Control device

Patent metadata

Field	Value
Publication number	US-10678151-B2
Application number	US-201916284143-A
Country	US
Kind code	B2
Filing date	Feb 25, 2019
Priority date	Aug 29, 2016
Publication date	Jun 9, 2020
Grant date	Jun 9, 2020

Abstract

A control device for an assembly having a plurality of sensors and/or actuators includes at least one first control unit which is designed to be vacuum-suitable, has a distributor for splitting and/or combining signals and has a converter for converting digital signals into analog signals and/or analog signals into digital signals.

First claim

What is claimed is:

1. A control device configured to be used in an assembly comprising a plurality of sensors and/or actuators, the control device comprising:
a first vacuum-suitable control unit comprising:
a distributor configured to: i) split signals; and/or ii) combine signals;
a converter configured to: i) convert digital signals into analog signals; and/or ii) convert analog signals into digital signals; and
a high-speed data connection to the first control unit in a signal-transmitting manner,

wherein the high-speed data connection comprises a vacuum bushing, and
wherein the control device has:
at least one purely digital input and/or at least one purely digital output; and
a plurality of analog inputs and/or a plurality of analog outputs.

2. The control device of claim 1 , further comprising a second control unit comprising a digital assembly connected to the first control unit in a data-transmitting manner.

3. The control device of claim 1 , wherein the high-speed data connection comprises at least one duplex data connection.

4. The control device of claim 1 , wherein the control device has:
a plurality of digital inputs and a plurality of analog outputs; and
more analog outputs than digital inputs.

5. The control device of claim 4 , wherein the control device has:
a plurality of analog inputs and a plurality of digital outputs; and
more analog inputs than digital outputs.

6. The control device of claim 1 , wherein the control device has:
a plurality of analog inputs and a plurality of digital outputs; and
more analog inputs than digital outputs.

7. The control device of claim 1 , further comprising at least one closed-loop control circuit overlapping a vacuum boundary.

8. An assembly, comprising:
a displaceable component in vacuo, the displaceable component comprising:
a plurality of sensors and/or a plurality of actuators; and
a control device according to claim 1 ,

wherein the control device is connected to the sensors and/or the actuators in a signal-transmitting manner.

9. A method of controlling the displacement positions of a plurality of components in a vacuum environment, the method comprising:
providing an assembly, comprising:
a displaceable component in vacuo, the displaceable component comprising:
a plurality of sensors and/or a plurality of actuators; and
a control device according to claim 1 , the control device connected to the sensors and/or the actuators in a signal-transmitting manner; and

generating control signals via the control device,
wherein digital signals are guided via a vacuum boundary.

10. An illumination optical unit, comprising:
an assembly, comprising:
a displaceable component in vacuo, the displaceable component comprising:
a plurality of sensors and/or a plurality of actuators; and
a control device according to claim 1 ,

wherein the control device is connected to the sensors and/or the actuators in a signal-transmitting manner, and the illumination optical unit is a projection exposure illumination optical unit.

11. An illumination system, comprising:
a radiation source configured to generate illumination radiation; and
an illumination optical unit comprising:
an assembly, comprising:
a displaceable component in vacuo, the displaceable component comprising:
a plurality of sensors and/or a plurality of actuators; and
a control device according to claim 1 ,

wherein the control device is connected to the sensors and/or the actuators in a signal-transmitting manner, and the illumination optical unit is a projection exposure illumination optical unit.

12. A projection optical unit, comprising:
an assembly, comprising:
a displaceable component in vacuo, the displaceable component comprising:
a plurality of sensors and/or a plurality of actuators; and
a control device according to claim 1 ,

wherein the control device is connected to the sensors and/or the actuators in a signal-transmitting manner, and the projection optical unit is a projection exposure projection optical unit.

13. An apparatus, comprising:
an illumination optical unit;
a projection optical unit; and
an assembly, comprising:
a displaceable component in vacuo, the displaceable component comprising:
a plurality of sensors and/or a plurality of actuators; and
a control device according to claim 1 ,

wherein the control device is connected to the sensors and/or the actuators in a signal-transmitting manner, and the apparatus is a microlithographic projection exposure apparatus.

14. A method of using a microlithographic projection exposure apparatus comprising an illumination optical unit, a projection optical unit and an assembly, the method comprising:
using the illumination optical unit to illuminate a reticle; and
using the projection optical unit to project a portion of the illuminated reticle onto a light-sensitive material,
wherein:
the assembly comprises:
a displaceable component in vacuo, the displaceable component comprising:
a plurality of sensors and/or a plurality of actuators; and
a control device according to claim 1 ; and

the control device is connected to the sensors and/or the actuators in a signal-transmitting manner.

15. A control device configured to be used in an assembly comprising a plurality of sensors and/or actuators, the control device comprising:
a first vacuum-suitable control unit comprising:
a distributor configured to: i) split signals; and/or ii) combine signals; and
a converter configured to: i) convert digital signals into analog signals; and/or ii) convert analog signals into digital signals,

wherein the control device has:
at least one purely digital input and/or at least one purely digital output; and
a plurality of analog inputs and/or a plurality of analog outputs,

wherein the control device has:
a plurality of digital inputs and a plurality of analog outputs; and
more analog outputs than digital inputs.

16. The control device of claim 15 , wherein the control device has:
a plurality of analog inputs and a plurality of digital outputs; and
more analog inputs than digital outputs.

17. The control device of claim 15 , further comprising at least one closed-loop control circuit overlapping a vacuum boundary.

18. An assembly, comprising:
a displaceable component in vacuo, the displaceable component comprising:
a plurality of sensors and/or a plurality of actuators; and
a control device according to claim 15 ,

wherein the control device is connected to the sensors and/or the actuators in a signal-transmitting manner.

19. A control device configured to be used in an assembly comprising a plurality of sensors and/or actuators, the control device comprising:
a first vacuum-suitable control unit comprising:
a distributor configured to: i) split signals; and/or ii) combine signals; and
a converter configured to: i) convert digital signals into analog signals; and/or ii) convert analog signals into digital signals,

wherein the control device has:
at least one purely digital input and/or at least one purely digital output; and
a plurality of analog inputs and/or a plurality of analog outputs,

wherein the control device has:
a plurality of analog inputs and a plurality of digital outputs; and
more analog inputs than digital outputs.

20. The control device of claim 19 , further comprising at least one closed-loop control circuit overlapping a vacuum boundary.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Holz Markus
• Horn Jan
• Syrowatka Klaus

Classifications

• G03F7/70991 Primary

  Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum · CPC title

• G03F7/70508

  Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus · CPC title

• G03F7/70258

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title

• G03F7/70141

  Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system · CPC title

• G03F7/70116

  Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets · CPC title