Mems mirror, micromirror array and illumination system for a lithography system, lithography system, and method for producing a lithography system
US-2026079336-A1 · Mar 19, 2026 · US
This page is not indexed by search engines while we improve data quality.
Holz Markus patents
Holz Markus is listed as an inventor on 32 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Holz Markus |
| Total patents | 32 |
| First publication | Jun 16, 2016 |
| Latest publication | Mar 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Lithography system and method for operating a lithography system
US-2026036912-A1 · Feb 5, 2026 · US
Lithography apparatus and method for operating a lithography apparatus
US-2026023328-A1 · Jan 22, 2026 · US
System having a lithography apparatus and a number of electronics modules, and method for operating a system
US-2025370351-A1 · Dec 4, 2025 · US
Optical system and lithography system
US-2025314977-A1 · Oct 9, 2025 · US
Mirror arrangement with cooled mirror elements and lithography system
US-2025291176-A1 · Sep 18, 2025 · US
Assembly for an optical system
US-2025271781-A1 · Aug 28, 2025 · US
Euv multi-mirror arrangement
US-2025258437-A1 · Aug 14, 2025 · US
Method for generating a mathematical model for positioning individual mirrors of a facet mirror in an optical system
US-12164102-B2 · Dec 10, 2024 · US
Facet mirror for an illumination optical unit of a projection exposure apparatus
US-11789367-B2 · Oct 17, 2023 · US
Recent patents
Latest publications not already listed above.
Facet mirror for an illumination optical unit of a projection exposure apparatus
US-2022206398-A1 · Jun 30, 2022 · US
Method for generating a mathematical model for positioning individual mirrors of a facet mirror in an optical system
US-2022066196-A1 · Mar 3, 2022 · US
Method for producing an illumination system for an EUV projection exposure system, and illumination system
US-11048172-B2 · Jun 29, 2021 · US
Apparatus and method for operating an apparatus
US-10838307-B2 · Nov 17, 2020 · US
Control device
US-10678151-B2 · Jun 9, 2020 · US
Method for producing an illumination system for an euv projection exposure system, and illumination system
US-2020110340-A1 · Apr 9, 2020 · US
Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system
US-10514619-B2 · Dec 24, 2019 · US
Method for producing an illumination system for an EUV projection exposure system, and illumination system
US-10514608-B2 · Dec 24, 2019 · US
Apparatus and method for operating an apparatus
US-2019346772-A1 · Nov 14, 2019 · US
Control device
US-2019187574-A1 · Jun 20, 2019 · US
Lithography apparatus and method for operating a lithography apparatus
US-10261424-B2 · Apr 16, 2019 · US
Method for producing an illumination system for an euv projection exposure system, and illumination system
US-2018373158-A1 · Dec 27, 2018 · US
Mirror device
US-10101507-B2 · Oct 16, 2018 · US
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
US-10018803-B2 · Jul 10, 2018 · US
Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system
US-2018188656-A1 · Jul 5, 2018 · US
Device for determining a tilt angle of at least one mirror of a lithography system, and method
US-10007195-B2 · Jun 26, 2018 · US
Lithography apparatus and method for operating a lithography apparatus
US-2018107122-A1 · Apr 19, 2018 · US
Optical component
US-9851555-B2 · Dec 26, 2017 · US
Mirror device
US-2017276842-A1 · Sep 28, 2017 · US
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
US-2017038555-A1 · Feb 9, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 32 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70116 | 23 |
| G03F7/70075 | 19 |
| G03F7/7085 | 18 |
| G03F7/702 | 15 |
| G03F7/70141 | 12 |