Multi zone gas injection upper electrode system
US-10622195-B2 · Apr 14, 2020 · US
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Marakhtanov Alexei patents
Marakhtanov Alexei holds 11 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 11 |
| Recent patents | 0 |
| First publication | Aug 18, 2015 |
| Latest publication | Apr 14, 2020 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Method and apparatus for DC voltage control on RF-powered electrode
US-9536711-B2 · Jan 3, 2017 · US
Systems and methods for controlling a plasma edge region
US-9396908-B2 · Jul 19, 2016 · US
Grounded confinement ring having large surface area
US-9337004-B2 · May 10, 2016 · US
Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system
US-9287096-B2 · Mar 15, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Multi zone gas injection upper electrode system
US-10622195-B2 · Apr 14, 2020 · US
Method and apparatus for DC voltage control on RF-powered electrode
US-9536711-B2 · Jan 3, 2017 · US
Systems and methods for controlling a plasma edge region
US-9396908-B2 · Jul 19, 2016 · US
Grounded confinement ring having large surface area
US-9337004-B2 · May 10, 2016 · US
Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system
US-9287096-B2 · Mar 15, 2016 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 11 |
| Physics | 2 |
| Cross-Sectional Technologies | 2 |
| Chemistry & Metallurgy | 1 |