a transition flange opening, wherein the transition flange opening is located coaxial with respect to the lower electrode such that the chuck support column passes via the transition flange opening and reduces impedance to a conductance of remnant materials within the plasma chamber from the lower electrode to one or more vacuum openings formed within the transition flange,
wherein the side wall has a diameter greater than a diameter of an additional plasma chamber that is used to process a wafer having a diameter of 300 millimeters.

2. The system of claim 1 , wherein the chuck support column includes a hollow space, the system further comprising:
a radio frequency (RF) rod extending via the transition flange opening and the hollow space to the lower electrode within the plasma chamber to provide RF power to the lower electrode; or
a gas line extending via the transition flange opening and a hollow space of the RF rod to one or more inlets formed within the lower electrode to supply one or more gases to change a temperature of the lower electrode; or
a fluid line extending via the transition flange opening and the hollow space of the RF rod to the lower electrode to supply a fluid to heat or cool the lower electrode; or
a conductor extending via the transition flange opening and the hollow space of the RF rod to a thermocouple that is proximate to the lower electrode to measure a temperature of the lower electrode; or
a lift rod extending via the transition flange opening and the hollow space of the RF rod to a lift pin embedded within the lower electrode, wherein the lift pin is configured to be moved in a vertical direction with respect to the plasma chamber to change a height of a wafer with respect to the lower electrode.

3. The system of claim 1 , wherein the one or more vacuum openings include a plurality of vacuum openings, the system further comprising a plurality of vacuum pumps interfaced with the plurality of vacuum openings, wherein the plurality of vacuum pumps are placed symmetric with respect to the lower electrode.

4. The system of claim 1 , wherein the one or more vacuum openings include a plurality of vacuum openings, the system further comprising a plurality of baffles located on top of the plurality of vacuum openings, wherein the plurality of baffles are configured to vertically move with respect to the plurality of vacuum openings to control the conductance and a pressure at a region adjacent to the transition flange.

5. A system for increasing uniformity in conductance within a plasma chamber, comprising
a side wall;
a chuck support column;
a lower electrode situated within an enclosure surrounded by the side wall, wherein the lower electrode is supported by the chuck support column;
a grid fitted between the lower electrode and the side wall to control a conductance of remnant materials within the plasma chamber and a pressure within the plasma chamber; and
a transition flange located below and adjacent to the side wall, wherein the transition flange includes a transition flange opening, wherein the transition flange opening is located coaxial with respect to the lower electrode such that the chuck support column passes via the transition flange opening and reduces impedance to the conductance of remnant materials from the lower electrode to one or more vacuum openings formed within the transition flange.

6. The system of claim 1 , further comprising a bowl-shaped structure that is fitted on top of the chuck support column, wherein the bowl-shaped structure supports the lower electrode and is located between the chuck support column and the lower electrode.

7. The system of claim 1 , further comprising a linear drive assembly configured to move the chuck support column in a vertical direction with respect to the side wall to control a gap formed between the lower electrode and an upper electrode of the plasma chamber.

8. The system of claim 1 , wherein the chuck support column includes a hollow space, the system further comprising:
a radio frequency (RF) rod extending via the transition flange opening and the hollow space to the lower electrode within the plasma chamber to provide RF power to the lower electrode; and
an impedance matching network configured to be attached to a bottom of the RF rod.

9. A system for increasing uniformity in conductance within a plasma chamber, comprising:
a side wall;
a chuck support column;
an inductively coupled plasma (ICP) circuit assembly placed on top of the side wall;
a lower electrode situated within an enclosure surrounded by the side wall, wherein the lower electrode is supported by the chuck support column; and
a transition flange located below and adjacent to the side wall, wherein the transition flange includes a transition flange opening, wherein the transition flange opening is located coaxial with respect to the lower electrode such that the chuck support column passes via the transition flange opening and reduces impedance to a conductance of remnant materials within the plasma chamber from the lower electrode to one or more vacuum openings formed within the transition flange,
wherein the side wall has a diameter greater than a diameter of an additional plasma chamber that is used to process a wafer having a diameter of 300 millimeters.

10. The system of claim 9 , wherein the chuck support column includes a hollow space, the system further comprising:
a radio frequency (RF) rod extending via the transition flange opening and the hollow space to the lower electrode within the plasma chamber to provide RF power to the lower electrode; or
a gas line extending via the transition flange opening and a hollow space of the RF rod to one or more inlets formed within the lower electrode to supply one or more gases to change a temperature of the lower electrode; or
a fluid line extending via the transition flange opening and the hollow space of the RF rod to the lower electrode to supply a fluid to heat or cool the lower electrode; or
a conductor extending via the transition flange opening and the hollow space of the RF rod to a thermocouple that is proximate to the lower electrode to measure a temperature of the lower electrode; or
a lift rod extending via the transition flange opening and the hollow space of the RF rod to a lift pin embedded within the lower electrode, wherein the lift pin is configured to be moved in a vertical direction with respect to the plasma chamber to change a height of a wafer with respect to the lower electrode.

11. The system of claim 9 , wherein the one or more vacuum openings include a plurality of vacuum openings, the system further comprising a plurality of vacuum pumps interfaced with the plurality of vacuum openings, wherein the plurality of vacuum pumps are placed symmetric with respect to the lower electrode.

12. The system of claim 9 , wherein the one or more vacuum openings include a plurality of vacuum openings, the system further comprising a plurality of baffles located on top of the plurality of vacuum openings, wherein the plurality of baffles are configured to vertically move with respect to the plurality of vacuum openings to control the conductance and a pressure at a region adjacent to the transition flange.

13. A system

Assignees

• Lam Res Corp

Inventors

• Brown Daniel Arthur
• Holland John Patrick
• Kellogg Michael C
• Tappan James E
• Antolik Jerrel K
• Kenworthy Ian
• Panagopoulos Theo
• Chen Zhigang

Classifications

• H10P72/0471 Primary

  comprising at least one ion or electron beam chamber · CPC title

• H01J37/32431

  Constructional details of the reactor · CPC title

• H01J37/32082 Primary

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title

• H01J37/32724

  Temperature · CPC title

• H01J37/32183

  Matching circuits · CPC title